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Development and enhancement of novel functions of silicon/nitrogen-doped diamond-like carbon films

Research Project

Project/Area Number 15K06432
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionHirosaki University

Principal Investigator

Nakazawa Hideki  弘前大学, 理工学研究科, 准教授 (90344613)

Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2017: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2016: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2015: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywordsカーボン材料 / プラズマ化学気相成長法 / レーザーアブレーション法
Outline of Final Research Achievements

Diamond-like carbon (DLC) films have excellent properties such as high hardness, high wear resistance, low friction, chemical inertness, and biocompatibility. In this study, we have developed silicon/nitrogen-doped DLC films that were superior to conventional DLC films in mechanical, electrical and optical properties. In addition, we examined correlations between the structure and chemical bonding and the properties of the DLC films to obtain fundamental knowledge for the further improvement of their properties. We demonstrated that the coincorporation of Si and N into the DLC films was very effective in improving the mechanical, electrical and optical properties.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (16 results)

All 2018 2017 2016 2015

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Acknowledgement Compliant: 1 results) Presentation (11 results) (of which Int'l Joint Research: 6 results,  Invited: 3 results)

  • [Journal Article] Impacts of substrate bias and dilution gas on the properties of Si-incorporated diamond-like carbon films by plasma deposition using organosilane as a Si source2018

    • Author(s)
      H. Nakazawa, S. Miura, K. Nakamura, Y. Nara
    • Journal Title

      Tnin Solid Films

      Volume: 654 Pages: 38-48

    • DOI

      10.1016/j.tsf.2018.03.075

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of source gases on the properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition2017

    • Author(s)
      Nakazawa Hideki、Magara Kohei、Takami Takahiro、Ogasawara Haruka、Enta Yoshiharu、Suzuki Yushi
    • Journal Title

      Thin Solid Films

      Volume: 636 Pages: 177-182

    • DOI

      10.1016/j.tsf.2017.05.046

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Synthesis of boron/nitrogen- incorporated diamond-like carbon films by pulsed laser deposition using nitrogen gas and a boron-containing graphite target2017

    • Author(s)
      H. Nakazawa, R. Osozawa, Y. Mohnai, Y. Nara
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 10 Pages: 105501-105501

    • DOI

      10.7567/jjap.56.105501

    • NAID

      210000148332

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Tribological properties and thermal stability of hydrogenated, silicon/nitrogen-coincorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition2016

    • Author(s)
      Hideki Nakazawa, Saori Okuno, Kohei Magara, Kazuki Nakamura, Soushi Miura, Yoshiharu Enta
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 12 Pages: 1255011-9

    • DOI

      10.7567/jjap.55.125501

    • NAID

      210000147302

    • Related Report
      2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] Structural and electrical properties and current-voltage characteristics of nitrogen-doped diamond-like carbon films on Si substrates by plasma-enhanced chemical vapor deposition2016

    • Author(s)
      M. Tsuchiya, K. Murakami, K. Magara, K. Nakamura, H. Ohashi, K. Tokuda, T. Takami, H. Ogasawara, Y. Enta, Y. Suzuki, S. Ando, H. Nakazawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 未定

    • NAID

      210000146590

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Preparation and characterization of nitrogen/silicon-incorporated diamond-like carbon films2018

    • Author(s)
      H. Nakazawa, K. Nakamura, H. Ohashi, T. Yokoyama, K. Tajima, N. Endo, M. Suemitsu, Y. Enta, Y. Kobayashi, Y. Suzuki
    • Organizer
      Collaborative Conference on Materials Research 2018
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Effects of nitrogen doping on the chemical bonding states and properties of silicon-doped diamond-like carbon films2017

    • Author(s)
      K. Nakamura, H. Ohashi, T. Yokoyama, K. Tajima, N. Endo, M. Suemitsu, Y. Enta, Y. Kobayashi, H. Nakazawa
    • Organizer
      The 8th International Symposium on Surface Science
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 希釈ガスに水素ガスを用いたプラズマ化学気相成長法による Si/N共添加DLC薄膜の作製と評価2016

    • Author(s)
      中村 和樹, 大橋 遼, 横山 大, 田島 圭一郎, 遠藤 則史, 末光 眞希, 遠田 義晴, 小林 康之, 中澤 日出樹
    • Organizer
      応用物理学会東北支部第71回学術講演会
    • Place of Presentation
      東北大学(仙台市)
    • Year and Date
      2016-12-01
    • Related Report
      2016 Research-status Report
  • [Presentation] 希釈ガスに水素を用いたプラズマ化学気相成長法によるSi/N共添加ダイヤモンドライクカーボンの膜特性2016

    • Author(s)
      中村 和樹, 大橋 遼, 横山 大, 田島 圭一郎, 遠藤 則史, 末光 眞希, 遠田 義晴, 中澤 日出樹
    • Organizer
      2016真空・表面科学合同講演会
    • Place of Presentation
      名古屋国際会議場(名古屋市)
    • Year and Date
      2016-11-29
    • Related Report
      2016 Research-status Report
  • [Presentation] 希釈ガスに水素ガスを用いたプラズマCVD法による N添加およびSi/N共添加DLC膜の特性比較2016

    • Author(s)
      中村 和樹, 大橋 遼, 横山 大, 田島 圭一郎, 遠藤 則史, 末光 眞希, 遠田 義晴, 中澤 日出樹
    • Organizer
      第30回ダイヤモンドシンポジウム
    • Place of Presentation
      東京大学(東京都目黒区)
    • Year and Date
      2016-11-16
    • Related Report
      2016 Research-status Report
  • [Presentation] 希釈ガスとしてH2を用いたプラズマCVD法によるDLC膜特性への SiおよびN添加効果2016

    • Author(s)
      中村 和樹, 大橋 遼, 横山 大, 田島 圭一郎, 遠藤 則史, 末光 眞希, 遠田 義晴, 中澤 日出樹
    • Organizer
      秋季第77回応用物理学会学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] Impacts of substrate bias and dilution gas on the properties of Si-doped diamond-like carbon films by plasma deposition using organosilane as a Si source2016

    • Author(s)
      H. Nakazawa, S. Miura
    • Organizer
      International Conference on Diamond and Carbon Materials 2016
    • Place of Presentation
      Montpellier, France
    • Year and Date
      2016-09-04
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Characterization of doped diamond-like carbon films prepared by pulsed laser deposition2016

    • Author(s)
      H. Nakazawa
    • Organizer
      Energy Materials Nanotechnology Cancun Meeting
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2016-06-05
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Thermal stabilities of silicon/nitrogen codoped diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition2015

    • Author(s)
      H. Nakazawa, S. Okuno, K. Magara
    • Organizer
      International Conference on Diamond and Carbon Materials 2015
    • Place of Presentation
      Bad Homburg, Germany
    • Year and Date
      2015-09-06
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] 高周波プラズマ化学気相成長法による窒素添加DLC薄膜の膜特性への基板バイアスの影響2015

    • Author(s)
      土屋政人、村上和輝、佐藤達人、高見貴弘、遠田義晴、中澤日出樹
    • Organizer
      電子情報通信学会電子部品・材料研究会
    • Place of Presentation
      弘前大学
    • Year and Date
      2015-08-10
    • Related Report
      2015 Research-status Report
  • [Presentation] Deposition and characterization of silicon/nitrogen-doped diamond-like carbon films2015

    • Author(s)
      H. Nakazawa
    • Organizer
      Energy Materials Nanotechnology Cancun Meeting
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2015-06-08
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research / Invited

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Published: 2015-04-16   Modified: 2019-03-29  

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