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Study on low-voltage self-oscillation devices based on out-of-plane threshold switching in phase transition oxide thin films

Research Project

Project/Area Number 15K04652
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Applied materials
Research InstitutionTokai University

Principal Investigator

Okimura Kunio  東海大学, 工学部, 教授 (00194473)

Research Collaborator SURUZ MIAN MD.  
AZHAN NURUL HANIS  
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2017: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2015: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywords相転移酸化物 / バナジウム酸化物 / 絶縁体金属転移 / 負性抵抗特性 / しきい値スイッチング / 自励発振現象 / 結晶成長 / 薄膜堆積 / 絶縁体-金属転移 / TiNバッファー層 / 配向成長 / プローバー圧 / 中間状態 / 二酸化バナジウム薄膜 / 相転移現象 / 積層構造素子 / 配向性TiN電極 / 絶縁体-金属転移
Outline of Final Research Achievements

In this project, we studied self-oscillation phenomena of layered devices with vanadium dioxide (VO2) films which show insulator-metal transition (IMT). We fabricated VO2 films on (111)-oriented TiN metallic layers on Ti/Si substrates at low temperatures. By using the VO2/TiN/Ti/Si layered structure, we demonstarated low voltage threshold switching at 1.6 V with negative resistance region which is necessary for self-oscillation. By adjusting contact probes pressure on VO2 and TiN, we realized self-oscillation with controlled values of frequency. We realized oscillation with the world highest value of 15 MHz under probes pressure of 60 MPa. The obtained results are considered to be important for realizing stable oscillation devices without strcture changes.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (31 results)

All 2018 2017 2016 2015 Other

All Journal Article (11 results) (of which Int'l Joint Research: 5 results,  Peer Reviewed: 11 results,  Acknowledgement Compliant: 5 results,  Open Access: 2 results) Presentation (17 results) (of which Int'l Joint Research: 8 results) Remarks (3 results)

  • [Journal Article] Impact of (111)-oriented TiN conductive layers for the growth of vanadium dioxide films and the effect of grain boundary diffusions2018

    • Author(s)
      omohiro Aoto, Kenta Sato, Md. Suruz Mian, and Kunio Okimura
    • Journal Title

      Jouranal of Alloys and Compounds

      Volume: 748 Pages: 87-92

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-temperature growth of VO2 films on transparent ZnO/glass and Al-doped ZnO/glass and their optical transition properties2018

    • Author(s)
      Kenta Sato, Hiroaki Hoshino, Md. Suruz Mian, and Kunio Okimura
    • Journal Title

      Thin Solid Films

      Volume: 651 Pages: 91-96

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Recrystallization of VO2 films into (011)-oriented micrometer-sized grains on Al2O3 (001) in biased reactive sputtering2017

    • Author(s)
      Nurul Hanis Azhan, K. Okimura, K. Matsuoka, Mustapha Zaghrioui, and J. Sakai
    • Journal Title

      Journal of Vacuum Science and Technology A

      Volume: 35 Issue: 6

    • DOI

      10.1116/1.4989669

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Comparative study of TiN and TiN/Ti as bottom electrodes for layered type devices with phase transition VO2 films2017

    • Author(s)
      Md. Suruz Mian, , Kunio Okimura, and Masao Kohzaki
    • Journal Title

      Thin Solid Films

      Volume: 636 Pages: 63-69

    • DOI

      10.1016/j.tsf.2017.05.027

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of amorphous silicon nitride thin films by radio-frequency sputtering assisted by an inductively coupled plasma2017

    • Author(s)
      Y. Ishii, T. Kaneko, K. Okimura, H. Shindo, and M. Isomura
    • Journal Title

      Thin Solid Films

      Volume: 624 Pages: 49-53

    • DOI

      10.1016/j.tsf.2017.01.022

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Oriented Growth of VO2(B) Thin Films on Mo Foils by Reactive Sputtering for Lithium Ion Batteries2016

    • Author(s)
      Kui Su, Takuya Naka, Nurul Hanis Azhan, Kunio Okimura, and Masashi Higuchi
    • Journal Title

