| Project/Area Number |
15K04620
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Nanomaterials engineering
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| Research Institution | The University of Tokyo |
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Principal Investigator |
Kamiko Masao 東京大学, 生産技術研究所, 助教 (80334366)
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| Research Collaborator |
HA Jae-Geun
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| Project Period (FY) |
2015-04-01 – 2019-03-31
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| Project Status |
Completed (Fiscal Year 2018)
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| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2017: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
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| Keywords | ナノ材料 / 自己組織化 / 結晶成長 / マイクロ・ナノデバイス / 脱濡れ / 微細加工 |
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| Outline of Final Research Achievements |
We have fabricated a wide variety of self-organized functional nano-structured materials, which have a unique shape and a high-quality crystalline structure, by using dewetting (or thermal agglomeration) phenomenon of thin films deposited by sputtering device having a high versatility. We have developed a cost-effective bottom-up fabrication tool for the functional nano-materials, in which the insertion of a thin seed layer between a substrate and functional layer promoted self-organization and generated good-quality film structure. Using this developed fabrication method, we also try to more precisely control of the size and shape of nanostructures, and we discussed a detailed mechanism of the dewetting phenomenon in this study based on the information obtained from a series of fabrication studies as mentioned before. Additionally, we attempted to improve functionality of the fabricated nano-structured materials by multilayering and intended structure control of the nano-materials.
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| Academic Significance and Societal Importance of the Research Achievements |
本研究により、生産性やコスト面に優れた成膜法（スパッタ法）を用いて作製した薄膜を熱することで脱濡れ（熱凝集）を施し、自己組織化によって良質な機能性ナノ材料を、従来の手法と比較して、比較的容易に得ることが可能となった。本作製手法の開発により、自己組織化形成技術としてナノ材料作製における選択肢が増え、より多くの研究従事者に利用され、応用されることで、新素材や新たな高密度・高機能素子の開発に繋がるものと考えられる。本研究により得られたナノ材料は、化学的に合成されたナノ粒子や、従来の脱濡れ手法により作製されたナノ材料に比べ、結晶構造有しているため、今後のナノ科学の機構解明にも役立つものと考えられる。
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