Development of nano-contamination detection using optical scattering of evanescent interference field
| Project/Area Number |
15K13968
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Tokyo University of Agriculture and Technology |
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Principal Investigator |
UMEDA Norihiro 東京農工大学, 工学(系)研究科(研究院), 教授 (60111803)
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| Co-Investigator(Kenkyū-buntansha) |
岩見 健太郎 東京農工大学, 工学(系)研究科(研究院), 准教授 (80514710)
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| Project Period (FY) |
2015-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2015: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
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| Keywords | ナノ粒子 / ナノコンタミネーション / エバネッセント干渉定在場 / 光散乱 / インライン検出 / 開口近接場プローブ / マイクロ流体ノズル / マイクロピペット / 光散乱インライン検出 / マイクロ流体 / イオンコンダクタンス |
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| Outline of Final Research Achievements |
Detection of nano-particle smaller than the diffraction limit is required in semiconductor manufacturing. To break through the limit, we proposed following two in-line particle detection techniques using near-field light. 1) Particle sizing technique using evanescent interference field (EIF) on a prism. When a nanoparticle passes through EIF, the scattering intensity of nanoparticle is periodically modulated. By calculating contrast of modulated scattering intensity, a particle size can be estimated easily. In this study, we measured EIF scattering from polystyrene particles in diameter 88 nm and 220nm on a prism. 2) Particle detection in the vicinity of micro ejection nozzle technique using apertured near-field probe. We fabricated a near-field probe from optical fiber and micro nozzle from glass pipette. We measured the fluorescence of fluorescent dye and fluorescent bead in the jet ejected from micro nozzle using near-field probe.
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Report
(3 results)
Research Products
(4 results)
