| Budget Amount *help |
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2017: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2016: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2015: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
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| Outline of Final Research Achievements |
In various industrial fields, it is frequently necessary to measure surface roughness in confined spaces such as boreholes and grooves. We already proposed a novel surface roughness measurement sensor for small boreholes. To make the surface roughness sensor small, we used a stylus with a cylindrical mirror and a lensed fiber instead of a conventional inductive pick-up. However, experimental results showed that this system had only 8micron measurement range. Further, an encoder mirror was applied instead of the cylindrical mirror. Still, measurement range was not enough. In this research, the null method using a PZT is applied to expand the measurement range. Experimental results showed 24micron measurement range.
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