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Fabrication and evaluation of infrared element by low-temperature imprint processing with sol-gel method

Research Project

Project/Area Number 15K04698
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Optical engineering, Photon science
Research InstitutionThe University of Shiga Prefecture

Principal Investigator

Yamada Itsunari  滋賀県立大学, 工学部, 准教授 (40586210)

Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2017: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2016: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Keywordsゾル-ゲル法 / インプリント法 / ワイヤグリッド偏光子 / ゾル-ゲル法 / ゾル‐ゲル法 / インプリント加工
Outline of Final Research Achievements

An infrared wire-grid polarizer consisting of an Al grating and a sol-gel-derived zirconia grating film was fabricated by imprinting using a silicone mold, a sol-gel method, and Al shadow coating processes. The Al grating with a pitch of 400 nm and a thickness of around 100 nm was successfully obtained on the zirconia grating film. The fabricated polarizer exhibited a polarization function with a TM transmittance greater than that of the Si substrate in the 4.2 ~ 5.3 um wavelength range, because the zirconia film acted as an antireflection film, and an extinction ratio of more than 20 dB in the 2.5 ~ 7.8 um wavelength range. The experiment verified that imprinting onto a sol is very effective for the low-cost fabrication of infrared polarizers.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (16 results)

All 2017 2016 2015 2012

All Journal Article (5 results) (of which Peer Reviewed: 5 results) Presentation (11 results) (of which Int'l Joint Research: 4 results)

  • [Journal Article] Infrared properties of sol-gel derived zirconia film2017

    • Author(s)
      I. Yamada, H. Torii, and Y. Ishihara
    • Journal Title

      Optical Engineering

      Volume: 56 Issue: 7 Pages: 077104-077104

    • DOI

      10.1117/1.oe.56.7.077104

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Sol-gel zirconia diffraction grating using a soft imprinting process2017

    • Author(s)
      I. Yamada and Y. Ikeda
    • Journal Title

      Applied Optics

      Volume: 56 Issue: 17 Pages: 5054-5059

    • DOI

      10.1364/ao.56.005054

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Retardation of sol-gel titanium oxide with imprinted grating structure2017

    • Author(s)
      I. Yamada, Y. Ishihara, and T. Akiyama
    • Journal Title

      Optical Engineering

      Volume: 56 Issue: 1 Pages: 017108-017108

    • DOI

      10.1117/1.oe.56.1.017108

    • Related Report
      2017 Annual Research Report 2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication of infrared wire-grid polarizer by sol-gel method and soft imprint lithography2016

    • Author(s)
      I. Yamada and Y. Ishihara
    • Journal Title

      Applied Physics Express

      Volume: 9 Issue: 5 Pages: 052202-052202

    • DOI

      10.7567/apex.9.052202

    • NAID

      210000137882

    • Related Report
      2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] Infrared Polarizer Fabrication by Imprinting on Sb-Ge-Sn-S Chalcogenide Glass2012

    • Author(s)
      I. Yamada, N. Yamashita, K. Tani, T. Einishi, M. Saito, K. Fukumi, and J. Nishii
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51 Issue: 12R Pages: 12201-12201

    • DOI

      10.1143/jjap.50.121603

    • NAID

      40019137844

    • Related Report
      2015 Research-status Report
    • Peer Reviewed
  • [Presentation] Fabrication of Silicone Grating by Two-Beam Interference Method and Imprint Lithography2017

    • Author(s)
      Y. Ikeda, T. Higuchi and *I. Yamada
    • Organizer
      The 30th International Microprocesses and Nanotechnology Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Infrared wire-grid polarizer with sol-gel antireflection films on both sides2017

    • Author(s)
      I. Yamada and Y. Ishihara
    • Organizer
      Photonics Prague 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Infrared wire-grid polarizer with sol-gel zirconia grating2017

    • Author(s)
      I. Yamada and Y. Ishihara
    • Organizer
      SPIE Integrated Photonics: Materials, Devices, and Applications IV
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ゾル-ゲル法を導入した赤外用ワイヤグリッド偏光子の作製と評価2017

    • Author(s)
      池田優祐,山田逸成
    • Organizer
      日本光学会年次学術講演会Optics & Photonics Japan 2017
    • Related Report
      2017 Annual Research Report
  • [Presentation] ゾル-ゲル法とインプリント法による回折格子の作製2017

    • Author(s)
      池田優祐,山田逸成
    • Organizer
      第76回応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Incident angle dependence of WSi wire-grid polarizer2016

    • Author(s)
      I. Yamada
    • Organizer
      13th International Conference on Mid-Infrared Optoelectronics: Materials and Devices
    • Place of Presentation
      Beijing, China
    • Year and Date
      2016-09-20
    • Related Report
      2016 Research-status Report
  • [Presentation] ゾル-ゲル法とインプリント法による赤外用ワイヤグリッド偏光子の作製"2016

    • Author(s)
      池田優祐,石原吉朗,*山田逸成
    • Organizer
      第75回応用物理学会学術講演会
    • Place of Presentation
      朱鷺メッセ
    • Year and Date
      2016-09-15
    • Related Report
      2016 Research-status Report
  • [Presentation] Fabrication and evaluation of reflective wave plate with subwavelength grating structure2016

    • Author(s)
      I. Yamada
    • Organizer
      SPIE Photonics Europe 2016
    • Place of Presentation
      Brussels, Belgium
    • Year and Date
      2016-04-04
    • Related Report
      2016 Research-status Report
  • [Presentation] シリコンのアルカリエッチングを利用した赤外用ワイヤグリッド偏光子の作製2016

    • Author(s)
      山田逸成,吉田黎
    • Organizer
      第63回応用物理学関係連合講演会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2016-03-22
    • Related Report
      2015 Research-status Report
  • [Presentation] 陽極酸化を用いた反射型偏光波長フィルタの作製と入射角依存性評価2015

    • Author(s)
      姫野峻,柳沢淳一,山田逸成
    • Organizer
      日本光学会年次学術講演会Optics & Photonics Japan 2015
    • Place of Presentation
      筑波大学東京キャンパス文京校舎
    • Year and Date
      2015-10-30
    • Related Report
      2015 Research-status Report
  • [Presentation] THz wire-grid polarizers with Al gratings2015

    • Author(s)
      R. Yoshida, I. Yamada, J. Yanagisawa, K. Takano, M. Hangyo, M. Saito, and W. Watanabe
    • Organizer
      The Pacific Rim Conference on Lasers and Electro-Optics 2015
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2015-08-27
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research

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Published: 2015-04-16   Modified: 2019-03-29  

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