Development of soft process of dimensional transformation for Si by non-equilibrium high-pressure hydrogen plasma
| Project/Area Number |
15K13848
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Osaka University |
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Principal Investigator |
Ohmi Hiromasa 大阪大学, 工学研究科, 助教 (00335382)
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| Research Collaborator |
SIHONDA Fumiya
HIRANO Tatsuya
TAKEI Norihisa
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| Project Period (FY) |
2015-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | シリコン / 水素 / プラズマ / ナノ粒子 / ナノシリコン / 水素プラズマ / 微粒子 / 精製 / 金属級シリコン |
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| Outline of Final Research Achievements |
Nano-sized Si (n-Si) particle has drawn strong attention as key material for the next-generation opt-electronic devices, such as quantum dot solar cell greater than the theoretical efficiency of Si bulk cell, Si visible light emitting diode, and negative-electrode active material of higher capacity and long cycle lifetime Li ion battery. In this study, we attempted to create n-Si particles from bulk Si material by using a non-equilibrium high-pressure hydrogen plasma toward a low cost production of n-Si particle for negative-electrode active material of Li ion battery from cheap Si bulk material. We developed the various type high-pressure hydrogen plasma sources and evaluated their properties. At last, by using a slit type plasma source, we achieved to create n-Si particles with their diameters of less than 50 nm.
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Report
(3 results)
Research Products
(6 results)
