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Development of nano/micro system using supercritical fluid

Research Project

Project/Area Number 15K13316
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Nano/Microsystems
Research InstitutionTohoku University

Principal Investigator

Toda Masaya  東北大学, 工学研究科, 准教授 (40509890)

Co-Investigator(Kenkyū-buntansha) 藤井 孝志  国立研究開発法人産業技術総合研究所, 地質調査総合センター, 主任研究員 (80520874)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Fiscal Year 2016: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2015: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords超臨界二酸化炭素 / 熱計測 / マイクロシステム / 熱抵抗計測 / 表面吸着 / マイクロデバイス
Outline of Final Research Achievements

The micro fluidic chamber with narrow gap for high pressurized fluid has been designed and fabricated. The carbon dioxide (CO2) is injected into the narrow gap spaces of 0.5 μm and 1.6 μm. Their thermal resistance changes have been measured by changing the pressure and temperature. Hence, related to the effect of narrow space the critical pressure of supercritical CO2 is shifted to lower values. When the gap distance is shorter, the pressure of the minimum total-thermal-resistance becomes lower. This "narrow space effect" is enhanced by the shorter gap distance. Additionally, the change of thermal resistance related to pressure change is more responsive for narrower spacing. The smaller spacing seems to make more sensitive responsibility of the inserted fluid property. These results indicate that the filled fluid in a micro-chamber can be applied for the applications of sensing and switching devices using variable physical properties of the packaged fluid in narrow spaces.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (3 results)

All 2018 2017

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (2 results) (of which Int'l Joint Research: 1 results)

  • [Journal Article] Thermal resistance change of liquid carbon dioxide based on narrow space effect in micro chamber2018

    • Author(s)
      Masaya Toda, Tomoyuki Yamagami, Naoki Inomata, Takashi Fujii, and Takahito Ono
    • Journal Title

      Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems

      Volume: 31 Pages: 1296-1299

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] Thermal resistance change of liquid carbon dioxide based on narrow space effect in micro chamber2018

    • Author(s)
      Masaya Toda, Tomoyuki Yamagami, Naoki Inomata, Takashi Fujii, and Takahito Ono
    • Organizer
      The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ナノ表面構造を持つカンチレバーの力学応答を利用した湿度センサ2017

    • Author(s)
      外間 匠, 菊池 亜紀応, Nguyen Van Toan, 戸田 雅也, 小野 崇人
    • Organizer
      日本機械学会東北支部 第52期講演会
    • Related Report
      2017 Annual Research Report

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Published: 2015-04-16   Modified: 2019-03-29  

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