| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2017: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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| Outline of Final Research Achievements |
A hydrogen ion microbeam is desired to be applied to three-dimensional micro processing by direct drawing technology PBW (Proton Beam Writing). For the purpose of popularizing this technology, a compact ion microbeam system has been developed using an accelerating lens that simultaneously accelerates and focuses the beam.
In this study, beam generation of negative hydrogen ions that can make the beam diameter smaller than that of positive hydrogen ions was performed. As a result, prospects to realize microbeam formation with a beam current value of 10 pA required for PBW was obtained.
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