Development of surface acoustic wave devices and its application to strongly correlated electron systems
| Project/Area Number |
15K13518
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Condensed matter physics II
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| Research Institution | Niigata University |
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Principal Investigator |
NEMOTO Yuichi 新潟大学, 自然科学系, 准教授 (10303174)
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| Co-Investigator(Renkei-kenkyūsha) |
AKATSU Mitsuhiro 新潟大学, 自然科学系, 助教 (10431876)
MITSUMOTO Keisuke 新潟大学, 自然科学系, 特任助教 (50515567)
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| Research Collaborator |
KANETA Hiroshi 九州工業大学, 特任教授
GOTO Terutaka 新潟大学, 自然科学系, フェロー
KASHIMA Kazuhiko グローバルウェーハズ・ジャパン(株), 技監
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2016: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2015: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
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| Keywords | 超音波計測 / 原子空孔 / 表面弾性波 / 半導体 / 強相関電子系 / 電子物性 / 超音波 / 原子空孔軌道 / 強相関 |
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| Outline of Final Research Achievements |
Observation of vacancy in silicon crystal and elucidation of its electronic state is a challenging issue in both solid-state physics and application technologies. We successfully observe vacancy orbital through elastic softening with decreasing temperature by using ultrasound measurements. Extended vacancy orbital leads to extremely strong quadrupole-strain interaction, which allows us to observe elastic softening at low temperatures even in dilute vacancy below 1 ppb. Especially, evaluation of vacancy concentration in a surface region of highly qualified silicon wafers is desirable for control of micro defects, that originates in vacancy, about nanometer in size. A benchmark of the achievement of surface acoustic wave with high frequency measurements will be a powerful evaluating method in rapidly advancing semiconductor industry.
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Report
(4 results)
Research Products
(14 results)
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[Journal Article] Neutron-scattering study of yttrium iron garnet2018
Author(s)
S. Shamoto, T. U. Ito, H. Onishi, H. Yamauchi, Y. Inamura, M. Matsuura, M. Akatsu, K. Kodama, A. Nakao, T. Moyoshi, K. Munakata,T. Ohhara, M. Nakamura, S. Ohira-Kawamura, Y. Nemoto, and K. Shibata
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Journal Title
Physical Review B
Volume: 97
Issue: 5
Pages: 1-9
DOI
Related Report
Peer Reviewed / Open Access
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[Presentation] Observation of Vacancy in Crystalline Silicon by Surface Acoustic Wave Measurement2016
Author(s)
K. Mitsumoto, M. Akatsu, S. Baba, R. Takasu, Y. Nemoto, T. Goto, H. Yamada-Kaneta, Y. Furumura, H. Saito, K. Kashima, Y. Saito
Organizer
BIT's 2nd Annual World Congress of Smart Materials-2016
Place of Presentation
Grand Copthorne Waterfront Hotel, Singapore
Year and Date
2016-03-04
Related Report
Int'l Joint Research / Invited
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