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Study on fabrication of nanoparticle-type superatoms by using RT atomic layer deposition

Research Project

Project/Area Number 15K13299
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Nanomaterials engineering
Research InstitutionYamagata University

Principal Investigator

Hirose Fumihiko  山形大学, 大学院理工学研究科, 教授 (50372339)

Project Period (FY) 2015-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2015: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywords原子層堆積 / ナノ微粒子 / コアシェル / 紫外線センサー / 原子層堆積法 / ナノコーティング / 微粒子 / 酸化チタン / 酸化錫 / 光触媒 / センサー / センサ
Outline of Final Research Achievements

Atomic layer depostion (ALD) has been used as a coating method on wafers although it was difficult to apply it for nanoparticels. The shell coating on the nanoparticle with ALD might pave a way to produce the new functional materials with quantum size effects. In this study, we developed the new ALD for the nanoparticles. It was proved that the prodcution of Au-core TiO2-shell particle was possible, where the thickness was controlled with nanometers of less than 100 nm. We also found a new design of thin film transistor, in which the UV detection is possible with a high sesitivity. The present ALD would be applicable for producing new functional nano materials.

Report

(3 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • Research Products

    (8 results)

All 2017 2016 2015 Other

All Journal Article (2 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 2 results,  Acknowledgement Compliant: 2 results) Presentation (4 results) (of which Int'l Joint Research: 2 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Room temperature atomic layer deposition of TiO2 on gold nanoparticles2017

    • Author(s)
      K. Tokoro, K. Kanomata, B. Ahammad, S. Kubota, F. Hirose)
    • Journal Title

      J. Vac. Sci. Technol. A

      Volume: 35 Issue: 1

    • DOI

      10.1116/1.4971398

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Growth kinetics of temperature-controlled atomic layer deposition of GaN using trimethlgallium and remote-plasma-excited NH32015

    • Author(s)
      P. Pugboon Pansila, K. Kanomata, M. Miura, B. Ahammad, S. Kubota, F. Hirose
    • Journal Title

      Applied Surface Science

      Volume: 357 Pages: 1920-1927

    • DOI

      10.1016/j.apsusc.2015.09.138

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] 室温室原子層堆積法によるTi02チャンネルTFTの試作と光センサへの応用2016

    • Author(s)
      菊地航、三浦正範、鹿又健作、有馬ボシールアハンマド、久保田繁、廣瀬文彦
    • Organizer
      電子情報通信学会 CPM研究会
    • Place of Presentation
      京都大学桂キャンパス、京都市西京区
    • Year and Date
      2016-12-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] RT plasma excited atomic layer deposition of TiO2 on Au nanoparticles2016

    • Author(s)
      K. Kikuchi, K. Kanomata, M. Miura, B. Ahammad, S. Kubota, F. Hirose
    • Organizer
      ALD2016
    • Place of Presentation
      ダブリン国際会議場、ダブリン、アイルランド
    • Year and Date
      2016-07-25
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] プラズマ励起法を用いたナノ微粒子用原子層堆積装置開発2016

    • Author(s)
      菊地 航、鹿又 健作、有馬 ボシルアハンマド、久保田 繁、廣瀬 文彦
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学 東京
    • Year and Date
      2016-03-20
    • Related Report
      2015 Research-status Report
  • [Presentation] RT atomic layer deposition of TiO2 and its application to nanoparticle coating2016

    • Author(s)
      K. Kanomata, K. Kikuchi, B. Ahmmad, S. Kubota, F. Hirose
    • Organizer
      The Joint Symposium of 10th Internaltional Symposium on Medical, Bio- and Nano-electronics and 7th International Workshop on Nanostructure and Nanoelectronics
    • Place of Presentation
      東北大学 仙台
    • Year and Date
      2016-03-03
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Remarks] 山形大学大学院理工学研究科廣瀬研究室

    • URL

      http://www.fhirose.yz.yamagata-u.ac.jp/

    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] 酸化物薄膜形成方法及び酸化物薄膜形成装置2016

    • Inventor(s)
      廣瀬文彦
    • Industrial Property Rights Holder
      山形大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-02-05
    • Related Report
      2015 Research-status Report

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Published: 2015-04-16   Modified: 2018-03-22  

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