      Thin Solid Films

      Volume: 616 Pages: 95-100

    • DOI

      10.1016/j.tsf.2016.07.056

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Dynamically Babinet-invertible metasurface: a capacitive-inductive reconfigurable filter for terahertz waves using vanadium-dioxide metal-insulator transition2016

    • Author(s)
      Yoshiro Urade, Yosuke Nakata, Kunio Okimura, Toshihiro Nakanishi, Fumiaki Miyamaru, Mitsuo Wada Takeda, and Masao Kitano
    • Journal Title

      Optics Express

      Volume: 24 Issue: 5 Pages: 4405-4410

    • DOI

      10.1364/oe.24.004405

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Anisotropic Babinet-Invertible Metasurfaces to Realize Transmission-Reflection Switching for Orthogonal Polarizations of Light2016

    • Author(s)
      Yosuke Nakata, Yoshiro Urade, Kunio Okimura, Toshihiro Nakanishi, Fumiaki Miyamaru, Mitsuo W. Takeda, and Masao Kitano
    • Journal Title

      Physical Review Applied

      Volume: 6 Issue: 4 Pages: 044022-044022

    • DOI

      10.1103/physrevapplied.6.044022

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Large modification in insulator-metal transition of VO2 films grown on Al2O3 (001) by high energy ion irradiation in biased reactive sputtering2016

    • Author(s)
      Nurul Hanis Azhan, Kunio Okimura, Yoshiyuki Ohtsubo, Shin-ichi Kimura, Mustapha Zaghrioui, and Joe Sakai
    • Journal Title

      Journal of Applied Physics

      Volume: 119 Issue: 5

    • DOI

      10.1063/1.4941348

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Self-oscillation up to 9 MHz based on voltage triggered switching in VO2/TiN point contact junctions2015

    • Author(s)
      Md. Suruz Mian, Kunio Okimura, Joe Sakai
    • Journal Title

      Journal of Applied Physics

      Volume: 117 Issue: 21

    • DOI

      10.1063/1.4922122

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Radio frequency substrate biasing effects on the insulator-metal transition behavior of reactively sputtered VO2 films on sapphire (001)2015

    • Author(s)
      Nurul Hanis Azhan, Ku Sui, Kunio Okimura, and Joe Sakai
    • Journal Title

      Journal of Applied Physics

      Volume: 117 Issue: 18

    • DOI

      10.1063/1.4921105

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] TiN(111)配向基板の導入による相転移VO2薄膜の配向成長と粒界拡散効果2018

    • Author(s)
      青戸 智寛, 沖村 邦雄
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] TiN導電層上VO2薄膜における自励発振特性の電極探針荷重依存性2018

    • Author(s)
      戸部 龍太, 青戸 智寛, 北川 陽介, 間宮 圭亮,沖村 邦雄
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] VO2/TiN/Ti/Si積層構造デバイスにおけるマルチステップ発振2017

    • Author(s)
      青戸智寛,佐藤賢太,モハメッド シュルズ ミヤ,沖村邦雄
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ ヨコハマ
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Phase Transition Properties of VO2 Thin Films on Conductive TiN Layers2017

    • Author(s)
      R. Tobe, T, Aoto, K. Sato, Md. Suruz Mian, and K. Okimura
    • Organizer
      Micro/Nano Technology Center International Symposium (mntcis2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electrical and optical properties of VO2 films deposited on conductive Al:ZnO layer2017

    • Author(s)
      Kenta Sato, Hiroaki Hoshino, Md. Suruz Mian, Kunio Okimura, Yoshio Yasumori
    • Organizer
      The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Self-oscillation characteristics of oriented VO2 films on conductive TiN/Ti layers2017

    • Author(s)
      Tomohiro Aoto, Kenta Sato, Md. Suruz Mian, Kunio Okimura
    • Organizer
      The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Oriented growth of VO2 thin films on conductive TiN/Ti layers and thiir self-oscillations phenomena2017

