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Development of an in-situ method to observe CVD growth by black body radiation

Research Project

Project/Area Number 15K13346
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Crystal engineering
Research InstitutionThe University of Tokyo

Principal Investigator

Saiki Koichiro  東京大学, 大学院新領域創成科学研究科, 教授 (70143394)

Co-Investigator(Renkei-kenkyūsha) OBATA Seiji  東京大学, 大学院新領域創成科学研究科, 特任助教 (90616244)
Project Period (FY) 2015-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2016: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2015: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Keywordsグラフェン / 化学気相成長 / 熱放射 / その場観察 / 核形成 / 熱放射顕微鏡 / 成長機構 / 単一ドメイン
Outline of Final Research Achievements

We investigate the graphene nucleation site and its lateral growth in real space by radiation-mode optical microscopy (Rad-OM), which we have developed for the real-time observation of the graphene growth in CVD conditions. We found the bright spot in the Rad-OM image worked as a nucleation site through continuous observation of the Cu substrate from the pretreatment to the graphene growth. The bright spot, considered as carbon impurity, was effectively removed by Ar bombardment, the optimized condition of which highly reduced the nucleation density from 600/mm2 to less than 1/mm2. We succeeded in demonstrating the graphene growth beyond the diameter of 1mm by Rad-OM video. The present result directly elucidates the role of carbon impurity and provides a recipe to grow a single-crystalline and large-area graphene by CVD.

Report

(3 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • Research Products

    (12 results)

All 2017 2016 2015 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Acknowledgement Compliant: 3 results) Presentation (7 results) (of which Int'l Joint Research: 1 results,  Invited: 2 results) Book (1 results) Remarks (1 results)

  • [Journal Article] Nucleation site in CVD graphene growth investigated by radiation-mode optical microscopy2017

    • Author(s)
      Takanobu Taira, Seiji Obata, Koichiro Saiki
    • Journal Title

      Applied. Physics Express

      Volume: 10 Issue: 5 Pages: 055502-055502

    • DOI

      10.7567/apex.10.055502

    • NAID

      210000135853

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] 熱放射顕微法によるグラフェン成長のリアルタイム観察2016

    • Author(s)
      斉木幸一朗,寺澤知潮
    • Journal Title

      応用物理

      Volume: 85 Pages: 485-489

    • NAID

      130007715364

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Radiation Mode Optical Microscopy on the Growth of Graphene2015

    • Author(s)
      T. Terasawa and K. Saiki
    • Journal Title

      Nature Communications

      Volume: 6 Issue: 1 Pages: 6834-6834

    • DOI

      10.1038/ncomms7834

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] 熱放射顕微法によるグラフェン気相成長過程の観察2017

    • Author(s)
      斉木 幸一朗
    • Organizer
      日本表面科学会 第2回関東支部講演大会
    • Place of Presentation
      東京大学山上会館
    • Year and Date
      2017-04-08
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] グラフェンCVD成長における核発生点のin-situ観察2017

    • Author(s)
      平良 隆信,小幡 誠司,斉木 幸一朗
    • Organizer
      応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(横浜)
    • Year and Date
      2017-03-16
    • Related Report
      2016 Annual Research Report
  • [Presentation] グラフェン気相成長過程の微視的解析2016

    • Author(s)
      斉木 幸一朗
    • Organizer
      2016 年真空・表面科学合同講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2016-11-29
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Cu箔基板上グラフェンCVD成長における核発生支配要因2016

    • Author(s)
      平良 隆信,小幡 誠司,斉木 幸一朗
    • Organizer
      応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟)
    • Year and Date
      2016-09-16
    • Related Report
      2016 Annual Research Report
  • [Presentation] グラフェンCVD成長における核発生と基板形状のin-situ観察2016

    • Author(s)
      平良 隆信,寺澤 知潮,小幡 誠司,斉木 幸一朗
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学(東京)
    • Year and Date
      2016-03-20
    • Related Report
      2015 Research-status Report
  • [Presentation] 基板加熱がグラフェン CVD 成長に与える影響の in situ 観察2015

    • Author(s)
      寺澤知潮,平良孝信,小幡誠司,斉木幸一朗
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(名古屋市))
    • Year and Date
      2015-09-14
    • Related Report
      2015 Research-status Report
  • [Presentation] Real-time Radiation-mode Optical Microscopy of Chemical Vapor Deposition Growth of Graphene on a Copper Substrate2015

    • Author(s)
      Tomo-o Terasawa, Koichiro Saiki
    • Organizer
      The 16th International Conference on the Science and Applications of Nanotubes
    • Place of Presentation
      Nagoya Univ. (Nagoya)
    • Year and Date
      2015-06-28
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Book] カーボンナノチューブ・グラフェン研究の応用最前線 (分担執筆)2016

    • Author(s)
      寺澤知潮,斉木幸一朗
    • Total Pages
      480
    • Publisher
      エヌ・ティー・エス出版
    • Related Report
      2016 Annual Research Report
  • [Remarks] 金属 Cu 基板上で成長するグラフェンのリアルタイム観察に世界で初めて成功しました

    • URL

      http://yukimuki.k.u-tokyo.ac.jp/

    • Related Report
      2016 Annual Research Report

URL: 

Published: 2015-04-16   Modified: 2018-03-22  

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