Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2017: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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Outline of Final Research Achievements |
In this study, we have performed developed thermal conductivity measurment system for submillimeter crystals focusing around the development of the thermal conductivity measuring probe utilizeing microfabrication technology. Measurement probes were produced by removing the sbstrate around the temperature sensors which was sputtered on a SiO2/Si3N4 multilayer film on a Si substrate. By thus removing the substrate surrounding the sensors, the outflow of the heat appllied to the sample is able to be supressed. During the present research period, in addition to the development of above probe itself, we have realized the essential elements for system construction including the adhesive techniques which is important when the crystals were put on the probe and the heater control method using an external micro-current source.
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