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A study on integrated single organic semiconductor complementary transistors with top-gate structures

Research Project

Project/Area Number 15K13969
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Electron device/Electronic equipment
Research InstitutionTokyo Institute of Technology

Principal Investigator

Ohmi Shun-ichiro  東京工業大学, 工学院, 准教授 (30282859)

Research Collaborator MAEDA Yasutaka  
HIROKI Mizuha  
FURUYAMA Shu  
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2017: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2016: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2015: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywords有機半導体 / 有機絶縁体 / 相補型トランジスタ / 界面制御 / 低仕事関数金属 / 微細化 / 集積化 / 疑似相補型トランジスタ / しきい値制御 / トップゲート構造 / 窒素添加六ホウ化ランタン / ペンタセン / ルブレン
Outline of Final Research Achievements

In this research, we investigated top-gate type single organic semiconductor complementary transistor (CMOS) utilizing low work-function metal as an interface control layer to improve the characteristics of organic semiconductor transistor (OFET).
Firstly, single crystal channel rubrene-based OFET was successfully fabricated by the narrow line crystallization of rubrene. Next, the top-gate type pentacene-based OFET with amorphous rubrene gate insulator was realized by the lithography process with the channel length of 2.3 um. Finally, electron injection to the pentacene was realized by the nitrorogen-doped LaB6 interface control layer. Furthermore, it was realized that the back-gate type single organic semiconductor pentacene-based pseudo CMOS utilizing threshold voltage control by the nitrogen-doped LaB6 interface control layer. The logic swing of 1.8 V was obtained in air. These results are expected to realize the single organic semiconductor CMOS.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (47 results)

All 2018 2017 2016 2015 Other

All Int'l Joint Research (1 results) Journal Article (12 results) (of which Peer Reviewed: 7 results,  Acknowledgement Compliant: 5 results) Presentation (31 results) (of which Int'l Joint Research: 11 results,  Invited: 3 results) Remarks (3 results)

  • [Int'l Joint Research] Thai Microelectronics Research Center(Thailand)

    • Related Report
      2015 Research-status Report
  • [Journal Article] Electron Injection of N-type Pentacene-Based OFET with Nitrogen-Doped LaB<sub>6</sub> Bottom-Contact Electrodes2018

    • Author(s)
      Yasutaka Maeda, Mizuha Hiroki, and Shun-ichiro Ohmi
    • Journal Title

      IEICE Transactions on Electronics

      Volume: E101.C Issue: 5 Pages: 323-327

    • DOI

      10.1587/transele.E101.C.323

    • NAID

      130006729709

    • ISSN
      0916-8524, 1745-1353
    • Year and Date
      2018-05-01
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Investigation of pentacene growth on SiO2 gate insulator after photolithography for nitrogen-doped LaB6 bottom-contact electrode formation2018

    • Author(s)
      Yasutaka Maeda, Mizuha Hiroki, and Shun-ichiro Ohmi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 57 Issue: 4S Pages: 04FL13-04FL13

    • DOI

      10.7567/jjap.57.04fl13

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Top-gate pentacene-based organic field-effect transistor with amorphous rubrene gate insulator2018

    • Author(s)
      Mizuha Hiroki, Yasutaka Maeda, and Shun-ichiro Ohmi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 57 Issue: 2S2 Pages: 02CA08-02CA08

    • DOI

      10.7567/jjap.57.02ca08

    • NAID

      210000148645

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Narrow Line Crystallization of Rubrene Thin Film Enhanced by Yb Interfacial Layer for Single Crystal Channel OFET Application2017

    • Author(s)
      Shun-ichiro Ohmi, Mizuha Hiroki, and Yasutaka Maeda
    • Journal Title

      75th Device Research Conference Conf. Dig.

