| Project/Area Number |
15K13320
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Nano/Microsystems
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
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| Project Period (FY) |
2015-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
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| Keywords | Biomimetics / MEMS / NEMS / Biosensor / Photonic sensor / ナノ構造 / 構造色 / マルチフィジックス / バイオミメティクス / センサー / 自己組織化 / ナノ加工 / ナノフォトニクス / マルチフィジックスセンサー / 面分布型センサー |
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| Outline of Final Research Achievements |
We successfully developed and demonstrated the use of vacuum ultraviolet (VUV) irradiation in the bonding of various substrates, including polycarbonate (PC), cyclic olefin polymer (COP), polydimethylsiloxane (PDMS) and polymethyl methacrylate (PMMA). In contrast to previous applications of this technique, the present study used VUV radiation at wavelengths below 160 nm so as to take advantage of the higher energy in this range. We also analyzed VUV modified surface by water contact angle measurements, attenuated total reflectance Fourier transform infrared spectroscopy (ATR-FTIR), time of flight secondary ion mass spectrometry (TOF-SIMS) and atomic force microscopy (AFM). As a result, it was found that the bonding mechanism would rely on both surface roughness and hydroxyl group concentration induced by VUV irradiation.
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