Development of dual-laser cavity ring-down spectroscopy for measurement of trace moisture in gases
Project/Area Number |
15K06127
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Research Category |
Grant-in-Aid for Scientific Research (C)
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Allocation Type | Multi-year Fund |
Section | 一般 |
Research Field |
Measurement engineering
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Research Institution | National Institute of Advanced Industrial Science and Technology |
Principal Investigator |
Abe Hisashi 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 上級主任研究員 (20356372)
|
Co-Investigator(Kenkyū-buntansha) |
橋口 幸治 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 研究員 (00712506)
天野 みなみ 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 主任研究員 (80586321)
|
Research Collaborator |
Lisak Daniel ニコラウス-コペルニクス大学, 准教授
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Project Period (FY) |
2015-04-01 – 2018-03-31
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Project Status |
Completed (Fiscal Year 2017)
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Budget Amount *help |
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2017: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
|
Keywords | 高感度 / 高精度 / 微量水分 / 水分計測 / ppb / トレーサビリティ / 湿度 / SIトレーサビリティ / 高純度ガス |
Outline of Final Research Achievements |
We developed a dual-diode laser system in cavity ring-down spectroscopy (dual-laser CRDS) for accurate and high sensitivity measurement of trace-moisture in gases. The effectiveness of dual-laser CRDS for measurements of trace moisture was demonstrated by experiments based on an SI-traceable primary trace-moisture standard in the range of 8 nmol/mol to 630 nmol/mol. All the relative differences observed between the readings of dual-laser CRDS and trace-moisture standard values in the range of 8 nmol/mol to 630 nmol/mol (mole fraction) were within 4.2 % and smaller than the expanded uncertainties (a coverage factor of k=2), showing the high accuracy of dual-laser CRDS even in the range of 10 nmol/mol or less.
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Report
(4 results)
Research Products
(16 results)