      Volume: 75 Pages: 183-184

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Nitrogen-Doped LaB<sub>6</sub> Interfacial Layer on Device Characteristics of Pentacene-Based OFET2017

    • Author(s)
      Yasutaka Maeda, Shun-ichiro Ohmi, Tetsuya Goto and Tadahiro Ohmi
    • Journal Title

      IEICE Transactions on Electronics

      Volume: E100.C Issue: 5 Pages: 463-467

    • DOI

      10.1587/transele.E100.C.463

    • NAID

      130005631609

    • ISSN
      0916-8524, 1745-1353
    • Related Report
      2017 Annual Research Report 2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] HfO2をゲート絶縁膜に用いたペンタセンOFETのデバイス特性に関する検討2017

    • Author(s)
      前田康貴, 劉野原, 廣木瑞葉, 大見俊一郎
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: SDM2017-54 Pages: 25-30

    • Related Report
      2017 Annual Research Report
  • [Journal Article] 非晶質ルブレンをゲート絶縁膜に用いたトップゲート型OFETに関する検討2017

    • Author(s)
      大見俊一郎, 廣木瑞葉, 張鴻立, 前田康貴
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: SDM2017-4 Pages: 15-18

    • Related Report
      2017 Annual Research Report 2016 Research-status Report
  • [Journal Article] Steep subthreshold swing of pentacene-based organic field-effect transistor with nitrogen-doped LaB6 interfacial layer2017

    • Author(s)
      Yasutaka Maeda, and Shun-ichiro Ohmi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 56 Issue: 4S Pages: 04CL06-04CL06

    • DOI

      10.7567/jjap.56.04cl06

    • NAID

      210000147643

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] SiO2上におけるウェットプロセスがペンタセン薄膜形成に与える影響2016

    • Author(s)
      前田康貴, 廣木瑞葉, 大見俊一郎
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: 116 Pages: 31-34

    • Related Report
      2016 Research-status Report
    • Acknowledgement Compliant
  • [Journal Article] High Quality Pentacene Film Formation on N-doped LaB6 Donor Layer2016

    • Author(s)
      Yasutaka Maeda, Shun-ichiro Ohmi, Tetsuya Goto, and Tadahiro Ohmi
    • Journal Title

      IEICE Trans. Electron.

      Volume: E99-C Pages: 535-540

    • NAID

      130005148972

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] 低仕事関数金属界面制御層を用いた有機半導体トランジスタのデバイス特性2016

    • Author(s)
      大見俊一郎、前田康貴、古山脩、廣木瑞葉
    • Journal Title

      電子情報通信学会 信学技報

      Volume: 116 Pages: 11-15

    • Related Report
      2015 Research-status Report
    • Acknowledgement Compliant
  • [Journal Article] HfO2をゲート絶縁膜に用いたペンタセンOFETのデバイス特性に関する検討2015

    • Author(s)
      前田康貴、劉野原、大見俊一郎
    • Journal Title

      電子情報通信学会 信学技報

      Volume: 115 Pages: 49-52

    • Related Report
      2015 Research-status Report
    • Acknowledgement Compliant
  • [Presentation] 窒素添加LaB6界面制御層によるしきい値制御を用いたペンタセンPseudo-CMOS2018

    • Author(s)
      前田康貴, 廣木瑞葉, 小松勇貴, 大見俊一郎
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Electron Injection of N-type Pentacene-based OFET with Nitrogen-Doped LaB6 Bottom-Contact Electrodes2017

    • Author(s)
      Yasutaka Maeda, and Shun-ichiro Ohmi
    • Organizer
      2017 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD2017)
    • Place of Presentation
      韓国
    • Year and Date
      2017-07-03
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Narrow Line Crystallization of Rubrene Thin Film Enhanced by Yb Interfacial Layer for Single Crystal Channel OFET Application2017

    • Author(s)
      Shun-ichiro Ohmi, Mizuha Hiroki, and Yasutaka Maeda
    • Organizer
      75th Device Research Conference (DRC)
    • Place of Presentation
      米国
    • Year and Date
      2017-06-25
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Top-gate type pentacene-based OFET with a-rubrene gate insulator2017

    • Author(s)
      Mizuha Hiroki, Yasutaka Maeda, and Shun-ichiro Ohmi
    • Organizer
      The 6th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2017)
    • Place of Presentation
      福井
    • Year and Date
      2017-06-19
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] 非晶質ルブレンをゲート絶縁膜に用いたトップゲート型OFETに関する検討2017

