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Development of an environmental reflection high-energy electron diffraction apparatus for in-situ surface structural analysis under gas pressure

Research Project

Project/Area Number 15K04675
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionNagoya University

Principal Investigator

Nakahara Hitoshi  名古屋大学, 工学研究科, 助教 (20293649)

Co-Investigator(Kenkyū-buntansha) 堀尾 吉已  大同大学, 工学部, 教授 (00238792)
齋藤 弥八  名古屋大学, 工学研究科, 教授 (90144203)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2017: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2016: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywords反射高速電子回折装置 / 表面構造解析 / 気相成長 / 触媒反応 / 反射高速電子回折 / 差動排気 / 化学気相成長
Outline of Final Research Achievements

An environmental reflection high-energy electron diffraction (ERHEED) apparatus with 2-stage lens and differential pumping system on both of incident and exit sides were developed, which is aimed to analyze surface crystalline structures under gas pressure. The exit side lens system could not operate properly, however, incident side lens system worked as designed and it was demonstrated that the developed ERHEED can obtain beam rocking patterns in gas atmosphere that is more than one order of higher pressure than conventional differential pumped RHEED system. With this new equipment, in-situ structural analysis of the reacting surfaces such as chemical vapor deposition and catalytic reaction becomes possible. Thus it is expected to be contribute to the development of novel materials.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (25 results)

All 2018 2017 2016 2015

All Journal Article (6 results) (of which Peer Reviewed: 6 results,  Open Access: 4 results,  Acknowledgement Compliant: 1 results) Presentation (18 results) (of which Int'l Joint Research: 11 results,  Invited: 1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Development of a Compact FE-SEM and X-Ray Microscope with a Carbon Nanotube Electron Source2017

    • Author(s)
      M. Irita and S. Yamazaki and H. Nakahara and Y. Saito
    • Journal Title

      Materials Science and Engineering

      Volume: 304 Pages: 012006-012006

    • DOI

      10.1088/1757-899x/304/1/012006

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] In-situ TEM Study on Structural Change and Light Emission of a Multiwall Carbon Nanotube during Joule Heating2017

    • Author(s)
      K. Nishikawa and K. Asaka and H. Nakahara and Y. Saito
    • Journal Title

      Materials Science and Engineering

      Volume: 304 Pages: 012011-012011

    • DOI

      10.1088/1757-899x/304/1/012011

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] <i>In Situ </i>Study on Oxygen Etching of Surface Buffer Layer on SiC(0001) Terraces2017

    • Author(s)
      Chenxing Wang, Hitoshi Nakahara and Yahachi Saito
    • Journal Title

      e-Journal of Surface Science and Nanotechnology

      Volume: 15 Issue: 0 Pages: 13-18

    • DOI

      10.1380/ejssnt.2017.13

    • NAID

      130005404445

    • ISSN
      1348-0391
    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] In situ SEM/STM Observations and Growth Control of Monolayer Graphene on SiC (0001) Wide Terraces2016

    • Author(s)
      Chenxing Wang, Hitoshi Nakahara and Yahachi Saito
    • Journal Title

      Surface and Interface Analysis

      Volume: 48 Issue: 11 Pages: 1221-1225

    • DOI

      10.1002/sia.6098

    • NAID

      120006370574

    • Related Report
      2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] Field Emission Patterns Showing Symmetry of Electronic States in Graphene Edges2016

    • Author(s)
      Noboru Yokoyama, Kazuya Nakakubo, Kohji Iwata, Koji Asaka, Hitoshi Nakahara and Yahachi Saito
    • Journal Title

      Surface and Interface Analysis

      Volume: 48 Issue: 11 Pages: 1217-1220

    • DOI

      10.1002/sia.6089

    • NAID

      120006370573

    • Related Report
      2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] <i>In</i>-<i>Situ </i>RHEED Study on Graphene Growth During Chemical Vapor Deposition2016

    • Author(s)
      Hitoshi Nakahara, Sotaro Fujita, Takuro Minato, Yahachi Saito
    • Journal Title

      e-Journal of Surface Science and Nanotechnology

      Volume: 14 Issue: 0 Pages: 39-42

    • DOI

      10.1380/ejssnt.2016.39

    • NAID

      130005126914

    • ISSN
      1348-0391
    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] 極希薄酸素エッチング処理した{SiC}上グラフェンナノリボンの電気伝導特性2018

    • Author(s)
      水野 悠也、伊藤 誠一朗、堀部 真史、中原 仁、齋藤 弥八
    • Organizer
      第63回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] SEM/STM/RHEED Study on Graphene Growth and Oxygen Etching on 6H-SiC(0001) Surface2017

    • Author(s)
      Hitoshi Nakahara, Chenxing Wang and Yahachi Saito
    • Organizer
      Symposium on Surface and Nano Science 2017
    • Place of Presentation
      新富良野プリンスホテル
    • Year and Date
      2017-01-14
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Development of an Environmental RHEED and its Applications to CVD Growth Monitoring2017

    • Author(s)
      Hitoshi Nakahara and Yoshimi Horio and Yahachi Saito
    • Organizer
      11th International Symposium on Atomic Level Characterizations for New Materials and Devices 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Compact Nano-Resolution X-Ray Microscope Based on Carbon Nanotube FE-SEM2017

