Development and enhancement of novel functions of silicon/nitrogen-doped diamond-like carbon films

• Project/Area Number: 15K06432
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Inorganic materials/Physical properties
• Research Institution: Hirosaki University
• Principal Investigator: Nakazawa Hideki 弘前大学, 理工学研究科, 准教授 (90344613)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2017: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2016: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2015: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
• Keywords: カーボン材料 / プラズマ化学気相成長法 / レーザーアブレーション法

Outline of Final Research Achievements

Diamond-like carbon (DLC) films have excellent properties such as high hardness, high wear resistance, low friction, chemical inertness, and biocompatibility. In this study, we have developed silicon/nitrogen-doped DLC films that were superior to conventional DLC films in mechanical, electrical and optical properties. In addition, we examined correlations between the structure and chemical bonding and the properties of the DLC films to obtain fundamental knowledge for the further improvement of their properties. We demonstrated that the coincorporation of Si and N into the DLC films was very effective in improving the mechanical, electrical and optical properties.

Research Products

• [Journal Article] Impacts of substrate bias and dilution gas on the properties of Si-incorporated diamond-like carbon films by plasma deposition using organosilane as a Si source (2018)
  • Author(s): H. Nakazawa, S. Miura, K. Nakamura, Y. Nara
  • Journal Title: Tnin Solid Films Volume: 654 Pages: 38-48
  • DOI: 10.1016/j.tsf.2018.03.075
  • Peer Reviewed
• [Journal Article] Effects of source gases on the properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition (2017)
  • Author(s): Nakazawa Hideki、Magara Kohei、Takami Takahiro、Ogasawara Haruka、Enta Yoshiharu、Suzuki Yushi
  • Journal Title: Thin Solid Films Volume: 636 Pages: 177-182
  • DOI: 10.1016/j.tsf.2017.05.046
  • Peer Reviewed
• [Journal Article] Synthesis of boron/nitrogen- incorporated diamond-like carbon films by pulsed laser deposition using nitrogen gas and a boron-containing graphite target (2017)
  • Author(s): H. Nakazawa, R. Osozawa, Y. Mohnai, Y. Nara
  • Journal Title: Japanese Journal of Applied Physics Volume: 56 Issue: 10 Pages: 105501-105501
  • DOI: 10.7567/jjap.56.105501
  • NAID: 210000148332
  • Peer Reviewed
• [Journal Article] Tribological properties and thermal stability of hydrogenated, silicon/nitrogen-coincorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition (2016)
  • Author(s): Hideki Nakazawa, Saori Okuno, Kohei Magara, Kazuki Nakamura, Soushi Miura, Yoshiharu Enta
  • Journal Title: Japanese Journal of Applied Physics Volume: 55 Issue: 12 Pages: 1255011-9
  • DOI: 10.7567/jjap.55.125501
  • NAID: 210000147302
  • Peer Reviewed
• [Journal Article] Structural and electrical properties and current-voltage characteristics of nitrogen-doped diamond-like carbon films on Si substrates by plasma-enhanced chemical vapor deposition (2016)
  • Author(s): M. Tsuchiya, K. Murakami, K. Magara, K. Nakamura, H. Ohashi, K. Tokuda, T. Takami, H. Ogasawara, Y. Enta, Y. Suzuki, S. Ando, H. Nakazawa
  • Journal Title: Japanese Journal of Applied Physics Volume: 未定
