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Growth of high quality graphene using wafer bonding and high-frequency devices based on a new principle

Research Project

Project/Area Number 15K13353
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionTohoku University

Principal Investigator

Fukidome Hirokazu  東北大学, 電気通信研究所, 准教授 (10342841)

Co-Investigator(Kenkyū-buntansha) 末光 眞希  東北大学, 電気通信研究所, 教授 (00134057)
Project Period (FY) 2015-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2016: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2015: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywordsグラフェン / 結晶成長 / 電界効果トランジスタ / 接合 / トランジスタ / 高品質SiC単結晶薄膜
Outline of Final Research Achievements

Excellent physical properties of graphene enables to realize transistors operating at terahertz frequencies. I have succeeded in growing high-quality graphene on substrates suitable for device application by using fabrication method of singlecrystalline SiC thin film that was separated from SiC single bulk crystal and bonded with the subtrates suitable for device applications.Graphene thus formed exhibits a linearity of band dispersions and high carrier mobility. Furthermore, I have succeeded in fabricating transistors using graphene thus formed, and showed that it is suitable for high-speed electronic device applications.

Report

(3 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • Research Products

    (10 results)

All 2016 2015 Other

All Presentation (3 results) (of which Invited: 2 results) Book (1 results) Remarks (1 results) Patent(Industrial Property Rights) (5 results)

  • [Presentation] 25.オペランド顕微分光を用いた電子状態の変調の可視化による先端デバイス開発2016

    • Author(s)
      吹留博一
    • Organizer
      理化学研究所放射光連携ワークショップ「空間階層構造の可視化と物質科学研究」
    • Place of Presentation
      JPタワー(東京都千代田区)
    • Year and Date
      2016-02-16
    • Related Report
      2015 Research-status Report
    • Invited
  • [Presentation] ハイブリッドSiC基板を用いたSi終端SiC単結晶薄膜上高品質グラフェン成長2016

    • Author(s)
      遠藤 則史、秋山 昌次、田島 圭一郎、末光 眞希、小西 繁、茂木 弘、川合 信、久保田 芳宏、堀場 弘司、組頭 広志、吹留 博一
    • Organizer
      第77会応用物理学会講演会
    • Place of Presentation
      朱鷺メッセ、新潟市
    • Related Report
      2016 Annual Research Report
  • [Presentation] 二次元原子薄膜は使えるのか?2016

    • Author(s)
      吹留博一
    • Organizer
      セミコンファレンス
    • Place of Presentation
      浅虫温泉、青森市
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Book] すごいぞ! 身のまわりの表面科学 ツルツル、ピカピカ、ザラザラの不思議2015

    • Author(s)
      吹留博一、雨宮健太、猪飼篤、池田太一、板倉明子、魚津吉弘、打越哲郎、岡真一郎、尾嶋正治、小幡章、加納眞、木口学、久保田純、近藤寛、齋藤彰、須崎友文、高井まどか、竹内俊文、富重圭一、庭野道夫
    • Total Pages
      272
    • Publisher
      講談社
    • Related Report
      2015 Research-status Report
  • [Remarks] 末光・吹留研究室ホームページ

    • URL

      http://www.suemitsu.riec.tohoku.ac.jp/

    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置2016

    • Inventor(s)
      末光真希、吹留博一、舘野泰範、岡田政也
    • Industrial Property Rights Holder
      国立大学法人東北大学、住友電気工業株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-242417
    • Filing Date
      2016-12-14
    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] 積層体および電子素子2016

    • Inventor(s)
      末光真希、吹留博一、舘野泰範、岡田政也
    • Industrial Property Rights Holder
      国立大学法人東北大学、住友電気工業株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-234445
    • Filing Date
      2016-12-01
    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] グラフェントランジスタおよびその製造方法2016

    • Inventor(s)
      末光真希、吹留博一、舘野泰範、岡田政也
    • Industrial Property Rights Holder
      国立大学法人東北大学、住友電気工業株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-234207
    • Filing Date
      2016-12-01
    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置2016

    • Inventor(s)
      末光真希、吹留博一、舘野泰範、岡田政也
    • Industrial Property Rights Holder
      国立大学法人東北大学、住友電気工業株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-217291
    • Filing Date
      2016-11-07
    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] SiC構造体およびその製造方法ならびに半導体装置2016

    • Inventor(s)
      末光真希、吹留博一、長澤弘幸、舘野泰範
    • Industrial Property Rights Holder
      国立大学法人東北大学、住友電気工業株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-172296
    • Filing Date
      2016-09-02
    • Related Report
      2016 Annual Research Report

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Published: 2015-04-16   Modified: 2018-03-22  

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