MEMS plasmonic tunable color sheet by electrostatic actuator using stretchable thin film

• Project/Area Number: 15K13322
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Nano/Microsystems
• Research Institution: Toyohashi University of Technology
• Principal Investigator: Takahashi Kazuhiro 豊橋技術科学大学, 工学(系)研究科(研究院), 講師 (90549346)
• Project Period (FY): 2015-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000); Fiscal Year 2016: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2015: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
• Keywords: 表面プラズモン / MEMS / 有機デバイス / 可変フィルタ / ＭＥＭＳ

Outline of Final Research Achievements

We developed a highly transmissive color filter using surface plasmon-based extraordinary optical transmission which uses Al subwavelength periodic structures on stretchable thin film with high transparency. We demonstrated a tunable color filter by means of voltage control and high wavelength selectivity with full wave at half maximum of 100 nm using metal-insulator-metal structures.

Research Products

• [Journal Article] Optomechanical characterization of freestanding stretchable nanosheet based on polystyrene-polybutadiene-polystyrene copolymer (2017)
  • Author(s): H. Kumagai, N. Sato, S. Takeoka, K. Sawada, T. Fujie, and K. Takahashi
  • Journal Title: Applied Physics Express Volume: 10 Issue: 1 Pages: 011601-011601
  • DOI: 10.7567/apex.10.011601
  • NAID: 210000135711
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Nano-optomechanical characterization of surface-plasmon-based tunable filter integrated with comb-drive actuator (2017)
  • Author(s): H. Honma, M. Mitsudome, M. Ishida, K. Sawada, and K. Takahashi
  • Journal Title: Journal of Micromechanics and Microengineering Volume: 27 Issue: 3 Pages: 034001-034001
  • DOI: 10.1088/1361-6439/aa5aa7
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Measurement of viscoelasticity of UV photoresist used for nanoimprint lithography under confinement in nanometer-sized gaps (2017)
  • Author(s): S. Itoh, K. Takahashi, H. Morita, K. Fukuzawa, and H. Zhan
  • Journal Title: Japanese Journal of Applied Physics Volume: 56 Issue: 6S1 Pages: 06GL02-06GL02
  • DOI: 10.7567/jjap.56.06gl02
  • NAID: 210000147919
  • Peer Reviewed
• [Journal Article] Continuously controlled excitation wavelength of surface plasmons by nanomechanical stretched subwavelength grating (2016)
  • Author(s): H. Honma, K. Takahashi, M. Ishida, and K. Sawada
  • Journal Title: Applied Physics Express Volume: 9 Issue: 2 Pages: 027201-027201
  • DOI: 10.7567/apex.9.027201
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Fabrication of free-standing subwavelength metal-insulator-metal gratings using high aspect ratio nanoimprint techniques (2016)
  • Author(s): H. Honma, M. Mitsudome, S. Itoh, M. Ishida, K. Sawada, and K. Takahashi
  • Journal Title: Japanese Journal of Applied Physics Volume: 未定
  • NAID: 210000146700
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Fabrication of a thin plasmonic color sheet embedded with Al subwavelength gratings in parylene (2016)
  • Author(s): H. Kumagai, H. Honma, M. Ishida, K. Sawada, and K. Takahashi
  • Journal Title: Displays Volume: 未定
  • NAID: 40020849167
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] Viscoelasticity of a Photoresist Used for Nanoimprint Lithography Measured Under Confinement in Nanometer-sized Gaps (2016)
  • Author(s): S. Ito, K. Takahashi, K. Fukuzawa and H. Zhang
  • Organizer: 29th Int. Microprocesses and Nanotechnology Conf. (MNC 2016)
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 2016-11-08
  • Int'l Joint Research
• [Presentation] 伸縮性ナノシート自立膜の製作および光学機械特性評価 (2016)
  • Author(s): 熊谷隼人，佐藤信孝，武岡真司，澤田和明，藤枝俊宣，高橋一浩
  • Organizer: 第33回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 平戸文化センター，長崎
