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Development and application of optical model for object recognition with the polarization fingerprint

Research Project

Project/Area Number 15K04694
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Optical engineering, Photon science
Research InstitutionUniversity of Yamanashi

Principal Investigator

JIN Lianhua  山梨大学, 大学院総合研究部, 准教授 (40384656)

Co-Investigator(Kenkyū-buntansha) 近藤 英一  山梨大学, 大学院総合研究部, 教授 (70304871)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2017: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywordsscattering / polarization / 光散乱 / 2次元計測 / ラフな表面 / 散乱計測
Outline of Final Research Achievements

The intensity distribution and polarization state of scattering depend on the sample surface. The polarization information in the scattered light differs according to the refractive index and surface roughness of the sample, and the wavelength of the probe light. "Polarized light fingerprint" characterizes the polarization properties of scattered light spreading in a three-dimensional space as a two-dimensional pattern. In this research, to have clear relationship of "polarized light fingerprint" with several factors, we carried on from the measurement system development to fundamental measurements and analysis, and found certain theories on the scattering surface.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (16 results)

All 2018 2017 2016 2015 Other

All Journal Article (4 results) (of which Int'l Joint Research: 4 results,  Peer Reviewed: 4 results,  Open Access: 1 results) Presentation (10 results) (of which Int'l Joint Research: 4 results,  Invited: 3 results) Remarks (2 results)

  • [Journal Article] Extracting calibrated parameters from imaging ellipsometric measurement2017

    • Author(s)
      L. Jin, T. Tanaka, E. Kondoh, B. Gelloz, and M. Uehara
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 11 Pages: 116602-116602

    • DOI

      10.7567/jjap.56.116602

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Polarization characteristics of diffraction scattering from metal rough surface2017

    • Author(s)
      L. Jin, T. Takaguchi, E. Kondoh and B. Gelloz
    • Journal Title

      Applied Surface Science

      Volume: 421 Pages: 565-570

    • DOI

      10.1016/j.apsusc.2016.10.142

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Rotatable Offner imaging system for ellipsometric measurement2017

    • Author(s)
      L. Jin, T. Tanaka, E. Kondoh, B. Gelloz, K. Sano, I. Fujio, Y. Kajiyama, and M. Uehara
    • Journal Title

      Rev. Sci. Instrum.

      Volume: 88 Issue: 1 Pages: R1-R6

    • DOI

      10.1149/2.0321612jss

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Polarization characteristics of scattered light from macroscopically rough surfaces2015

    • Author(s)
      L. Jin, K. Yamaguchi, M. Watanabe, S. Hira, E. Kondoh, and B. Gelloz
    • Journal Title

      Optical Review

      Volume: 22 Issue: 4 Pages: 511-520

    • DOI

      10.1007/s10043-015-0117-2

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] イメージングエリプソメトリーにおけるNAの影響2018

    • Author(s)
      金 蓮花,菅尾 亮介,上原 誠
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 高精度イメージングエリプソメトリー2018

    • Author(s)
      金 蓮花
    • Organizer
      精密工学会2018年度春季大会,シンポジウム「偏光計測の基礎と応用」
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] ラフな表面における散乱光の偏光特性の波長依存性2017

    • Author(s)
      金 蓮花,周 聡,近藤 英一
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県横浜市西区みなとみらい パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Polarization Dispersion of Scattering from Macroscopically Rough Surface2017

    • Author(s)
      L. Jin, C. Zhou, and E. Kondoh
    • Organizer
      The 24th congress of the International Commission of Optics
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 広範囲・高分解能・高精度イメージングエリプソメータの開発2017

    • Author(s)
      金 蓮花,上原 誠
    • Organizer
      日本光学会年次学術講演会Optics & Photonics Japan 2017
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Extraction method of polarization properties of the individual components of a layered system and its application2016

    • Author(s)
      Lianhua Jin
    • Organizer
      International Symposium on Optomechtronic Technology (ISOT2016)
    • Place of Presentation
      東京、板橋区大山東町 板橋区立文化会館
    • Year and Date
      2016-11-07
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] エリプソメトリ測定によるSiウェハ表面の粒子検出評価2016

    • Author(s)
      鈴木 雄也,近藤 英一,渡邉 満洋,金 蓮花,濵田 聡美,嶋 昇平,檜山 浩國
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      新潟県新潟市朱鷺メッセ
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] Polarization characteristics of diffraction scattering from metal rough surface2016

    • Author(s)
      Lianhua Jin, Takuma Taguchi, and Eiichi Kondoh
    • Organizer
      7th International Conference on Spectroscopic Ellipsometry
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2016-06-06
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Development of the imaging ellipsometer with high lateral resolution for large area measurement2016

    • Author(s)
      Lianhua Jin, Kazuo Sano, Isao Fujio, and Makoto Uehara
    • Organizer
      7th International Conference on Spectroscopic Ellipsometry
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2016-06-06
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] ラフな表面による回折散乱光の偏光特性2016

    • Author(s)
      金 蓮花,田口 拓馬,近藤 英一
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学(東京都・目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Remarks] 山梨大学大学院 総合研究部 工学域機械工学系(情報メカトロ二クス工学)

    • URL

      https://nerdb-ap.yamanashi.ac.jp/tmp/33660/profile.html

    • Related Report
      2017 Annual Research Report
  • [Remarks] 山梨大学研究者総覧

    • URL

      http://erdb.yamanashi.ac.jp/rdb/A_DispDetail.Scholar?fid=0&id=0A0A3CE32AB61572

    • Related Report
      2016 Research-status Report 2015 Research-status Report

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Published: 2015-04-16   Modified: 2019-03-29  

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