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Improving the reliability of GaN HEMTs using MMC structures and free-standing GaN substrates

Research Project

Project/Area Number 15K06013
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionUniversity of Fukui

Principal Investigator

Asubar Joel  福井大学, テニュアトラック推進本部, 講師 (10574220)

Co-Investigator(Kenkyū-buntansha) 葛原 正明  福井大学, 学術研究院工学系部門, 教授 (20377469)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2017: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2016: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2015: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
KeywordsGallium nitride / current collapse / power device / semiconductor / AlGaN/GaN HEMT / AlGaN/GaN / HEMT / Current Collapse / Breakdown Voltage / Stability / AlGaN-GaN / 窒化物半導体 / 電流コラプス / MIS / GaN / パワーデバイス / 自己発熱 / 多重台形チャネル / 酸素プラズマ処理
Outline of Final Research Achievements

Our aim is to achieve improved stability and reliability of AlGaN/GaN HEMTs using structure-based strategies such as using the so-called multi-mesa-channel. Investigations have revealed that the MMC HEMT is highly resistant to current collapse and other instabilities, making it a leading power electronics prospect. We also investigated other current collapse approaches that can be used in conjunction with MMC in the future such as high pressure water vapor annealing, oxygen plasma treatment, field-plate and metal-insulator-semiconductor structures.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (32 results)

All 2018 2017 2016 2015 Other

All Journal Article (11 results) (of which Int'l Joint Research: 8 results,  Peer Reviewed: 10 results,  Acknowledgement Compliant: 4 results,  Open Access: 2 results) Presentation (19 results) (of which Int'l Joint Research: 11 results,  Invited: 3 results) Remarks (2 results)

  • [Journal Article] Correlation of AlGaN/GaN HEMTs electroluminescence characteristics with current collapse2018

    • Author(s)
      S. Ohi, T. Yamazaki, J. T. Asubar, H. Tokuda, and M. Kuzuhara
    • Journal Title

      Appl. Phys. Express

      Volume: 11 Issue: 2 Pages: 024101-024101

    • DOI

      10.7567/apex.11.024101

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Impact of rounded electrode corners on breakdown characteristics of AlGaN/GaN high-electron mobility transistors2018

    • Author(s)
      Taisei Yamazaki, Joel T. Asubar, Hirokuni Tokuda, and Masaaki Kuzuhara
    • Journal Title

      Applied Physics Express

      Volume: 11 Issue: 5 Pages: 0541021-0541025

    • DOI

      10.7567/apex.11.054102

    • NAID

      210000136205

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Analytical derivation of interface state density from sub-threshold swing in AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors2017

    • Author(s)
      H. Tokuda, J. T. Asubar, and M. Kuzuhara
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 56 Issue: 10 Pages: 104101-104101

    • DOI

      10.7567/jjap.56.104101

    • NAID

      210000148328

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] AlGaN/GaN MIS-HEMTs with high on/off current ratio of over 5 × 1010 achieved by ozone pretreatment and using ozone oxidant for Al2O3 gate insulator2016

    • Author(s)
      H. Tokuda, J. T. Asubar, and M. Kuzuhara
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 12 Pages: 120305-120305

    • DOI

      10.7567/jjap.55.120305

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Highly-stable and low-state-density Al2O3/GaN interfaces using epitaxial n-GaN layers grown on free-standing GaN substrates2016

    • Author(s)
      S. Kaneki, J. Ohira, S. Toiya, Z. Yatabe, J. T. Asubar and T. Hashizume
    • Journal Title

      Appl. Phys. Lett.

      Volume: 109 Issue: 16

    • DOI

      10.1063/1.4965296

    • NAID

      120006360059

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Z. Yatabe, J. T. Asubar, and T. Hashizume2016

    • Author(s)
      Insulated gate and surface passivation structures for GaN-based power transistors
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 49 Issue: 39 Pages: 1-19

    • DOI

      10.1088/0022-3727/49/39/393001

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Pushing the GaN HEMT towards its theoretical limit2016

    • Author(s)
      J. T. Asubar, J. Ng, H. Tokuda, M, Kuzuhara
    • Journal Title

      Compound Semiconductor Magazine

      Volume: 22 Pages: 26-31

    • Related Report
      2016 Research-status Report
    • Open Access / Int'l Joint Research
  • [Journal Article] AlGaN/GaN high-electron-mobility transistor technology for high-voltage and low-on-resistance operation2016

    • Author(s)
      M. Kuzuhara, J. T. Asubar, and H. Tokuda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 7 Pages: 0701011-12

    • DOI

      10.7567/jjap.55.070101

    • NAID

      210000146739

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Highly Reduced Current Collapse in AlGaN/GaN HEMTs by Combined Application of Oxygen Plasma Treatment and Field-plate Structures2016

    • Author(s)
      J. T. Asubar, S. Yoshida, H. Tokuda, and M. Kuzuhara
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 4S Pages: 04EG07-04EG07

