Uncooled, high-sensitivity terahertz bolometer using MEMS resonators.
| Project/Area Number |
15K13966
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | The University of Tokyo |
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Principal Investigator |
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| Co-Investigator(Renkei-kenkyūsha) |
NOMURA Masahiro 東京大学, 生産技術研究所, 准教授 (10466857)
YOSHIDA Kenji 東京大学, 生産技術研究所, 助教 (50738599)
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| Research Collaborator |
ZHANG Ya 東京大学, 生産技術研究所, 特任助教
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| Project Period (FY) |
2015-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | テラヘルツ / MEMS / 検出器 / ボロメータ / 光検出 |
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| Outline of Final Research Achievements |
We have fabricated and demonstrated a new type terahertz bolometer based on a doubly clamped MEMS beam resonator. This bolometer operates at room temperature and detects the shift in the resonance frequency of the MEMS beam due to heating by terahertz radiation. The present bolometer has a sensitivity comparable to or better than that of conventional room-temperature operated terahertz sensors. Furthermore, when a frequency-modulation (FM) detection scheme that tracks the resonance frequency by applying a feedback loop is used, a fast detection speed which is 100-1000 times higher than that of other room-temperature thermal sensors are obtained, demonstrating the usefulness of our novel terahertz bolometer based on the MEMS beam resonator.
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Report
(3 results)
Research Products
(21 results)
