| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2017: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2016: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2015: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Outline of Final Research Achievements |
Diamond-like carbon (DLC) films have excellent properties such as high hardness, high wear resistance, low friction, chemical inertness, and biocompatibility. In this study, we have developed silicon/nitrogen-doped DLC films that were superior to conventional DLC films in mechanical, electrical and optical properties. In addition, we examined correlations between the structure and chemical bonding and the properties of the DLC films to obtain fundamental knowledge for the further improvement of their properties. We demonstrated that the coincorporation of Si and N into the DLC films was very effective in improving the mechanical, electrical and optical properties.
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