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Generation and annihilation mechanisms of plasma-induced defects on semiconductor surface

Research Project

Project/Area Number 15K04717
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Plasma electronics
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Nunomura Shota  国立研究開発法人産業技術総合研究所, エネルギー・環境領域, 主任研究員 (50415725)

Co-Investigator(Renkei-kenkyūsha) MATSYBARA Koji  産業技術総合研究所, 太陽光発電研究センター, 研究センター長 (90202324)
Research Collaborator SAKATA Isao  産業技術総合研究所, 太陽光発電研究センター
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2017: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2015: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywordsプラズマ / 半導体 / 水素化アモルファスシリコン / 太陽電池 / 欠陥 / キャリア輸送 / ポンプ-プローブ法 / トラップ / プラズマ誘起欠陥 / プラズマプロセス / 光電流 / キャリア / ラジカル / プラズマエレクトロニクス / シリコン / アモルファスシリコン
Outline of Final Research Achievements

An in-situ characterization technique for plasma-induced defects has been successfully developed, based on optical pump-probe method. Using this technique, we find that the density of plasma-induced defects is of the order of 1e18 cm-3 for hydrogenated amorphous silicon (a-Si:H) under plasma CVD process. The plasma-induced defects can be annihilated by post-annealing under the conditions of appropriate temperature and period. We have fabricated silicon heterojunction solar cells with a-Si:H passivation layers. The conversion efficiency of 21 % is achieved by controlling the a-Si:H growth conditions and post-annealing treatment, based on the knowledge obtained in this study.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (35 results)

All 2018 2017 2016 2015

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Acknowledgement Compliant: 2 results,  Open Access: 2 results) Presentation (28 results) (of which Int'l Joint Research: 18 results,  Invited: 10 results) Book (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Hydrogen atom kinetics in capacitively coupled hydrogen plasmas2017

    • Author(s)
      Shota Nunomura, Hirotaka Katayama, and Isao Yoshida
    • Journal Title

      Plasma Sources Science and Technology

      Volume: 26 Issue: 5 Pages: 055018-055018

    • DOI

      10.1088/1361-6595/aa6610

    • Related Report
      2017 Annual Research Report 2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Electronic properties of ultrathin hydrogenated amorphous silicon2017

    • Author(s)
      Shota Nunomura, Isao Sakata, and Koji Matsubara
    • Journal Title

      Applied Physics Express

      Volume: 10 Issue: 8 Pages: 081401-081401

    • DOI

      10.7567/apex.10.081401

    • NAID

      210000135936

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Impact of band tail distribution on carrier trapping in hydrogenated amorphous silicon for solar cell applications2016

    • Author(s)
      S. Nunomura, I. Sakata, K. Matsubara
    • Journal Title

      Journal of Non-Crystalline Solids

      Volume: 436 Pages: 44-50

    • DOI

      10.1016/j.jnoncrysol.2016.01.021

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Science and Technology of Plasma-Enhanced Chemical Vapor Deposition for High-Efficiency Silicon Solar Cells: Introduction2015

    • Author(s)
      S. Nunomura
    • Journal Title

      J. Plasma Fusion Res.

      Volume: 91 Pages: 314-316

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Science and Technology of Plasma-Enhanced Chemical Vapor Deposition for High-Efficiency Silicon Solar Cells:Summary2015

    • Author(s)
      S. Nunomura
    • Journal Title

      J. Plasma Fusion Res.

      Volume: 91 Pages: 360-361

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] シリコン PECVD 中の膜評価2018

    • Author(s)
      布村正太
    • Organizer
      第28回プラズマエレクトロニクス新領域研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 極薄a-Si:Hのギャップ内準位と輸送特性 ~水素希釈とアニールの効果~2018

    • Author(s)
      布村正太、坂田功、松原浩司
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] プラズマ誘起欠陥の発生と修復 ~イオン照射に伴う残留欠陥の形成~2018

    • Author(s)
      布村正太、坂田功、松原浩司
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] プラズマ誘起欠陥の発生と修復 ~欠陥修復の活性化エネルギー~2018