    • Author(s)
      T. Aoto, K. Sato, M.S. Mian, and K. Okimura
    • Organizer
      The 14th International Symposium on Sputtering & Plasma Processes (ISSP 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Growth of VO2 thin films on transparent conductive Al-doped ZnO films on glass substrates2017

    • Author(s)
      H. Hoshino, K. Sato, M.S. Mian, Y. Yasumori, and K. Okimura
    • Organizer
      The 14th International Symposium on Sputtering & Plasma Processes (ISSP 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 相転移VO2における金属的状態間を遷移する発振現象2017

    • Author(s)
      青戸 智寛, 沖村 邦雄
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Low temperature growth of VO2 films on ZnO/glass and their transition properties2016

    • Author(s)
      K. Sato, H. Hoshino, Md. Suruz Mian, and K. Okimura
    • Organizer
      The 26th Annual meeting of MRS-J International Symposium: Advanced Functional Oxide Materials
    • Place of Presentation
      Yokohama Port Opening Plaza
    • Year and Date
      2016-12-19
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] 導電性TiN層上への相転移VO2薄膜の配向成長と転移特性評価2016

    • Author(s)
      青戸智寛, 田邊祐大, 中村拓也, 佐藤賢太, モハメッド シュルズミヤ,沖村邦雄
    • Organizer
      第36回表面科学学術講演会・第57回真空に関する連合講演会(真空・表面合同講演会2016)
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2016-11-29
    • Related Report
      2016 Research-status Report
  • [Presentation] ZnO/glass上への反応性スパッタ法によるVO2薄膜の低温成長と特性評価2016

    • Author(s)
      佐藤賢太,星野寛明,モハメッド シュルズミヤ,沖村邦雄
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ・新潟
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] Characteristic μm-sized VO2 domains grown on Al2O3 (001) deposited under particular substrate biasing conditions2016

    • Author(s)
      Nurul Hanis Azhan, Kunio Okimura, Mustapha Zaghrioui, and Joe Sakai
    • Organizer
      The 18th International Conference on Crystal Growth and Epitaxy (ICCGE18)
    • Place of Presentation
      Nagoya International Convention Center
    • Year and Date
      2016-08-07
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] 導電性ITO層上に成長したM2相VO2薄膜のIMT特性及び自励発振特性2016

    • Author(s)
      モハメッド シュルズミヤ,佐藤賢太,按田祐輔,椎名庸介,沖村邦雄,坂井 穣
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] Voltage induced electrical oscillation in VO2-based layered structure device2015

    • Author(s)
      Md. Suruz Mian, Kunio Okimura and Joe Sakai
    • Organizer
      14th International Union of Materials Research Societies – International Conference on Advanced Materials (IUMRS-ICAM)
    • Place of Presentation
      Jeju International Convention Center, Korea
    • Year and Date
      2015-10-25
    • Related Report
      2015 Research-status Report
  • [Presentation] VO2/Ti/Si点接触積層型デバイスにおける自励発振現象のパラメータ依存性2015

    • Author(s)
      モハメッド シュルズミヤ,沖村邦雄,坂井 穣
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-14
    • Related Report
      2015 Research-status Report
  • [Presentation] High frequency self-oscillations in VO2 based out-of-plane device structure2015

    • Author(s)
      Md. Suruz Mian, Kunio Okimura, Joe Sakai
    • Organizer
      The 13th International Symposium on Sputtering & Plasma Processes (ISSP 2015)
    • Place of Presentation
      Kyoto Research Park
    • Year and Date
      2015-07-08
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Remarks] 沖村研究室ホームページ

    • URL

      http://www.ei.u-tokai.ac.jp/Okimura-Lab/

    • Related Report
      2017 Annual Research Report
  • [Remarks] 東海大学工学部電気電子工学科沖村研究室

    • URL

      http://www.ei.u-tokai.ac.jp/Okimura-lab/

    • Related Report
      2016 Research-status Report
  • [Remarks] http://www.ei.u-tokai.ac.jp/Okimura-lab/

    • Related Report
      2015 Research-status Report

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Published: 2015-04-16   Modified: 2019-03-29  

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