| Project/Area Number |
15K13518
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Condensed matter physics II
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| Research Institution | Niigata University |
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Principal Investigator |
NEMOTO Yuichi 新潟大学, 自然科学系, 准教授 (10303174)
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| Co-Investigator(Renkei-kenkyūsha) |
AKATSU Mitsuhiro 新潟大学, 自然科学系, 助教 (10431876)
MITSUMOTO Keisuke 新潟大学, 自然科学系, 特任助教 (50515567)
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| Research Collaborator |
KANETA Hiroshi 九州工業大学, 特任教授
GOTO Terutaka 新潟大学, 自然科学系, フェロー
KASHIMA Kazuhiko グローバルウェーハズ・ジャパン(株), 技監
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2016: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2015: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
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| Keywords | 超音波計測 / 原子空孔 / 表面弾性波 / 半導体 / 強相関電子系 / 電子物性 / 超音波 / 原子空孔軌道 / 強相関 |
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| Outline of Final Research Achievements |
Observation of vacancy in silicon crystal and elucidation of its electronic state is a challenging issue in both solid-state physics and application technologies. We successfully observe vacancy orbital through elastic softening with decreasing temperature by using ultrasound measurements. Extended vacancy orbital leads to extremely strong quadrupole-strain interaction, which allows us to observe elastic softening at low temperatures even in dilute vacancy below 1 ppb. Especially, evaluation of vacancy concentration in a surface region of highly qualified silicon wafers is desirable for control of micro defects, that originates in vacancy, about nanometer in size. A benchmark of the achievement of surface acoustic wave with high frequency measurements will be a powerful evaluating method in rapidly advancing semiconductor industry.
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