    • DOI

      10.7567/jjap.55.04eg07

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Impact of oxygen plasma treatment on the dynamic on-resistance of AlGaN/GaN high-electron-mobility2015

    • Author(s)
      Joel T. Asubar, Yoshiki Sakaida, Satoshi Yoshidai, Zenji Yatabe, Hirokuni Tokuda, Tamotsu Hashizume, Masaaki Kuzuhara
    • Journal Title

      Applied Physics Express

      Volume: 8 Issue: 11 Pages: 1110011-4

    • DOI

      10.7567/apex.8.111001

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Current Collapse Reduction in AlGaN/GaN HEMTs by High-Pressure Water Vapor Annealing2015

    • Author(s)
      Joel T. Asubar, Yohei Kobayashi, Koji Yoshitsugu, Zenji Yatabe, Hirokuni Tokuda, Masahiro Horita; Yukiharu Uraoka, Tamotsu Hashizume, Masaaki Kuzuhara
    • Journal Title

      IEEE Transactions on Electron Devices

      Volume: 62 Issue: 8 Pages: 2423-2428

    • DOI

      10.1109/ted.2015.2440442

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] Characterization of AlGaN/GaN recessed MIS-HEMTs using sputtered SiN as gate dielectric2018

    • Author(s)
      Wataru Gamachi, Joel Asubar, Hirokuni Tokuda, and Masaaki Kuzuhara
    • Organizer
      2018-nendo Shunki Dai-65-kai Ouyou Butsuri Gakku Kankei Rengou Koenkai (Japan Society of Applied Physics 65th Spring Meeting)
    • Related Report
      2017 Annual Research Report
  • [Presentation] Effective Suppression of Current Collapse in AlGaN/GaN HEMTs2017

    • Author(s)
      Joel T. Asubar, Hirokuni Tokuda, and Masaaki Kuzuhara
    • Organizer
      35th Samahang Pisika ng Pilipinas Physics Conference (SPP 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Investigation of Dynamic On-Resistance of Multi-Mesa-Channel AlGaN/GaN HEMTs2017

    • Author(s)
      Joel T. Asubar, Hirokuni Tokuda, Tamotsu Hashizume, and Masaaki Kuzuhara
    • Organizer
      6th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of Substrate Thermal Resistivity on Breakdown Voltage of AlGaN/GaN HEMTs2017

    • Author(s)
      Taisei Yamazaki, Joel T. Asubar, Hirokuni Tokuda, and Masaaki Kuzuhara
    • Organizer
      6th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Enhancement-Mode AlGaN/GaN MOS-HEMTs with Recessed-Gate Structures Exhibiting High Threshold Voltage2017

    • Author(s)
      W. Gamachi, K. Ishii, J. T. Asubar, H. Tokuda, and M. Kuzuhara
    • Organizer
      6th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of Reverse Bias Annealing on the Properties of AlGaN/GaN MIS-HEMTs with Recessed-gate Structure2017

    • Author(s)
      W. Gamachi, K. Ishii, J. T. Asubar, H. Tokuda, and M. Kuzuhara
    • Organizer
      2017 International Meeting for Future of Electron Devices Kansai (IMFEDK 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of Electronic States at Insulator/AlGaN Interfaces on Threshold Voltage Instability of Al2O3/AlGaN/GaN Structures2016

    • Author(s)
      Z. Yatabe, J. T. Asubar, Y. Nakamura, and T. Hashizume
    • Organizer
      2016 International Conference on Solid State Devices and Materials (SSDM 2016)
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2016-09-26
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] 24.Characterization of Insulators/(Al)GaN Interfaces for Improved Insulated Gate and Surface Passivation Structures of GaN-based Transistors2016

    • Author(s)
      Z. Yatabe, Y. Hori, W.C. Ma, J. T. Asubar, M. Akazawa, T. Sato, and T. Hashizume
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      Toki Messe, Niigata, Japan
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
    • Invited
  • [Presentation] Improved linearity, stability, and thermal performance of multi-mesa-channel AlGaN/GaN HEMTs2016

    • Author(s)
      J. T. Asubar, H. Tokuda, M, Kuzuhara, Z. Yatabe, K. Nishiguchi, and T. Hashizume
    • Organizer
      34th Samahang Pisika ng Pilipinas Physics Conference
    • Place of Presentation
      University of the Philippines Visayas, Iloilo, Philippines
    • Year and Date
      2016-08-18
    • Related Report
      2016 Research-status Report
    • Invited
  • [Presentation] High on/off ratio AlGaN/GaN MIS-HEMTs with ALD deposited Al2O3 gate dielectric using ozone as an oxidant2016

    • Author(s)
      H. Tokuda, J. T. Asubar, M. Kuzuhara
    • Organizer
      2016 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
    • Place of Presentation
      Hakodate, Japan
    • Year and Date
      2016-07-04
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Impact of Drain Electrode Shape Irregularities on Breakdown Voltage of AlGaN/GaN HEMTs2016

