高感度振動検出のための同調質量付加型MEMSセンサの開発

Research Project

Project/Area Number	15K01225
Research Category	Grant-in-Aid for Scientific Research (C)
Allocation Type	Multi-year Fund
Section	一般
Research Field	Social systems engineering/Safety system
Research Institution	Toyohashi University of Technology
Principal Investigator	川島貴弘豊橋技術科学大学, 工学(系)研究科(研究院), 准教授 (50378270)
Project Period (FY)	2015-04-01 – 2018-03-31
Project Status	Adopted (Fiscal Year 2015)
Budget Amount *help	¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000) Fiscal Year 2017: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000) Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000) Fiscal Year 2015: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)