  • NAID: 210000146590
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] Preparation and characterization of nitrogen/silicon-incorporated diamond-like carbon films (2018)
  • Author(s): H. Nakazawa, K. Nakamura, H. Ohashi, T. Yokoyama, K. Tajima, N. Endo, M. Suemitsu, Y. Enta, Y. Kobayashi, Y. Suzuki
  • Organizer: Collaborative Conference on Materials Research 2018
  • Int'l Joint Research / Invited
• [Presentation] Effects of nitrogen doping on the chemical bonding states and properties of silicon-doped diamond-like carbon films (2017)
  • Author(s): K. Nakamura, H. Ohashi, T. Yokoyama, K. Tajima, N. Endo, M. Suemitsu, Y. Enta, Y. Kobayashi, H. Nakazawa
  • Organizer: The 8th International Symposium on Surface Science
  • Int'l Joint Research
• [Presentation] 希釈ガスに水素ガスを用いたプラズマ化学気相成長法による Si/N共添加DLC薄膜の作製と評価 (2016)
  • Author(s): 中村 和樹, 大橋 遼, 横山 大, 田島 圭一郎, 遠藤 則史, 末光 眞希, 遠田 義晴, 小林 康之, 中澤 日出樹
  • Organizer: 応用物理学会東北支部第71回学術講演会
  • Place of Presentation: 東北大学（仙台市）
  • Year and Date: 2016-12-01
• [Presentation] 希釈ガスに水素を用いたプラズマ化学気相成長法によるSi/N共添加ダイヤモンドライクカーボンの膜特性 (2016)
  • Author(s): 中村 和樹, 大橋 遼, 横山 大, 田島 圭一郎, 遠藤 則史, 末光 眞希, 遠田 義晴, 中澤 日出樹
  • Organizer: 2016真空・表面科学合同講演会
  • Place of Presentation: 名古屋国際会議場（名古屋市）
  • Year and Date: 2016-11-29
• [Presentation] 希釈ガスに水素ガスを用いたプラズマCVD法による N添加およびSi/N共添加DLC膜の特性比較 (2016)
  • Author(s): 中村 和樹, 大橋 遼, 横山 大, 田島 圭一郎, 遠藤 則史, 末光 眞希, 遠田 義晴, 中澤 日出樹
  • Organizer: 第30回ダイヤモンドシンポジウム
  • Place of Presentation: 東京大学（東京都目黒区）
  • Year and Date: 2016-11-16
• [Presentation] 希釈ガスとしてH2を用いたプラズマCVD法によるDLC膜特性への SiおよびN添加効果 (2016)
  • Author(s): 中村 和樹, 大橋 遼, 横山 大, 田島 圭一郎, 遠藤 則史, 末光 眞希, 遠田 義晴, 中澤 日出樹
  • Organizer: 秋季第77回応用物理学会学術講演会
  • Place of Presentation: 朱鷺メッセ（新潟市）
  • Year and Date: 2016-09-13
• [Presentation] Impacts of substrate bias and dilution gas on the properties of Si-doped diamond-like carbon films by plasma deposition using organosilane as a Si source (2016)
  • Author(s): H. Nakazawa, S. Miura
  • Organizer: International Conference on Diamond and Carbon Materials 2016
  • Place of Presentation: Montpellier, France
  • Year and Date: 2016-09-04
  • Int'l Joint Research
• [Presentation] Characterization of doped diamond-like carbon films prepared by pulsed laser deposition (2016)
  • Author(s): H. Nakazawa
  • Organizer: Energy Materials Nanotechnology Cancun Meeting
  • Place of Presentation: Cancun, Mexico
  • Year and Date: 2016-06-05
  • Int'l Joint Research / Invited
• [Presentation] Thermal stabilities of silicon/nitrogen codoped diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition (2015)
  • Author(s): H. Nakazawa, S. Okuno, K. Magara
  • Organizer: International Conference on Diamond and Carbon Materials 2015
  • Place of Presentation: Bad Homburg, Germany
  • Year and Date: 2015-09-06
  • Int'l Joint Research
• [Presentation] 高周波プラズマ化学気相成長法による窒素添加DLC薄膜の膜特性への基板バイアスの影響 (2015)
  • Author(s): 土屋政人、村上和輝、佐藤達人、高見貴弘、遠田義晴、中澤日出樹
  • Organizer: 電子情報通信学会電子部品・材料研究会
  • Place of Presentation: 弘前大学
  • Year and Date: 2015-08-10
• [Presentation] Deposition and ｃharacterization of ｓilicon/ｎitrogen-ｄoped ｄiamond-ｌike ｃarbon ｆilms (2015)
  • Author(s): H. Nakazawa
  • Organizer: Energy Materials Nanotechnology Cancun Meeting
  • Place of Presentation: Cancun, Mexico
  • Year and Date: 2015-06-08
  • Int'l Joint Research / Invited