| Budget Amount *help |
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2017: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2016: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2015: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Outline of Final Research Achievements |
In this research, we firstly touched upon the research and development process of the AE sensor so far (development of broadband type AE sensor with fast response over DC -10 MHz and development of digital AE sensor with small cantilever by MEMS technology) The outline, design and its simulation method of high performance developed acoustic comb type AE sensor using LiNbO 3 (lithium niobate) material were studied.
Next. We studied the fabrication process of LiNbO 3 integral type cantilever array of the AE sensor and made it prototype.
Finally, we compare the designed calculation value of the prototype acoustic comb (comb) type digital type digital AE sensor with the basic characteristics and verified the evaluation method such as its electrical characteristics and put it into practical use.
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