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Research of mechanially-vibrating MEMS beam-formed antenna with a function of high speed and wide angle

Research Project

Project/Area Number 15K06092
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Communication/Network engineering
Research InstitutionRitsumeikan University

Principal Investigator

Furutsuka Takashi  立命館大学, 総合科学技術研究機構, 教授 (90555608)

Co-Investigator(Kenkyū-buntansha) 鈴木 健一郎  立命館大学, 理工学部, 教授 (70388122)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2017: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000)
Fiscal Year 2016: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2015: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywordsアンテナ / 高周波 / 共振 / 無線給電 / ミリ波レーダ / アクチュエータ / シリコン / MEMS / MEMSアンテナ / 移相器 / 八木宇田アンテナ / 指向性 / 走査 / 振動式 / 共振周波数 / 静電気力 / 走査角度
Outline of Final Research Achievements

Today, millimeter-wave band is drawn by strong attentions.In the millimeter-wave band, formed-beam scannning plays an important role. However, conventional mechanical scanning has serious problems: system is large and heavy and scanning speed is slow. In this research, a small sized antenna fabricated by MEMS technology to have a function of high speed and wide angle scanning is investigated. A fabricated silicon actuator has been successfully demonstrated to scan + and - 20 degs. with a speed of 1 kHz. Then, a silicon antenna forming Yagi-Uda array antenna is designed by considering RF characteristic.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (11 results)

All 2017 2016 2015

All Journal Article (1 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 1 results,  Open Access: 1 results) Presentation (10 results) (of which Int'l Joint Research: 3 results)

  • [Journal Article] Evaluation on two-port configuration of a Lame-mode octagonal microelectromechanical systems resonator driven by sliding driving electrodes2015

    • Author(s)
      K. Tsujishita, H. Tanigawa, T. Furutsuka, and K. Suzuki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Presentation] Millimeter-wave radar with vibratory MEMS Yagi-Uda antenna2017

    • Author(s)
      H. Nishio, T. Furutsuka, and K. Suzuki
    • Organizer
      The 2nd Internatioanal Symposium on Biomedical Engineering (ISBE)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 機械振動式MEMSアンテナのアンテナ搭載についての基礎検討2017

    • Author(s)
      矢本勇樹、西尾駿、元木悠平、谷川紘、古塚岐、鈴木健一郎
    • Organizer
      第9回集積MEMSシンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] Wireless power supply for a vibratory MEMS Yagi-Uda antenna2016

    • Author(s)
      S. Nishio, R. Inoue, T. Furutsuka, and K. Suzuki
    • Organizer
      the 8th Integrated MEMS Symposium
    • Place of Presentation
      平戸文化センター(長崎県平戸市)
    • Year and Date
      2016-10-26
    • Related Report
      2016 Research-status Report
  • [Presentation] MEMS振動式アンテナ給電機構の基本電気評価2016

    • Author(s)
      西尾駿、井上怜、古塚岐、鈴木健一郎
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2016-09-23
    • Related Report
      2016 Research-status Report
  • [Presentation] 20 MHz pn-diode silicon ring resonator with in-plane vibration mode2015

    • Author(s)
      Y. Asahi, H. Tanigawa, T. Nishino, T. Furutsuka, and K. Suzuki
    • Organizer
      2015 International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Toyama International Conference Center(富山県、富山市)
    • Year and Date
      2015-11-10
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Evaluation on 60 MHz single-crystal silicon pn diode viration sensors2015

    • Author(s)
      K. Baba, H. Tanigawa, T. Nishino, T. Furutsuka, and K. Suzuki
    • Organizer
      2015 International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Toyama International Conference Center(富山県、富山市)
    • Year and Date
      2015-11-10
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Design on MEMS Actuator for Driving Resonant Yagi-Uda Antenna2015

    • Author(s)
      Yuhei Motoki, Ryo Inoue, Hiroshi Tanigawa, Tomoki Nishino, Takashi Furutsuka, and Kenichiro Suzuki
    • Organizer
      the 7th Integrated MEMS Symposium
    • Place of Presentation
      朱鷺メッセ(新潟県、新潟市)
    • Year and Date
      2015-10-29
    • Related Report
      2015 Research-status Report
  • [Presentation] Desing on 60 MHz pn-diode silicon MEMS viration sensor2015

    • Author(s)
      K. Baba, H. Tanigawa, T. Nishino, T. Furutsuka, and K. Suzuki
    • Organizer
      the 7th Integrated MEMS Symposium
    • Place of Presentation
      朱鷺メッセ(新潟県、新潟市)
    • Year and Date
      2015-10-29
    • Related Report
      2015 Research-status Report
  • [Presentation] Desing on a 20 MHz pn-diode ring silicon resonator utilizing in-plane vibration2015

    • Author(s)
      Y. Asahi, H. Tanigawa, T. Nishino, T. Furutsuka, and K. Suzuki
    • Organizer
      the 7th Integrated MEMS Symposium
    • Place of Presentation
      朱鷺メッセ(新潟県、新潟市)
    • Year and Date
      2015-10-29
    • Related Report
      2015 Research-status Report
  • [Presentation] Dynamic driving of liquid for use of MEMS variable capacitors2015

    • Author(s)
      H. Fujii, T. Nishihara, T. Nishino, T. Furutsuka, and K. Suzuki
    • Organizer
      the 7th Integrated MEMS Symposium
    • Place of Presentation
      朱鷺メッセ(新潟県、新潟市)
    • Year and Date
      2015-10-29
    • Related Report
      2015 Research-status Report

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Published: 2015-04-16   Modified: 2019-03-29  

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