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Development of dual-laser cavity ring-down spectroscopy for measurement of trace moisture in gases

Research Project

Project/Area Number 15K06127
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Measurement engineering
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Abe Hisashi  国立研究開発法人産業技術総合研究所, 計量標準総合センター, 上級主任研究員 (20356372)

Co-Investigator(Kenkyū-buntansha) 橋口 幸治  国立研究開発法人産業技術総合研究所, 計量標準総合センター, 研究員 (00712506)
天野 みなみ  国立研究開発法人産業技術総合研究所, 計量標準総合センター, 主任研究員 (80586321)
Research Collaborator Lisak Daniel  ニコラウス-コペルニクス大学, 准教授
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2017: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywords高感度 / 高精度 / 微量水分 / 水分計測 / ppb / トレーサビリティ / 湿度 / SIトレーサビリティ / 高純度ガス
Outline of Final Research Achievements

We developed a dual-diode laser system in cavity ring-down spectroscopy (dual-laser CRDS) for accurate and high sensitivity measurement of trace-moisture in gases. The effectiveness of dual-laser CRDS for measurements of trace moisture was demonstrated by experiments based on an SI-traceable primary trace-moisture standard in the range of 8 nmol/mol to 630 nmol/mol. All the relative differences observed between the readings of dual-laser CRDS and trace-moisture standard values in the range of 8 nmol/mol to 630 nmol/mol (mole fraction) were within 4.2 % and smaller than the expanded uncertainties (a coverage factor of k=2), showing the high accuracy of dual-laser CRDS even in the range of 10 nmol/mol or less.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (16 results)

All 2017 2016 2015 Other

All Int'l Joint Research (1 results) Journal Article (4 results) (of which Int'l Joint Research: 2 results,  Open Access: 1 results,  Peer Reviewed: 3 results,  Acknowledgement Compliant: 3 results) Presentation (9 results) (of which Int'l Joint Research: 5 results,  Invited: 2 results) Remarks (2 results)

  • [Int'l Joint Research] ニコラウス・コペルニクス大学(ポーランド)

    • Related Report
      2015 Research-status Report
  • [Journal Article] 微量水分計測の最前線2017

    • Author(s)
      阿部 恒
    • Journal Title

      伝熱

      Volume: 56 Pages: 10-16

    • Related Report
      2017 Annual Research Report
    • Open Access
  • [Journal Article] Measurement error in frequency measured using wavelength meter due to residual moisture in interferometer and a simple method to avoid it2016

    • Author(s)
      K. Hashiguchi, H. Abe
    • Journal Title

      Measurement Science and Technology

      Volume: 27 Issue: 11 Pages: 115004-115004

    • DOI

      10.1088/0957-0233/27/11/115004

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Wavelength-meter controlled cavity ring-down spectroscopy: high-sensitivity detection of trace moisture in N2 at sub-ppb levels2016

    • Author(s)
      K. Hashiguchi, D. Lisak, A. Cygan, R. Ciurylo, H. Abe
    • Journal Title

      Sens. Actuators A

      Volume: 241 Pages: 152-160

    • DOI

      10.1016/j.sna.2016.02.016

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Reliable, robust measurement system for trace moisture in gas at parts-per-trillion levels using cavity ring-down spectroscopy2015

    • Author(s)
      H. Abe, D. Lisak, A. Cygan, R. Ciurylo
    • Journal Title

      Rev. Sci. Instrum.

      Volume: 86 Issue: 10 Pages: 106110-106110

    • DOI

      10.1063/1.4934976

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] Dual-laser cavity ring-down spectroscopy for trace-moisture measurement2017

    • Author(s)
      H. Abe, K. Hashiguchi
    • Organizer
      GAS ANALYSIS 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Reliable measurement of trace-moisture in gas2017

    • Author(s)
      H. Abe
    • Organizer
      NGO Workshop
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Measurement standard and measurement technique for trace moisture in gases2017

    • Author(s)
      H. Abe
    • Organizer
      Workshop on Measurement Standards Applied in Chemical Analysis
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] デュアルレーザーCRDSによるN2中微量水分の近赤外スペクトル2016

    • Author(s)
      阿部恒, 橋口幸治
    • Organizer
      第77回応用物理学会学術講演会
    • Place of Presentation
      朱鷺メッセ新潟コンベンションセンター (新潟県新潟市)
    • Year and Date
      2016-09-15
    • Related Report
      2016 Research-status Report
  • [Presentation] CAVITY RING-DOWN SPECTROSOCPY FOR TRACE-MOISTURE MEASUREMENT USING DUAL-LASER SYSTEM2016

    • Author(s)
      H. Abe, K. Hashiguchi, M. Amano
    • Organizer
      The XIII International Symposium on Temperature and Thermal Measurements in Industry and Science (TEMPMEKO)
    • Place of Presentation
      Belvedere Congress Center (Zakopane, Poland)
    • Year and Date
      2016-06-27
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] ガス中微量水分の超高感度計測技術2016

    • Author(s)
      阿部 恒
    • Organizer
      産総研技術シーズ発表会
    • Place of Presentation
      ホテルセンチェリー静岡、静岡市
    • Year and Date
      2016-02-17
    • Related Report
      2015 Research-status Report
  • [Presentation] デュアルCRDSによるガス中微量水分のリアルタイム測定2015

    • Author(s)
      阿部 恒、橋口 幸治、天野 みなみ
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場、名古屋市
    • Year and Date
      2015-09-12
    • Related Report
      2015 Research-status Report
  • [Presentation] 超高感度ガス中微量水分計測2015

    • Author(s)
      橋口 幸治、天野 みなみ、阿部 恒
    • Organizer
      JASIS2015出展
    • Place of Presentation
      幕張メッセ、千葉市
    • Year and Date
      2015-09-02
    • Related Report
      2015 Research-status Report
  • [Presentation] Parts-per-trillion level detection of H2O in high-purity gas using cavity ring-down spectroscopy2015

    • Author(s)
      H. Abe, D. Lisak, A. Cygan, R. Ciurylo
    • Organizer
      The 8th International Gas Analysis Symposium & Exhibition
    • Place of Presentation
      ワールドトレードセンターロッテルダム, ロッテルダム、オランダ
    • Year and Date
      2015-06-10
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Remarks] 微量水分領域の湿度標準

    • URL

      https://staff.aist.go.jp/abe.h/TraceMoisture/Welcome.html

    • Related Report
      2015 Research-status Report
  • [Remarks] 物理計測クラブ

    • URL

      https://unit.aist.go.jp/ripm/ja/Club/index.html

    • Related Report
      2015 Research-status Report

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Published: 2015-04-16   Modified: 2019-03-29  

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