Research on X-Ray optics by quasi-crystal pattern

• Project/Area Number: 15K13397
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: General applied physics
• Research Institution: University of Tsukuba
• Principal Investigator: ITOH Masahide 筑波大学, 数理物質系, 教授 (30150874)
• Co-Investigator(Kenkyū-buntansha): 青木 貞雄 筑波大学, 数理物質系(名誉教授), 名誉教授 (50016804)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2015: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
• Keywords: 電磁場解析 / 準結晶 / X線集光素子 / 回折限界 / 準結晶構造 / Ｘ線集光素子 / Ｘ線集光

Outline of Final Research Achievements

As optical components in soft X-ray region, such as Wolter-type mirror and/or Freznel zone-plate lens, have a small numerical aperture, it is difficult to get a bright and high resolution images in microscope system. The purpose of this research is to develop the new focusing optical element to get X-ray spot of an atomic order using a quasicrystal pattern.
In this research we simulate the focusing effect of quasicrystal optical element with computer. We also made quasicrystal pattern by using a focused ion beam equipment and performed an irradiation experiment using a synchrotron facility. We clarified the principle of focusing effect of quasicrystal optical elements and showed the possibility to confine the X-ray upto the wavelength level in principle.

Research Products

• [Journal Article] Cross-sectional particle measurement in the resonance domain on the substrate through scatterometry (2017)
  • Author(s): T. Hoshino, N. Watanabe, S. Aoki, K. Sakurai, and M. Itoh
  • Journal Title: Optics Express Volume: 25 Pages: 26329-26348
  • DOI: 10.1364/oe.25.026329
  • NAID: 120006364175
  • Peer Reviewed / Open Access
• [Journal Article] Cross-sectional shape evaluation of a particle by scatterometry (2016)
  • Author(s): T. Hoshino and M. Itoh
  • Journal Title: Opt. Commun. Volume: 359 Pages: 240-244
  • DOI: 10.1016/j.optcom.2015.09.063
  • Peer Reviewed
• [Presentation] ペンローズパターン・ピンホールアレイからの軟Ｘ線の回折 (2017)
  • Author(s): 渡辺紀生 、星野鉄哉 、伊賀裕士 、李維率、青木貞雄 、伊藤雅英
  • Organizer: 第 14 回Ｘ線結像光学シンポジウム
• [Presentation] 準結晶構造を用いた軟X線用集光素子の設計 (2017)
  • Author(s): 伊賀 裕士、李 維率、深水 嵩明、星野 鉄哉、 渡辺 紀生、青木 貞雄、伊藤 雅英
  • Organizer: Optics & Photonics Japan 2017
• [Presentation] Ｘ線用準結晶集光素子の設計 (2017)
  • Author(s): 李 維率、伊賀 裕士、深水 嵩明、星野 鉄哉、 渡辺 紀生、青木 貞雄、伊藤 雅英
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] 準結晶パターンを用いた集光素子の作製 (2016)
  • Author(s): 深水 嵩明，李 維率，星野 鉄哉，杉坂 純一郎，渡辺 紀生，青木 貞雄，伊藤 雅英
  • Organizer: Optics & Photonics Japan 2016
  • Place of Presentation: 筑波大学（東京都文京区大塚）
  • Year and Date: 2016-10-30
• [Presentation] Design of quasicrystal structure for X-ray focusing (2016)
  • Author(s): T. Hoshino, T. Fukamizu, I. Li, J. Sugisaka, N. Watanabe, S.Aoki and M. Itoh
  • Organizer: International Conference on X-ray Optics,Detectors, Sources, and their Applications 2016
  • Place of Presentation: パシフィコ横浜（神奈川県横浜市西区）
  • Year and Date: 2016-05-18
  • Int'l Joint Research
• [Presentation] Ｘ線用準結晶集光素子の設計 (2016)
  • Author(s): 深水 嵩明、李 維率、星野 鉄哉、杉坂 純一郎、渡辺 紀生、青木 貞雄 、伊藤 雅英
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス（東京都目黒区）
  • Year and Date: 2016-03-19
• [Patent(Industrial Property Rights)] 光計測システムおよび光計測方法 (2016)
  • Inventor(s): 星野鉄哉、渡辺紀生、青木貞雄、桜井健次、伊藤雅英
  • Industrial Property Rights Holder: 星野鉄哉、渡辺紀生、青木貞雄、桜井健次、伊藤雅英
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2016-204385
  • Filing Date: 2016-10-18