  • Year and Date: 2016-10-24
• [Presentation] MEMS静電アクチュエータを用いたナノ機械伸縮による可変プラズモニックカラーフィルタ (2016)
  • Author(s): 満留将人，本間浩章，石田誠，澤田和明，高橋一浩
  • Organizer: 第33回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 平戸文化センター，長崎
  • Year and Date: 2016-10-24
• [Presentation] 微細構造による発色を利用した表示素子 (2016)
  • Author(s): 高橋一浩
  • Organizer: 第33回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 平戸文化センター，長崎
  • Year and Date: 2016-10-24
  • Invited
• [Presentation] A Tunable Plasmonic Color Filter by Nanomechanical Stretch using MEMS Electrostatic (2016)
  • Author(s): M. Mitsudome, H. Honma, K. Sawada and K. Takahashi
  • Organizer: IEEE 2016 Int. Conf. on Optical MEMS and Nanophotonics
  • Place of Presentation: Singapore
  • Year and Date: 2016-07-31
  • Int'l Joint Research
• [Presentation] Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application (2016)
  • Author(s): H. Kumagai, N. Sato, S. Takeoka, K. Sawada, T. Fujie and K. Takahashi
  • Organizer: IEEE 2016 Int. Conf. on Optical MEMS and Nanophotonics
  • Place of Presentation: Singapore
  • Year and Date: 2016-07-31
  • Int'l Joint Research
• [Presentation] Widely tunable plasmonic bandpass filter integrated with Al subwavelength grating and comb-drive actuator (2016)
  • Author(s): H. Honma, K. Takahashi, M. Ishida, and K. Sawada
  • Organizer: Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT 2016)
  • Place of Presentation: Kanazawa, Japan
  • Year and Date: 2016-06-26
  • Int'l Joint Research
• [Presentation] パリレン薄膜を用いたアルミサブ波長格子によるプラズモニックカラーシートの製作 (2016)
  • Author(s): 熊谷隼人，本間浩章，石田誠，澤田和明，高橋一浩
  • Organizer: 電子情報通信学会 シリコン材料・デバイス研究会
  • Place of Presentation: 静岡大学 浜松キャンパス
  • Year and Date: 2016-05-19
• [Presentation] Highly Transmissive Plasmonic Color Filter by Free-Standing Metal-Insulator-Metal Subwavelength Grating (2016)
  • Author(s): M. Mitsudome, H. Honma, S. Itoh, M. Ishida, K. Sawada, and K. Takahashi
  • Organizer: The 11th IEEE Int'l Conf. on Nano/Micro Engineered & Molecular Systems (NEMS 2016)
  • Place of Presentation: Matsushima Bay & Sendai, Japan
  • Year and Date: 2016-04-17
  • Int'l Joint Research
• [Presentation] MEMS技術による表面プラズモン異常透過現象の励起波長連続可変制御 (2016)
  • Author(s): 本間浩章，高橋一浩，石田誠，澤田和明
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学大岡山キャンパス
  • Year and Date: 2016-03-19
• [Presentation] ナノインプリント技術を用いた金属-誘電体-金属サブ波長格子の製作 (2016)
  • Author(s): 満留将人，本間浩章，伊藤伸太郎，石田誠，澤田和明，高橋一浩
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学大岡山キャンパス
  • Year and Date: 2016-03-19
• [Presentation] Fabrication of metal-insulator-metal sub-micron gratings by high aspect ratio nanoimprint (2015)
  • Author(s): M. Mitsudome, H. Honma, S. Itoh, M. Ishida, K. Sawada, and K. Takahashi
  • Organizer: 28th Int. Microprocesses and Nanotechnology Conf. (MNC2015)
  • Place of Presentation: Toyama, Japan
  • Year and Date: 2015-11-10
  • Int'l Joint Research
• [Presentation] 金属ナノ周期構造を利用したプラズモニックカラーシートの製作 (2015)
  • Author(s): 熊谷隼人，本間浩章，石田誠，澤田和明，高橋一浩
  • Organizer: 電子情報通信学会電子デバイス研究会
  • Place of Presentation: 機械振興会館
  • Year and Date: 2015-08-03
• [Presentation] 静電櫛歯アクチュエータを用いた表面プラズモン可変カラーフィルタの製作 (2015)
  • Author(s): 本間浩章，高橋一浩，石田誠，澤田和明
  • Organizer: 電気学会Ｅ部門マイクロマシン・センサシステム研究会
  • Place of Presentation: 九州大学医学部百年講堂
  • Year and Date: 2015-07-02
• [Presentation] Fabrication of tunable plasmonic color filter using Al subwavelength grating integrated with electrostatic comb-drive actuator (2015)
  • Author(s): H. Honma, K. Takahashi, M. Ishida, and K. Sawada
  • Organizer: 18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers’15)
  • Place of Presentation: Anchorage, Alaska, USA
  • Year and Date: 2015-06-21
  • Int'l Joint Research
• [Remarks]
  • URL: http://int.ee.tut.ac.jp/icg/wp/
• [Remarks]
  • URL: http://int.ee.tut.ac.jp/icg/wp/