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Development of metal/oxide multilayer films showing self-propagating exothermic reaction with controllable heat generation performance

Research Project

Project/Area Number 15K04626
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Nanomaterials engineering
Research InstitutionUniversity of Hyogo

Principal Investigator

Inoue Shozo  兵庫県立大学, 工学研究科, 教授 (50193587)

Co-Investigator(Renkei-kenkyūsha) NAMAZU Takahiro  愛知工業大学, 工学部, 教授 (90347526)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2017: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2016: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2015: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Keywords多層薄膜 / スパッタリング / 自己伝播発熱反応
Outline of Final Research Achievements

The purpose of this study is to develop biocompatible nano-materials showing self-propagating exothermic reaction with controllable reaction behavior for medical applications. Ti/Si multilayer film can be a promising material, but its reactivity is so high that its reaction ignits with a very small mechanical stimulus such as tweezers picking. Therefore, we propose a Ti/SiOx multilayer film as an alternative to control the reactivity. As x increases up to 0.56, the Ti/SiOx multilayer films allow us to suppress an excessive reactivity without reducing heat emission. It was also found that SiO2 is formed together with Ti silicide during the reaction of Ti-SiOx solid state reaction.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (5 results)

All 2017 2016 2015

All Presentation (5 results) (of which Int'l Joint Research: 2 results)

  • [Presentation] Self-propagating exothermic reaction behavior of Ti/SiOx multilayer films2017

    • Author(s)
      S. Inoue, M. Mizutani, K. Inoue, K. Yoshiki and T. Namazu
    • Organizer
      The 14th International Symposium on Sputtering and Plasma Processes, ISSP2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ti-SiOx多層薄膜の自己伝播発熱反応におよぼす酸素濃度の影響2017

    • Author(s)
      水谷光克, 井上敬太, 吉木啓介, 生津資大, 井上尚三
    • Organizer
      2017年度精密工学会秋季大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 多源スパッタ法により作製したTi-SiOx多層薄膜の自己伝播発熱反応挙動2016

    • Author(s)
      井上尚三,井上敬太,金築俊介,三宅修吾,生津資大
    • Organizer
      2016年度精密工学会秋季大会学術講演会
    • Place of Presentation
      茨城大学水戸キャンパス (茨城県)
    • Year and Date
      2016-09-06
    • Related Report
      2016 Research-status Report
  • [Presentation] Ti/SiOおよびTi/Siスパッタ多層膜の発熱性能比較2015

    • Author(s)
      井上敬太,金築俊介,三宅修吾,井上尚三,生津資大
    • Organizer
      日本機械学会2015年度年次大会
    • Place of Presentation
      北海道大学札幌キャンパス (北海道 札幌市)
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] Self-propagating exothermic reaction behavior of Ti/Si multilayer films2015

    • Author(s)
      S. Inoue, S. Minamibata, K. Yoshiki and T. Namazu
    • Organizer
      The 13th International Symposium on Sputtering and Plasma Processes, ISSP2015
    • Place of Presentation
      京都リサーチパーク(京都府 京都市)
    • Year and Date
      2015-07-08
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research

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Published: 2015-04-16   Modified: 2019-03-29  

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