• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of mold for thermal nanoimprinting capable of forming nano pattern of complicated shape on glass surface

Research Project

Project/Area Number 15K05747
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Production engineering/Processing studies
Research InstitutionKanagawa Institute of Industrial Sclence and Technology

Principal Investigator

Yasui Manabu  地方独立行政法人神奈川県立産業技術総合研究所, 電子技術部, 主任研究員 (80426361)

Co-Investigator(Renkei-kenkyūsha) Arai Masahiro  名古屋大学, 大学院工学研究科, 教授 (30260532)
Ito Hiroaki  近畿大学, 工学部, 講師 (70534981)
Research Collaborator Kaneko Satoru  (地独)神奈川県立産業技術総合研究所, 電子技術部電子材料グループ, グループリーダ (40426359)
Kurouchi Masahito  (地独)神奈川県立産業技術総合研究所, 電子技術部電子材料グループ, 主任研究員 (10452187)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2017: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
KeywordsNi-W金型 / ナノインプリント / ガラス / めっき / アルミ二ウム / アルミニウム / 原盤 / Ni-W / 金型 / ナノ / 厚膜
Outline of Final Research Achievements

We fabricated a Ni-W mold with a moth - eye structure using Ni-W plating with excellent releasability. Since aluminum nano-holes have been studied as a light receiving element utilizing plasmon resonance, we have studied aluminum nanoimprinting using a Ni-W mold. As a result, nanoholes could be formed on the surface of the pure aluminum plate at room temperature. The required pressure was 100 MPa. Compared to thermal nanoimprint for thermoplastic resin, the pressure of aluminum nanoimprint is more than 10 times greater, and it is a task to lower the pressure. In addition, Ni - W molds with large warpage due to thermal nanoimprint embrittles and has a high possibility of cracking. Therefore, we stopped thermal nanoimprint for glass.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (15 results)

All 2018 2017 2016 2015

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Open Access: 2 results,  Acknowledgement Compliant: 2 results) Presentation (12 results) (of which Int'l Joint Research: 6 results,  Invited: 1 results)

  • [Journal Article] Formation of highly planarized Ni-W electrodeposits for glass imprinting mold2016

    • Author(s)
      Manabu Yasui, Satoru Kaneko, Masahito Kurouchi, Hiroaki Ito, Takeshi Ozawa and Masahiro Arai
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 1S Pages: 01AB04-01AB04

    • DOI

      10.7567/jjap.56.01ab04

    • NAID

      210000147364

    • Related Report
      2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effect of metal ion concentration in Ni-W plating solution on surface roughness of Ni-W film2016

    • Author(s)
      Manabu Yasui, Satoru Kaneko, Masahito Kurouchi, Hiroaki Ito, Takeshi Ozawa and Masahiro Arai
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 1S Pages: 01AA22-01AA22

    • DOI

      10.7567/jjap.55.01aa22

    • NAID

      210000145938

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Micro Imprinting for Al Alloy Using Ni-W Electroformed Mold2015

    • Author(s)
      1)M. Yasui, S. Kaneko, M. Takahashi, T. Sano, Y. Hirabayashi, T. Ozawa, and R. Maeda
    • Journal Title

      International Journal of Automation Technology

      Volume: 9 Issue: 6 Pages: 674-677

    • DOI

      10.20965/ijat.2015.p0674

    • NAID

      130007673918

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2015-11-05
    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] Aluminum nano dot pattern formation with Ni-W nano electroformed mold2018

    • Author(s)
      M. Yasui, S. Yasaka, S. Kaneko, M. Kurouchi, H. Ito, M. Arai
    • Organizer
      Isplasma2018
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ni-W thick film processing with higher frequency of pulse plating2017

    • Author(s)
      M. Yasui, S. Kaneko, M. Kurouchi, H. Ito, T. Ozawa, M. Arai
    • Organizer
      Isplasma2017
    • Place of Presentation
      中部大学
    • Year and Date
      2017-03-01
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Ni-W film Processing with Pulse Plating2017

    • Author(s)
      M. Yasui, S. Kaneko, M. Kurouchi, H. Ito, M. Arai
    • Organizer
      電気学会 電子材料研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 添加剤を加えたN-メチル-2-ピロリドンによるSU8の剥離2017

    • Author(s)
      安井学,中野一史,黒内正仁,川野伸一,金子智
    • Organizer
      第8回マイクロ・ナノ工学シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] Ni-W Mold for Moth-eye Structure on Inorganic Material2017

    • Author(s)
      M. Yasui, S. Kaneko, M. Kurouchi, T. Ozawa
    • Organizer
      IUMRS-ICAM 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Multi-graphene Growth on Paper Drawn by 10B Pencil using Laser Annealing2017

    • Author(s)
      S. KANEKO, T. ENDO, K. SATOH, Y. MOTOIZUMI, T. RACHI, M. YASUI, Y. SHIMIZU, S. TANAKA, C. KATO, M. CAN, S. SHAWUTI, A. MATSUDA, M. YOSHIMOTO
    • Organizer
      IUMRS-ICAM 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Removal of SU8 with N-Methyl-2-Pyrrolidone Doping LiCl and H2O2016

    • Author(s)
      M. Yasui, H. Nakano, M. Kurouchi, T. Ozawa, S. Kawano and S. Kaneko
    • Organizer
      29th International Microprocesses and Nanotechnology Conference (MNC2016)
    • Place of Presentation
      ANAクラウンプラザホテル京都
    • Year and Date
      2016-11-08
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] めっき液中の金属濃度がインプリント金型用Ni-W 膜に与える影響2016

    • Author(s)
      安井学,黒内正仁,金子智,伊藤寛明,小沢武,荒井政大
    • Organizer
      日本機械学会2016年度年次大会
    • Place of Presentation
      九州大学伊都キャンパス
    • Year and Date
      2016-09-11
    • Related Report
      2016 Research-status Report
  • [Presentation] 「神奈川県産業技術センターの活動紹介」-無機材料を対象としたインプリント金型の開発を例として-2016

    • Author(s)
      安井学
    • Organizer
      日本機械学会 機械材料・材料加工部門 次世代3Dプリンティング研究会
    • Place of Presentation
      神奈川県産業技術センター
    • Year and Date
      2016-04-28
    • Related Report
      2016 Research-status Report
    • Invited
  • [Presentation] Effect of metal concentration in Ni-W bath on Ni-W alloy film2016

    • Author(s)
      0)M. Yasui, S. Kaneko, M. Kurouchi, H. Ito, T. Ozawa and M. Arai
    • Organizer
      ISPlasma 2016
    • Place of Presentation
      名古屋大学
    • Year and Date
      2016-03-06
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] 熱インプリント用金型材料としてのNi-W膜の組成・結晶構造に関する研究2015

    • Author(s)
      安井学,金子智,黒内正仁,小沢武,伊藤寛明,荒井政大
    • Organizer
      第23回機械材料・材料加工技術講演会
    • Place of Presentation
      広島大学
    • Year and Date
      2015-11-13
    • Related Report
      2015 Research-status Report
  • [Presentation] 金属イオン濃度がNi-W めっき膜の平坦性に与える影響に関する一考察2015

    • Author(s)
      安井学,金子智,黒内正仁,伊藤寛明,小沢武,荒井政大
    • Organizer
      日本機械学会2015年度年次大会
    • Place of Presentation
      北海道大学
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report

URL: 

Published: 2015-04-16   Modified: 2019-03-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi