Pinpoint Growth Technology for High Quality Piezo-nanowire using Tailored Substrate

• Project/Area Number: 15K13944
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Electronic materials/Electric materials
• Research Institution: Nagoya University
• Principal Investigator: Yamada Tomoaki 名古屋大学, 工学研究科, 准教授 (80509349)
• Co-Investigator(Kenkyū-buntansha): 長崎 正雅 名古屋大学, 工学研究科, 教授 (40273289)
• Project Period (FY): 2015-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2016: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
• Keywords: 圧電性 / ナノワイヤ

Outline of Final Research Achievements

In this study, we aimed to develop the pinpoint growth process of piezoelectric lead zirconate titanate (PZT) nanowires by using the tailored substrates, having arrayed island structures.
By utilizing a nanoimprint technique, the substrates having arrayed islands, with maximum island height of 40 nm and minimum island width of 80 nm, were successfully fabricated. It was found that PZT grew on the patterned substrate, keeping the same morphology of the substrate surface, by pulsed laser deposition.

Research Products

• [Journal Article] Fabrication and characterization of (111)-epitaxial Pb(Zr0.35Ti0.65)O3/Pb(Zr0.65Ti0.35)O3 artificial superlattice thin films (2016)
  • Author(s): Tomoaki Yamada, Youhei Ebihara, Takanori Kiguchi, Osami Sakata, Hitoshi Morioka, Takao Shimizu, Hiroshi Funakubo, Toyohiko J. Konno, Masahito Yoshino, and Takanori Nagasaki
  • Journal Title: Jpn. J. Appl. Phys Volume: 55 Issue: 10S Pages: 10TA20-10TA20
  • DOI: 10.7567/jjap.55.10ta20
  • NAID: 210000147170
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Fabrication of Tetragonal Pb(Zr,Ti)O3 Nanorods by Focused Ion Beam and Characterization of the Domain Structure (2016)
  • Author(s): D. Ito, T. Yamada, M. Yoshino, T. Nagasaki, O. Sakata, J. Kuroishi, T. Namazu, T. Shiraishi, T. Shimizu, and H. Funakubo
  • Journal Title: IEEE Trans. Ultrason., Ferroelect., Freq. Control Volume: 63 Issue: 10 Pages: 1642-1646
  • DOI: 10.1109/tuffc.2016.2569625
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Fabrication of Tetragonal Pb(Zr,Ti)O3 Nanorods by Focused Ion Beam and Characterization of the Domain Structure (2015)
  • Author(s): D. Ito, T. Yamada, M. Yoshino, T. Nagasaki, O. Sakata, J. Kuroishi, T. Namazu, T. Shiraishi, T. Shimizu, and H. Funakubo
  • Journal Title: Proc. IEEE ISAF-ISIF-PFM 2015 Volume: 2015 Pages: 175-177
  • DOI: 10.1109/isaf.2015.7172698
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Orientation Control of Epitaxial Tetragonal Pb(ZrxTi1-x)O3 Thin Films Grown on (100)KTaO3 Substrates by Tuning the Zr/(Zr+Ti) Ratio (2015)
  • Author(s): D. Ichinose, T. Nakashima, Y. Ehara, T. Oikawa, T. Shimizu, O. Sakata, T. Yamada, and H. Funakubo
  • Journal Title: Appl. Phys. Lett. Volume: 107 Issue: 2
  • DOI: 10.1063/1.4926963
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Domain Structure of Tetragonal Pb(Zr,Ti)O3 Nanorods and its Size Dependence (2015)
  • Author(s): T. Yamada, D. Ito, O. Sakata, J. Kuroishi, T. Namazu, Y. Imai, T. Shiraishi, T. Shimizu, H. Funakubo, M. Yoshino, and T. Nagasaki
  • Journal Title: Jpn. J. Appl. Phys. Volume: 54 Issue: 10S Pages: 10NA07-10NA07
  • DOI: 10.7567/jjap.54.10na07
  • NAID: 210000145768
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] Impact of Charge Screening on Domain Structure in Pb(Zr, Ti)O3 Nanorods (2016)
  • Author(s): T. Yamada, D. Ito, O. Sakata, T. Namazu, T. Sluka, N. Setter, H. Funakubo, M. Yoshino, and T. Nagasaki
  • Organizer: 第26回日本MRS年次大会
  • Place of Presentation: 横浜市横浜開港記念会館他
  • Year and Date: 2016-12-19
  • Invited
• [Presentation] Domain Pattern Control in Pb(Zr,Ti)O3 Nanorods by Charge Screening (2016)
  • Author(s): T. Yamada, D. Ito, T. Sluka, N. Setter, O. Sakata, T. Namazu, H. Funakubo, M. Yoshino, and T. Nagasaki
  • Organizer: The 10th Asian Meeting on Electroceramics-2016 (AMEC-2016)
  • Place of Presentation: Taipei, Taiwan
  • Year and Date: 2016-12-04
  • Int'l Joint Research / Invited
• [Presentation] 強誘電体Pb(Zr, Ti)O3ナノロッドの電荷遮蔽によるドメイン制御 (2016)
  • Author(s): 山田 智明, 伊藤 大介, Tomas Sluka, Nava Setter, 坂田 修身, 生津 資大, 舟窪 浩, 吉野 正人, 長崎 正雅
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 新潟市, 朱鷺メッセ
  • Year and Date: 2016-09-13
• [Presentation] Manipulation of Domain Structure in Pb(Zr,Ti)O3 Nanorods by Charge Screening (2016)
  • Author(s): T. Yamada, D. Ito, O. Sakata, H. Funakubo, T. Namazu, M. Yoshino, and T. Nagasaki
  • Organizer: 11th Korea-Japan Conference on Ferroelectrics (KJC-FE11)
  • Place of Presentation: Seoul, Korea
  • Year and Date: 2016-08-08
  • Int'l Joint Research / Invited
• [Presentation] 低次元ナノスケール構造の特異な境界条件を利用した強誘電体の分極制御 (2016)
  • Author(s): 山田 智明
  • Organizer: 応用物理学会東海支部第２回研究会
  • Place of Presentation: 名古屋大学
• [Presentation] 圧電体Pb(Zr, Ti)O3薄膜のドメイン構造制御を目指したナノインプリント法の開発 (2016)
  • Author(s): 岡本 一輝, 山田 智明, 伊藤 大介, 吉野 正人, 長崎 正雅
  • Organizer: 第48回日本原子力学会中部支部研究発表会
  • Place of Presentation: 名古屋大学
• [Presentation] Domain Structure and Piezoelectric Response of Self-assembled Tetragonal Pb(Zr,Ti)O3 Nanorods (2015)
  • Author(s): T. Yamada, D. Ito, O. Sakata, T. Kiguchi, T. Shiraishi, T. Shimizu, M. Yoshino, H. Funakubo, and T. Nagasaki
  • Organizer: The International Chemical Congress of Pacific Basin Societies (Pacifichem-2015)
  • Place of Presentation: Honolulu, USA
  • Year and Date: 2015-12-15
  • Int'l Joint Research / Invited
• [Presentation] Size Dependence of Domain Structure in Tetragonal Pb(Zr,Ti)O3 Nanorods (2015)
  • Author(s): T. Yamada, D. Ito, O. Sakata, T. Kiguchi, T. Shiraishi, T. Shimizu, H. Funakubo, M. Yoshino, and T. Nagasaki
  • Organizer: The 17th US-Japan Seminar on Dielectric and Piezoelectric Ceramics
  • Place of Presentation: Matsumoto, Japan
  • Year and Date: 2015-11-15
  • Int'l Joint Research
• [Presentation] Domain Structure and Piezoelectric Response in One-dimensional PZT Nanostructure (2015)
  • Author(s): T. Yamada, D. Ito, O. Sakata, H. Funakubo, M. Yoshino, and T. Nagasaki
  • Organizer: 14th International Union of Materials Research Societies-International Conference on Advanced Materials (IUMRS-ICAM 2015)
  • Place of Presentation: Jeju, Korea
  • Year and Date: 2015-10-25
  • Int'l Joint Research / Invited
• [Presentation] 正方晶Pb(Zr,Ti)O3ナノロッドのドメイン構造に及ぼす脱分極電界の影響 (2015)
  • Author(s): 山田智明, 伊藤大介, 坂田修身, 黒石隼輝, 生津資大, 清水荘雄, 舟窪浩, 吉野正人, 長崎正雅
  • Organizer: 日本セラミックス協会第28回秋季シンポジウム
  • Place of Presentation: 富山大学
  • Year and Date: 2015-09-16
• [Presentation] {100}, {111}配向Pb(Zr,Ti)O3ナノロッドのドメイン構造とそのサイズ依存性 (2015)
  • Author(s): 山田 智明, 伊藤 大介, 坂田 修身, 黒石 隼輝, 生津 資大, 清水 荘雄, 舟窪 浩, 吉野 正人, 長崎 正雅
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋市, 名古屋国際会議場
  • Year and Date: 2015-09-13
• [Presentation] マイクロX線を用いた強誘電体ナノロッドのドメイン構造解析 (2015)
  • Author(s): 山田 智明
  • Organizer: 文部科学省ナノテクノロジープラットフォーム事業 微細構造解析プラットフォーム 2015年度 第1回ワークショップ
  • Place of Presentation: 京都市, 京都リサーチパーク
  • Year and Date: 2015-08-31
• [Presentation] 強誘電体ナノスケール構造における電気-機械エネルギー変換特性の評価と性能向上に向けた取り組み (2015)
  • Author(s): 山田 智明
  • Organizer: 名古屋大学グリーンモビリティ連携研究センター第22回次世代自動車公開シンポジウム
  • Place of Presentation: 名古屋大学
  • Year and Date: 2015-08-06
• [Presentation] Domain Structure and Piezoelectric Response in Epitaxial PZT 1D-Nanorods and 2D-Thin Films (2015)
  • Author(s): T. Yamada, D. Ito, O. Sakata, J. Yasumoto, T. Shiraishi, T. Shimizu, M. Yoshino, H. Funakubo, and T. Nagasaki
  • Organizer: The 5th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2015)
  • Place of Presentation: Niigata, Japan
  • Year and Date: 2015-06-16
  • Int'l Joint Research / Invited
• [Presentation] Piezoelectric Response in Epitaxial PZT 1D-Nanorods and 2D-Thin Films (2015)
  • Author(s): T. Yamada, J. Yasumoto, D. Ito, O. Sakata, T. Kiguchi, H. Tanaka, Y. Ehara, S. Yasui, T. Oikawa, H. Funakubo, M. Yoshino, and T. Nagasaki
  • Organizer: 2015 Joint IEEE International Symposium on Applications of Ferroelectric, International Symposium on Integrated Functionalities, and Piezoresponse Force Microscopy Workshop (IEEE ISAF-ISIF-PFM 2015)
  • Place of Presentation: Singapore
  • Year and Date: 2015-05-24
  • Int'l Joint Research
• [Presentation] Fabrication of Tetragonal Pb(Zr,Ti)O3 Nanorods by Focused Ion Beam and Characterization of the Domain Structure (2015)
  • Author(s): D. Ito, T. Yamada, O. Sakata, J. Kuroishi, T. Namazu, T. Shiraishi, T. Shimizu, H. Funakubo, M. Yoshino, and T. Nagasaki
  • Organizer: 2015 Joint IEEE International Symposium on Applications of Ferroelectric, International Symposium on Integrated Functionalities, and Piezoresponse Force Microscopy Workshop (IEEE ISAF-ISIF-PFM 2015)
  • Place of Presentation: Singapore
  • Year and Date: 2015-05-24
  • Int'l Joint Research
• [Presentation] 正方晶Pb(Zr,Ti)O3ナノロッドのドメイン構造とそのサイズ依存 (2015)
  • Author(s): 山田 智明, 伊藤 大介, 坂田 修身, 黒石 隼輝, 生津 資大, 白石 貴久, 清水 荘雄, 舟窪 浩, 吉野 正人, 長崎 正雅
  • Organizer: 強誘電体応用会議FMA-32
  • Place of Presentation: 京都市, ホテルコープイン京都
  • Year and Date: 2015-05-20
• [Remarks] 研究室HP
  • URL: http://enemat.nucl.nagoya-u.ac.jp