    • Author(s)
      S. Ohi, S. Makino, T. Yamazaki, H. Tokuda, J. T. Asubar, and M. Kuzuhara
    • Organizer
      2016 Compound Semiconductor Week
    • Place of Presentation
      Toyama International Conference Center, Toyama, Japan
    • Year and Date
      2016-06-26
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Breakdown Voltages of AlGaN/GaN HEMTs Breakdown degradation of AlGaN/GaN HEMTs with multi-finger gate patterns2016

    • Author(s)
      S. Makino, S. Ohi, J. T. Asubar, H. Tokuda, and M. Kuzuhara
    • Organizer
      2016 International Meeting for Future of Electron Devices Kansai (IMFEDK 2016)
    • Place of Presentation
      Ryukoku University Avanti Kyoto Hall, Kyoto, Japan
    • Year and Date
      2016-06-23
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] AlGaN/GaN HEMTs on Free-standing GaN Substrates with Breakdown Voltage of 5 kV and Effective Lateral Critical Field of 1 MV/cm2016

    • Author(s)
      J. H. Ng, J. T. Asubar, H. Tokuda, and M. Kuzuhara
    • Organizer
      2016 International Conference on Compound Semiconductor Manufacturing Technology (CS Mantech 2016)
    • Place of Presentation
      Miami, Florida, USA
    • Year and Date
      2016-06-16
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effect of Metal Electrode Shape Irregularities on AlGaN/GaN HEMTs Breakdown Voltage Revealed by Electroluminescence2016

    • Author(s)
      S. Makino, T. Yamazaki, S. Ohi, H. Tokuda, J. T. Asubar, and M. Kuzuhara
    • Organizer
      40th Workshop on Compound Semiconductor Devices and Integrated Circuits (WOCSDICE) 2016
    • Place of Presentation
      Aveiro, Portugal
    • Year and Date
      2016-06-06
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Highly Reduced Current Collapse in AlGaN/GaN HEMTs by Combined Application of Oxygen Plasma Treatment and Field-plate Structures2015

    • Author(s)
      Joel T. Asubar, Satoshi Yoshida, Hirokuni Tokuda, and Masaaki Kuzuhara
    • Organizer
      2015 International Conference on Solid State Devices and Materials (SSDM 2015)
    • Place of Presentation
      Sapporo, Hokkaido, Japan
    • Year and Date
      2015-09-27
    • Related Report
      2015 Research-status Report
  • [Presentation] Comparative study of oxygen plasma treatment and GaN cap layer effects on the current collapse of AlGaN/GaN HEMTs2015

    • Author(s)
      Joel T. Asubar, Yoshiki Sakaida, Satoshi Yoshida, Zenji Yatabe, Hirokuni Tokuda, Tamotsu Hashizume, and Masaaki Kuzuhara
    • Organizer
      11th Topical Workshop on Heterostructure Microelectronics (TWHM 2015)
    • Place of Presentation
      Takayama, Japan
    • Year and Date
      2015-08-23
    • Related Report
      2015 Research-status Report
  • [Presentation] Electrical Characterization of stepped AlGaN/GaN Heterostructures2015

    • Author(s)
      Shintaro Kodama, Joel T. Asubar, Hirokuni Tokuda, S, Nakazawa, M. Ishida, T. Ueda, and Masaaki Kuzuhara
    • Organizer
      The 39th Workshop on Compound Semiconductor Devices and Integrated Circuits
    • Place of Presentation
      Smolenice castle, Slovakia
    • Year and Date
      2015-06-08
    • Related Report
      2015 Research-status Report
  • [Presentation] Suppressed Current Collapse in High Pressure Water Vapor Annealed AlGaN/GaN HEMTs2015

    • Author(s)
      Yohei Kobayashi, Joel T. Asubar, Koji Yoshitsugu, Hirokuni Tokuda, and Masahiro Horita, Yukiharu Uraoka, and Masaaki Kuzuhara
    • Organizer
      2016 International Conference on Compound Semiconductor Manufacturing Technology (CS MANTECH 2015)
    • Place of Presentation
      Scottsdale, Arizona, USA
    • Year and Date
      2015-05-18
    • Related Report
      2015 Research-status Report
  • [Presentation] Correlation between Electroluminescence and Current Collapse in AlGaN/GaN HEMTs2015

    • Author(s)
      Shintaro Ohi, Yoshiki Sakaida, Joel T. Asubar, Hirokuni Tokuda, and Masaaki Kuzuhara
    • Organizer
      2016 International Conference on Compound Semiconductor Manufacturing Technology (CS MANTECH 2015)
    • Place of Presentation
      Scottsdale, Arizona, USA
    • Year and Date
      2015-05-18
    • Related Report
      2015 Research-status Report
  • [Remarks]

    • URL

      https://www.researchgate.net/profile/Joel_Asubar

    • Related Report
      2017 Annual Research Report
  • [Remarks]

    • URL

      https://scholar.google.co.jp/citations?user=1NlRAggAAAAJ&hl=en&oi=sra

    • Related Report
      2017 Annual Research Report

URL: 

Published: 2015-04-16   Modified: 2019-03-29  

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