High Sensitive Optical Detection of Nano Particulate Defects with Autonomous Search-and-Split Liquid Probe
| Project/Area Number |
15K13841
|
|---|
| Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Production engineering/Processing studies
|
|---|
| Research Institution | The University of Tokyo |
|---|
Principal Investigator |
TAKAHASHI SATORU 東京大学, 先端科学技術研究センター, 教授 (30283724)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
高増 潔 東京大学, 大学院工学系研究科(工学部), 教授 (70154896)
|
|---|
| Project Period (FY) |
2015-04-01 – 2017-03-31
|
| Project Status |
Completed (Fiscal Year 2016)
|
| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2015: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
|
|---|
| Keywords | ナノ欠陥 / ナノ計測 / 光計測 / シリコンウエハ / ナノ異物 / 欠陥検査 / シリコンウエハ基板 |
|---|
| Outline of Final Research Achievements |
We propose a new optical measurement method, which can be applied to in-process inspection for nano particulate defects on a bare semiconductor wafer surface. The proposed method is uniquely characterized by combining a volatile inert liquid as a special near-field physical response sensing probe and a far-field optical sensing, vertical resolution of which goes beyond the nano-scale. The method can provide not only autonomously detect each nano defect by an inherent property of the volatile liquid but also simultaneously detect all defects located within a viewing field of the optical observation. Both theoretical and experimental analyses verified the basic feasibility of the proposed concept.
|
Report
(3 results)
Research Products
(11 results)
