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Development of soft process of dimensional transformation for Si by non-equilibrium high-pressure hydrogen plasma

Research Project

Project/Area Number 15K13848
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Production engineering/Processing studies
Research InstitutionOsaka University

Principal Investigator

Ohmi Hiromasa  大阪大学, 工学研究科, 助教 (00335382)

Research Collaborator SIHONDA Fumiya  
HIRANO Tatsuya  
TAKEI Norihisa  
Project Period (FY) 2015-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywordsシリコン / 水素 / プラズマ / ナノ粒子 / ナノシリコン / 水素プラズマ / 微粒子 / 精製 / 金属級シリコン
Outline of Final Research Achievements

Nano-sized Si (n-Si) particle has drawn strong attention as key material for the next-generation opt-electronic devices, such as quantum dot solar cell greater than the theoretical efficiency of Si bulk cell, Si visible light emitting diode, and negative-electrode active material of higher capacity and long cycle lifetime Li ion battery. In this study, we attempted to create n-Si particles from bulk Si material by using a non-equilibrium high-pressure hydrogen plasma toward a low cost production of n-Si particle for negative-electrode active material of Li ion battery from cheap Si bulk material. We developed the various type high-pressure hydrogen plasma sources and evaluated their properties. At last, by using a slit type plasma source, we achieved to create n-Si particles with their diameters of less than 50 nm.

Report

(3 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • Research Products

    (6 results)

All 2016 2015

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (5 results) (of which Int'l Joint Research: 2 results)

  • [Journal Article] Efficiency of silane gas generation in high-rate silicon etching by narrow-gap microwave hydrogen plasma2016

    • Author(s)
      Hiromasa Ohmi, Takeshi Funaki, Hiroaki Kakiuchi and Kiyoshi Yasutake
    • Journal Title

      J. Physics D: Appl. Phys.

      Volume: 49 Issue: 3 Pages: 035202-035202

    • DOI

      10.1088/0022-3727/49/3/035202

    • Related Report
      2015 Research-status Report
    • Peer Reviewed
  • [Presentation] On-site SiH4 generation using high-density microwave H2 plasma generated in narrow slit-type discharge gap2016

    • Author(s)
      Hiromasa Ohmi, F. Shinoda, N. Takei, H. Kakiuchi, K. Yasutake
    • Organizer
      16th Joint Vacuum Conference (JVC-16) and 14th European Vacuum Conference (EVC-14)
    • Place of Presentation
      Portoroz, Slovenia
    • Year and Date
      2016-06-06
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] スリット型狭ギャッププラズマ源を用いたオンサイトSiH4生成2016

    • Author(s)
      武居則久,篠田史也,垣内弘章,安武 潔,大参宏昌
    • Organizer
      精密工学会2016年度関西地方定期学術講演会
    • Place of Presentation
      株式会社島津製作所
    • Related Report
      2016 Annual Research Report
  • [Presentation] High-rate metal evaporation induced by high-pressure hydrogen glow discharge plasma and its application to formation of metallic fine particle and porous film2015

    • Author(s)
      H. Ohmi, H. Kakiuchi, and K. Yasutake
    • Organizer
      TACT 2015 International Thin Films Conference
    • Place of Presentation
      National Cheng Kung University, Tainan, Taiwan
    • Year and Date
      2015-11-15
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] 狭ギャップ高密度水素プラズマを用いたオンサイトSiH4生成装置の開発2015

    • Author(s)
      篠田史也,垣内弘章,安武潔,大参宏昌
    • Organizer
      第76回 応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] 高圧水素プラズマによる液体金属の超高速蒸発と多孔質金属膜の形成2015

    • Author(s)
      平野達也,垣内弘章, 安武潔, 大参宏昌
    • Organizer
      第71回マテルアルズ・テーラリング研究会
    • Place of Presentation
      軽井沢研修所
    • Year and Date
      2015-08-06
    • Related Report
      2015 Research-status Report

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Published: 2015-04-16   Modified: 2018-03-22  

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