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Research on X-Ray optics by quasi-crystal pattern

Research Project

Project/Area Number 15K13397
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field General applied physics
Research InstitutionUniversity of Tsukuba

Principal Investigator

ITOH Masahide  筑波大学, 数理物質系, 教授 (30150874)

Co-Investigator(Kenkyū-buntansha) 青木 貞雄  筑波大学, 数理物質系(名誉教授), 名誉教授 (50016804)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2015: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywords電磁場解析 / 準結晶 / X線集光素子 / 回折限界 / 準結晶構造 / X線集光素子 / X線集光
Outline of Final Research Achievements

As optical components in soft X-ray region, such as Wolter-type mirror and/or Freznel zone-plate lens, have a small numerical aperture, it is difficult to get a bright and high resolution images in microscope system. The purpose of this research is to develop the new focusing optical element to get X-ray spot of an atomic order using a quasicrystal pattern.
In this research we simulate the focusing effect of quasicrystal optical element with computer. We also made quasicrystal pattern by using a focused ion beam equipment and performed an irradiation experiment using a synchrotron facility. We clarified the principle of focusing effect of quasicrystal optical elements and showed the possibility to confine the X-ray upto the wavelength level in principle.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (9 results)

All 2017 2016

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 1 results) Presentation (6 results) (of which Int'l Joint Research: 1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Cross-sectional particle measurement in the resonance domain on the substrate through scatterometry2017

    • Author(s)
      T. Hoshino, N. Watanabe, S. Aoki, K. Sakurai, and M. Itoh
    • Journal Title

      Opt. Express

      Volume: 25 Issue: 21 Pages: 26329-26348

    • DOI

      10.1364/oe.25.026329

    • NAID

      120007134692

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Cross-sectional shape evaluation of a particle by scatterometry2016

    • Author(s)
      T. Hoshino and M. Itoh
    • Journal Title

      Opt. Commun.

      Volume: 359 Pages: 240-244

    • DOI

      10.1016/j.optcom.2015.09.063

    • Related Report
      2015 Research-status Report
    • Peer Reviewed
  • [Presentation] ペンローズパターン・ピンホールアレイからの軟X線の回折2017

    • Author(s)
      渡辺紀生 、星野鉄哉 、伊賀裕士 、李維率、青木貞雄 、伊藤雅英
    • Organizer
      第 14 回X線結像光学シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 準結晶構造を用いた軟X線用集光素子の設計2017

    • Author(s)
      伊賀 裕士、李 維率、深水 嵩明、星野 鉄哉、 渡辺 紀生、青木 貞雄、伊藤 雅英
    • Organizer
      Optics & Photonics Japan 2017
    • Related Report
      2017 Annual Research Report
  • [Presentation] X線用準結晶集光素子の設計2017

    • Author(s)
      李 維率、伊賀 裕士、深水 嵩明、星野 鉄哉、 渡辺 紀生、青木 貞雄、伊藤 雅英
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 準結晶パターンを用いた集光素子の作製2016

    • Author(s)
      深水 嵩明,李 維率,星野 鉄哉,杉坂 純一郎,渡辺 紀生,青木 貞雄,伊藤 雅英
    • Organizer
      Optics & Photonics Japan 2016
    • Place of Presentation
      筑波大学(東京都文京区大塚)
    • Year and Date
      2016-10-30
    • Related Report
      2016 Research-status Report
  • [Presentation] Design of quasicrystal structure for X-ray focusing2016

    • Author(s)
      T. Hoshino, T. Fukamizu, I. Li, J. Sugisaka, N. Watanabe, S.Aoki and M. Itoh
    • Organizer
      International Conference on X-ray Optics,Detectors, Sources, and their Applications 2016
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市西区)
    • Year and Date
      2016-05-18
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] X線用準結晶集光素子の設計2016

    • Author(s)
      深水 嵩明、李 維率、星野 鉄哉、杉坂 純一郎、渡辺 紀生、青木 貞雄 、伊藤 雅英
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学 大岡山キャンパス(東京都目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Patent(Industrial Property Rights)] 光計測システムおよび光計測方法2016

    • Inventor(s)
      星野鉄哉、渡辺紀生、青木貞雄、桜井健次、伊藤雅英
    • Industrial Property Rights Holder
      星野鉄哉、渡辺紀生、青木貞雄、桜井健次、伊藤雅英
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-204385
    • Filing Date
      2016-10-18
    • Related Report
      2016 Research-status Report

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Published: 2015-04-16   Modified: 2019-03-29  

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