    • Author(s)
      Masaru Irita and Shintarou Yamazaki and Hitoshi Nakahara and Yahachi Saito
    • Organizer
      11th International Symposium on Atomic Level Characterizations for New Materials and Devices 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Spin Polarization of Field-Emitted Electrons from Graphene Edges2017

    • Author(s)
      Shigekazu Nagai and Hiromu Ikemizu and Kazuya Kunoh and Koichi Hata and Yudai Watanabe and Toru Hoshino and Masaru Irita and Hitoshi Nakahara and Yahachi Saito
    • Organizer
      11th International Symposium on Atomic Level Characterizations for New Materials and Devices 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of a Compact FE-SEM and X-Ray Microscope with a Carbon Nanotube Electron Source2017

    • Author(s)
      M. Irita and S. Yamazaki and H. Nakahara and Y. Saito
    • Organizer
      The 7th Meeting of the International Union of Microbeam Analyis Societies
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In-situ TEM Study on Structural Change and Light Emission of a Multiwall Carbon Nanotube during Joule Heating2017

    • Author(s)
      Koushi Nishikawa and Koji Asaka and Hitoshi Nakahara and Yahachi Saito
    • Organizer
      The 7th Meeting of the International Union of Microbeam Analyis Societies
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of Desktop High-Resolution X-Ray Microscope with a Single Carbon Nanotube Emitter2017

    • Author(s)
      Shintaro Yamazaki and Masaru Irita and Hitoshi Nakahara and Koji Asaka and Yahachi Saito
    • Organizer
      International Conference on Materials and Systems for Sustainability
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In-situ TEM Study on Structural Changes of a Multiwall Carbon Nanotube under Applying an Electrical Current2017

    • Author(s)
      Kentaro Yamauchi and Koji Asaka and Hitoshi Nakahara and Yahachi Saito
    • Organizer
      International Conference on Materials and Systems for Sustainability
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Field Emission and Field Ion Microscope Images Reflecting Electronic Orbitals of a Graphene Edge2017

    • Author(s)
      Toru Hoshino and Yudai Watanabe and Masaru Irita and Hitoshi Nakahara and Koji Asaka and Yahachi Saito
    • Organizer
      International Conference on Materials and Systems for Sustainability
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 4探針法による{SiC}基板上グラフェンナノリボンの電気伝導特性の評価2017

    • Author(s)
      堀部 真史、伊藤 誠一郎、水野 悠也、中原 仁、安坂 幸師、齋藤 弥八
    • Organizer
      第17回日本表面科学会中部支部学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] カーボンナノチューブを用いた電界電子放出型大電流電子源の作製2017

    • Author(s)
      神村 直輝、當間 郷史、入田 賢、中原 仁、安坂 幸師、齋藤 弥八
    • Organizer
      第17回日本表面科学会中部支部学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] グラフェン成長その場観察 ーCVD法・SiC熱分解法ー2017

    • Author(s)
      中原 仁
    • Organizer
      第5回「次世代デバイス実現に向けた先端二次元物質の物理と化学」研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 多層および酸化グラフェンエミッタからの電界放出像2016

    • Author(s)
      渡邉 雄大, 星野 徹, 横山 昂, 入田 賢, 中原 仁, 安坂 幸師, 齋藤 弥八, 仁科 勇太
    • Organizer
      2016 真空・表面科学合同講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2016-11-30
    • Related Report
      2016 Research-status Report
  • [Presentation] In situ Study on Selective Oxygen Etching of Buffer Layer on SiC (0001) Terraces2016

    • Author(s)
      王 辰星, 中原 仁, 齋藤 弥八
    • Organizer
      2016 真空・表面科学合同講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2016-11-29
    • Related Report
      2016 Research-status Report
  • [Presentation] In-situ RHEED Study on Graphene CVD Growth on Metal Catalysts2016

    • Author(s)
      Hitoshi Nakahara, Sotaro Fujita, Takuro Minato, Yahachi Saito
    • Organizer
      Symposium on Surface and Nano Science 2016
    • Place of Presentation
      富良野
    • Year and Date
      2016-01-14
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] その場反射高速電子回折を用いたグラフェン触媒化学気相成長の研究2015

    • Author(s)
      藤田 宗太朗、湊 拓郎、中原 仁、齋藤 弥八
    • Organizer
      2015年真空・表面科学合同講演会
    • Place of Presentation
      つくば
    • Year and Date
      2015-12-02
    • Related Report
      2015 Research-status Report
  • [Presentation] In-situ RHEED Study on Graphene Growth during Catalytic Chemical Vapor Deposition2015

    • Author(s)
      Hitoshi Nakahara, Sotaro Fujita, Takuro Minato, Yahachi Saito
    • Organizer
      10th International Symposium on Atomic Level Characterizations for New Materials and Devices 2015
    • Place of Presentation
      松江
    • Year and Date
      2015-10-28
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Patent(Industrial Property Rights)] 差動排気機構を有する反射電子回折装置2015

    • Inventor(s)
      中原 仁、堀尾 吉已
    • Industrial Property Rights Holder
      名古屋大学、大同学園
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-121398
    • Filing Date
      2015-06-16
    • Related Report
      2015 Research-status Report

URL: 

Published: 2015-04-16   Modified: 2019-03-29  

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