    • Author(s)
      布村正太、坂田功、松原浩司
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] シリコンヘテロ太陽電池のトラップとキャリア輸送2017

    • Author(s)
      布村 正太
    • Organizer
      WFF & WFSM 2017
    • Place of Presentation
      Hokkaido Univ., Sapporo
    • Year and Date
      2017-03-03
    • Related Report
      2016 Research-status Report
    • Invited
  • [Presentation] Optoelectronic properties of a-Si:H passivation layer for high-efficiency silicon heterojunction solar cells2017

    • Author(s)
      Shota Nunomura, Isao Sakata, and Koji Matsubara
    • Organizer
      2017 Symposium on Advanced Solar Cells
    • Place of Presentation
      Kyushu Univ. Fukuoka
    • Year and Date
      2017-02-09
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] H atom generation and loss kinetics in low-pressure processing plasmas2017

    • Author(s)
      Shota Nunomura, Hirotaka Katayama, and Isao Yoshida
    • Organizer
      第34回プラズマプロセシング研究会(SPP34)/ 第29回プラズマ材料科学シンポジウム(SPSM29)
    • Place of Presentation
      北海道大学, 北海道
    • Year and Date
      2017-01-16
    • Related Report
      2016 Research-status Report
  • [Presentation] Electronic transport properties of a-Si:H passivation layers for silicon hetero-junction solar cells2017

    • Author(s)
      Shota Nunomura, Isao Sakata, and Koji Matsubara
    • Organizer
      The 2017 E-MRS Spring Meeting and Exhibit
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of electronic transport properties of semiconductor films during plasma processing2017

    • Author(s)
      Shota Nunomura
    • Organizer
      The International Conference on Phenomena in Ionized Gases (ICPIG)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] H atom generation and loss kinetics in VHF plasmas2017

    • Author(s)
      Shota Nunomura, Hirotaka Katayama and Isao Yoshida
    • Organizer
      The International Conference on Phenomena in Ionized Gases (ICPIG)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 極薄a-Si:Hのギャップ内準位とキャリア捕捉2017

    • Author(s)
      布村正太、坂田功、松原浩司
    • Organizer
      2017年 第78回応用物理学会秋季学術講
    • Related Report
      2017 Annual Research Report
  • [Presentation] Electronic Properties of Ultrathin a-Si:H Passivation Layers for Silicon Heterojunction Solar Cells2017

    • Author(s)
      Shota Nunomura, Isao Sakata, and Koji Matsubara
    • Organizer
      EU PVSEC 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental and simulation study on hydrogen atom kinetics in low-pressure capacitively coupled plasmas2017

    • Author(s)
      Shota Nunomura, Hirotaka Katayama and Isao Yoshida
    • Organizer
      AVS 64th International Symposium and Exhibition (AVS 64)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In-Situ Diagnostics of Processing Plasma andSemiconductor Films for High-Efficiency Silicon Hetero-Junction Solar Cells2017

    • Author(s)
      Shota Nunomura
    • Organizer
      AVS 64th International Symposium and Exhibition (AVS 64)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] CHARACTERIZATION OF ELECTRONIC PROPERTIES OF A-SI:H PASSIVATION LAYERS FOR SILICON HETERO-JUNCTION SOLAR CELLS2017

    • Author(s)
      Shota Nunomura, Isao Sakata, and Koji Matsubara
    • Organizer
      PVSEC-27
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Real-time monitoring of defects creation and annealing during plasma processing2017

    • Author(s)
      Shota Nunomura
    • Organizer
      The 82nd IUVSTA Workshop on Plasma-based Atomic Layer Processes
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] State of the art silicon heterojunction solar cell devices ~ plasma processing for high-quality passivation~ (Plenary lecture)2017

    • Author(s)
      Shota Nunomura
    • Organizer
      5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Measurements of carrier transport and trapping in semiconductor films during plasma processing2016

