Simultaneous in-situ measurement of oxygen defect concentration and thermal conductivity of metal oxide
Project/Area Number |
15K13888
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Research Category |
Grant-in-Aid for Challenging Exploratory Research
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Allocation Type | Multi-year Fund |
Research Field |
Thermal engineering
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Research Institution | Kyushu University |
Principal Investigator |
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Project Period (FY) |
2015-04-01 – 2017-03-31
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Project Status |
Completed (Fiscal Year 2016)
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Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2015: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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Keywords | 金属薄膜 / サーモリフレクタンス / 熱伝導率 / 薄膜 / 金属酸化物 / 酸素欠陥 |
Outline of Final Research Achievements |
To improve an analytical model of thermoreflectance method, the cross-plane thermal transport, generation, and propagation of coherent acoustic-phonon wave in thin Pt film-glass substrate have been comprehensively studied by applying the picosecond laser pump-probe method with different configurations. Significantly different time-dependent reflectance signals have been obtained in different configurations and an effect superposition model is proposed to account for cross plane thermal transport inducing ipsi- and contralateral temperature change in thin Pt film, propagation of coherent acoustic-phonon wave in thin Pt film and in glass substrate. The corresponding theoretical predictions match well with the experimental data. In addition, a metal oxide thin film was prepared by PLD method (Pulsed Laser Deposition), and its thermal conductivity was measured. Furthermore, the effects of high temperature atmosphere (600 degree celsius) on a molybdenum thin film were examined.
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Report
(3 results)
Research Products
(13 results)
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[Journal Article] Thermal transport and thermal stress in a molybdenum film-glass substrate system2016
Author(s)
Thermal transport and thermal stress in a molybdenum film-glass substrate system”, Miao, T., Ma, W., Yan, S., Zhang, X., Kohno, M., Takata, Y. and Ikoma
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Journal Title
Journal of Vacuum Science and Technology B
Volume: 34
Issue: 2
Pages: 021801-021801
DOI
Related Report
Peer Reviewed / Open Access / Int'l Joint Research
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