    • Author(s)
      大見俊一郎, 廣木瑞葉, 張鴻立, 前田康貴
    • Organizer
      電子情報通信学会SDM/OME研究会
    • Place of Presentation
      鹿児島
    • Year and Date
      2017-04-20
    • Related Report
      2016 Research-status Report
  • [Presentation] ペンタセン薄膜形成に対する窒素添加LaB6電極パターニングの影響2017

    • Author(s)
      前田康貴, 廣木瑞葉, 大見俊一郎
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] リフトオフによる微細S/D電極形成とOFETのデバイス特性2017

    • Author(s)
      廣木 瑞葉, 前田 康貴, 大見 俊一郎
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] 強誘電体クロコン酸薄膜のYb界面制御層上への形成2017

    • Author(s)
      張鴻立, 前田 康貴, 大見 俊一郎
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Narrow Line Crystallization of Rubrene Thin Film Enhanced by Yb Interfacial Layer for Single Crystal Channel OFET Application2017

    • Author(s)
      Shun-ichiro Ohmi, Mizuha Hiroki, and Yasutaka Maeda
    • Organizer
      75th Device Research Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Influence of Surface Treatment of SiO2 Gate Insulator forPentacene-based OFETs with Nitrogen-doped LaB6 Bottom-Contact Electrode Formation Process2017

    • Author(s)
      Yasutaka Maeda, Mizuha Hiroki, and Shun-ichiro Ohmi
    • Organizer
      2017 International Conference on Solid State Devices and Materials
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electron Injection of N-type Pentacene-based OFET with Nitrogen-Doped LaB6 Bottom-Contact Electrodes2017

    • Author(s)
      Yasutaka Maeda, and Shun-ichiro Ohmi
    • Organizer
      2017 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Top-gate type pentacene-based OFET with a-rubrene gate insulator2017

    • Author(s)
      Mizuha Hiroki, Yasutaka Maeda, and Shun-ichiro Ohmi
    • Organizer
      The 6th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] HfO2をゲート絶縁膜に用いたペンタセンOFETのデバイス特性に関する検討2017

    • Author(s)
      前田康貴,劉野原, 廣木瑞葉, 大見俊一郎
    • Organizer
      電子情報通信学シリコン材料・デバイス研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 非晶質ルブレンゲート絶縁膜を用いたデュアルゲート型ペンタセン2017

    • Author(s)
      廣木瑞葉, 前田康貴,大見俊一郎
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] PFP薄膜を用いたn型OFETにおける窒素添加LaB6界面制御層の効果2017

    • Author(s)
      前田康貴、廣木瑞葉、大見俊一郎
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 非晶質ルブレンをゲート絶縁膜に用いたトップゲート型OFETに関する検討2017

    • Author(s)
      大見俊一郎, 廣木瑞葉, 張鴻立, 前田康貴
    • Organizer
      シリコン材料・デバイス研究会/有機エレクトロニクス研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] SiO2上におけるウェットプロセスがペンタセン薄膜形成に与える影響2016

    • Author(s)
      前田康貴, 廣木瑞葉, 大見俊一郎
    • Organizer
      電子情報通信学会SDM研究会
    • Place of Presentation
      仙台
    • Year and Date
      2016-10-26
    • Related Report
      2016 Research-status Report
  • [Presentation] Steep Subthreshold Swing of Pentacene-based OFET with Nitrogen-doped LaB6 Interfaciaal Layer2016

    • Author(s)
      Yasutaka Maeda, and Shun-ichiro Ohmi
    • Organizer
      2016 International Conference on Solid State Devices and Materials
    • Place of Presentation
      筑波
    • Year and Date
      2016-09-27
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] ペンタセンOFETのデバイス特性における窒素添加LaB6界面制御層厚依存性2016

    • Author(s)
      前田康貴, 大見俊一郎
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      新潟
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] 非晶質ルブレンをゲート絶縁膜として用いたトップゲート型ペンセンOFETの作製2016

