Femtosecond laser ablation studied by time-resolved soft X-ray small-angle scattering using X-ray laser
| Project/Area Number |
15K04706
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Optical engineering, Photon science
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| Research Institution | Japan Atomic Energy Agency |
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Principal Investigator |
KUMADA Takayuki 国立研究開発法人日本原子力研究開発機構, 国立研究開発法人日本原子力研究開発機構・原子力科学研究部門物質科学研究センター, リーダー (00343939)
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| Co-Investigator(Renkei-kenkyūsha) |
NISHIKINO Masaharu 国立研究開発法人量子科学技術研究開発機構, 関西光科学研究所, リーダー (70370450)
HASEGAWA Noboru 国立研究開発法人量子科学技術研究開発機構, 関西光科学研究所, 主幹研究員 (50360409)
SUEMOTO Toru トヨタ理化学研究所, 常勤フェロー (50134052)
OTOBE Tomohito 国立研究開発法人量子科学技術研究開発機構, 関西光科学研究所, 主幹研究員 (60421442)
MOTOKAWA Ryuhei 国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門 物質科学研究センター, 研究主幹 (50414579)
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2017: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2016: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2015: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
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| Keywords | X線レーザー小角散乱 / フェムト秒レーザーアブレーション / 時分割反射率測定 / 核偏極中性子散乱 / 反射率測定 / 中性子 / 核偏極 / 薄膜 / 多層膜構造 / レーザーアブレーション / X線レーザー / 小角散乱 / 非熱効果 / アブレーションダイナミクス |
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| Outline of Final Research Achievements |
The non-thermal effect on femtosecond laser ablation has been focused on for development of high-precision micromachining technique. We focus on a time-resolved grazing-incidence small-angle X-ray scattering (GI-SAXS) technique to study the ablation dynamics.We have developed the GI-SAXS system and measured the image of the Bragg peak from a gold-deposited optical grating sample on CCD camera. In contrast, scattering from a post-ablated crater on a gold plate was hidden in thermal noise of the camera.
Whereas the GI-SAXS measurement is limited by the noise of the camera, we succeeded time-resolved ultraviolet and near-infrared reflectivity measurements using double pump pulse. In addition, we also succeeded reflectivity measurement using polarized neutrons and proton-polarized sample, which reveal surface and interface structure of multi-layered film. We believe the this technique would be used to reveal chemical change of femtosecond-laser-irradiated polymer surface.
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Report
(4 results)
Research Products
(28 results)