    • Author(s)
      Shota Nunomura, Isao Sakata, and Koji Matsubara
    • Organizer
      15th International Conference on Plasma Surface Engineering
    • Place of Presentation
      Cogress center, Garmisch-Partenkirchen, Germany
    • Year and Date
      2016-09-17
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] EFFECTS OF CARRIER TRAPPING ON SOLAR CELL PERFORMANCES2016

    • Author(s)
      Shota Nunomura, Isao Sakata, and Koji Matsubara
    • Organizer
      The Photovoltaic Technical Conference 2016
    • Place of Presentation
      the International Center, Marseille, France
    • Year and Date
      2016-05-10
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Characterization of carrier transport and trapping in semiconductor films during plasma processing2016

    • Author(s)
      S. Nunomura, I. Sakata, and K. Matsubara
    • Organizer
      Korian vacuum society (KVS) annual meeting
    • Place of Presentation
      Kangwon, Koria
    • Year and Date
      2016-02-18
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Silicon-based thin-film and heterojunction solar cells2016

    • Author(s)
      S. Nunomura
    • Organizer
      Symposium on Advanced Solar Cells
    • Place of Presentation
      Kangwon, Koria
    • Year and Date
      2016-02-17
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Characterization of charge carrier trapping in semiconductor films for photovoltaic application2016

    • Author(s)
      S. Nunomura, X. Che, and S.R. Forrest
    • Organizer
      EMN Photovoltaics Meeting 2016
    • Place of Presentation
      Hong Kong, China
    • Year and Date
      2016-01-19
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Carrier transport and trapping during a-Si:H growth - for more efficient solar cells-2016

    • Author(s)
      Shota Nunomura, Isao Sakata, and Koji Matsubara
    • Organizer
      The 26th annual meeting of MRS-J
    • Place of Presentation
      Kaikoukinennkaikan, Yokohama
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] In-situ monitoring of carrier transport and trapping in amorphous semiconductors under plasma processing2015

    • Author(s)
      S Nunomura and I. Sakata
    • Organizer
      Dry process symposium 2015
    • Place of Presentation
      Awaji, Japan
    • Year and Date
      2015-11-06
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Carrier transport and trapping in a-Si:H films during growth by plasma enhanced CVD2015

    • Author(s)
      S Nunomura, I. Sakata, and K. Matsubara
    • Organizer
      68th Gaseous Electronics Conference (GEC) / 9th International Conference on Reactive Plasmas (ICRP)
    • Place of Presentation
      Honolulu, USA
    • Year and Date
      2015-10-13
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] リモートプラズマ中の水素原子密度の測定2015

    • Author(s)
      布村 正太, 片山 博貴, 吉田 功
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋, 日本
    • Year and Date
      2015-09-15
    • Related Report
      2015 Research-status Report
  • [Presentation] 太陽電池用a-Si:Hのキャリア捕捉とデバイス特性2015

    • Author(s)
      布村 正太, 坂田 功, 松原 浩司
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋, 愛知
    • Year and Date
      2015-09-14
    • Related Report
      2015 Research-status Report
  • [Presentation] 有機薄膜太陽電池のトラップと発電効率との相関2015

    • Author(s)
      S. Nunomura, X. Che, and S.R. Forrest
    • Organizer
      第12回次世代の太陽光発電システムシンポジウム
    • Place of Presentation
      郡山, 福島
    • Year and Date
      2015-05-28
    • Related Report
      2015 Research-status Report
  • [Book] プラズマCVD/PVD2015

    • Author(s)
      布村正太
    • Total Pages
      99
    • Publisher
      応用物理学会 プラズマエレクトロニクス分科会
    • Related Report
      2015 Research-status Report
  • [Patent(Industrial Property Rights)] 酸化物半導体材料の開発とpn接合の作製と光電変換素子への応用2015

    • Inventor(s)
      高島, 菊地, 外岡, 川中, 吉田, 相浦, 布村
    • Industrial Property Rights Holder
      高島, 菊地, 外岡, 川中, 吉田, 相浦, 布村
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-117010
    • Filing Date
      2015-06-09
    • Related Report
      2015 Research-status Report

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Published: 2015-04-16   Modified: 2019-03-29  

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