    • Author(s)
      廣木瑞葉, Nithi Atthi, 前田康貴, 大見俊一郎
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      新潟
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] Effect of Nitrogen-Doped LaB6 Interfacial Layer on Device Characteristics of Pentacene-Based OFET2016

    • Author(s)
      Yasutaka Maeda, Shun-ichiro Ohmi, Tetsuya Goto and Tadahiro Ohmi
    • Organizer
      2016 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD2016)
    • Place of Presentation
      函館
    • Year and Date
      2016-07-04
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] 低仕事関数金属界面制御層を用いた有機半導体トランジスタのデバイス特性2016

    • Author(s)
      大見俊一郎、前田康貴、古山脩、廣木瑞葉
    • Organizer
      電子情報通信学会 シリコン材料・デバイス/有機エレクトロニクス合同研究会
    • Place of Presentation
      沖縄
    • Year and Date
      2016-04-08
    • Related Report
      2015 Research-status Report
    • Invited
  • [Presentation] 窒素添加LaB6界面層によるp型ペンタセンOFETの界面制御2016

    • Author(s)
      前田康貴、大見俊一郎、後藤哲也、大見忠弘
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] Yb界面制御層を用いたルブレン薄膜のチャネル領域結晶化に関する検討2016

    • Author(s)
      古山脩、大見俊一郎
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] AuGeソース/ドレイン電極を用いたボトムコンタクト型ペンタセンOFETの作製2016

    • Author(s)
      廣木瑞葉、前田康貴、大見俊一郎
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] 窒化添加LaB6界面層を用いた単一有機半導体CMOSに関する検討2015

    • Author(s)
      前田康貴、大見俊一郎
    • Organizer
      電子情報通信学会 バイオテクノロジー&エレクトロニクス研究討論会
    • Place of Presentation
      東京
    • Year and Date
      2015-12-11
    • Related Report
      2015 Research-status Report
  • [Presentation] Si and Organic Semiconductor Devices with High-k Gate Insulator2015

    • Author(s)
      Shun-ichiro Ohmi
    • Organizer
      Thai Microelectronics Research Center Lecture
    • Place of Presentation
      Thailand
    • Year and Date
      2015-12-01
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] HfO2をゲート絶縁膜に用いたペンタセンOFETのデバイス特性に関する検討2015

    • Author(s)
      前田康貴、劉野原、大見俊一郎
    • Organizer
      電子情報通信学会 シリコン材料・デバイス研究会
    • Place of Presentation
      仙台
    • Year and Date
      2015-10-29
    • Related Report
      2015 Research-status Report
  • [Presentation] ペンタセン薄膜の初期成長過程の基板依存性2015

    • Author(s)
      前田康貴、劉野原、大見俊一郎、後藤哲也、大見忠弘
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] トップゲート構造を有するペンタセンOFETの作製に関する検討2015

    • Author(s)
      廣木瑞葉、前田康貴、大見俊一郎
    • Organizer
      電気学会東京支部カンファレンス第6回学生研究発表会
    • Place of Presentation
      東京
    • Year and Date
      2015-08-31
    • Related Report
      2015 Research-status Report
  • [Presentation] High quality pentacene film formation on nitrogen-doped LaB6 donor Layer2015

    • Author(s)
      Yasutaka Maeda, Shun-ichiro Ohmi, Tetsuya Goto, and Tadahiro Ohmi
    • Organizer
      2015 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
    • Place of Presentation
      Korea
    • Year and Date
      2015-06-29
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Remarks] 大見研究室

    • URL

      http://www.sdm.ee.e.titech.ac.jp/

    • Related Report
      2017 Annual Research Report
  • [Remarks] 大見研究室ホームページ

    • URL

      http://www.sdm.ee.e.titech.ac.jp/

    • Related Report
      2016 Research-status Report
  • [Remarks] 大見研究室ホームページ

    • URL

      http://www.lsi.ip.titech.ac.jp/

    • Related Report
      2015 Research-status Report

URL: 

Published: 2015-04-16   Modified: 2019-03-29  

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