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Development of highly sensitive, high-speed hybrid gas sensors using nano-carbon electrodes and polymeric functional materials

Research Project

Project/Area Number 15K13972
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Electron device/Electronic equipment
Research InstitutionShinshu University

Principal Investigator

ITOH Eiji  信州大学, 学術研究院工学系, 教授 (50303441)

Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2017: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2016: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2015: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywordsカーボンナノチューブ / ポリイミド / 湿度センサ / ガスセンサ / ナノ誘電体 / 有機半導体 / MISデバイス / 高速ガス制御 / ナノハイブリッド / 容量計測システム / アセトンセンサ / 自動制御システム / ナノシート
Outline of Final Research Achievements

We have developed printed capacitive humidity sensors with highly gas permeable carbon nanotube top electrodes using solution techniques. The hydrophobic, porous carbon nanotube network was suitable for gas permeation, and the response of the capacitive humidity sensors showed extremely fast and highly sensitive. We developed measurement system and it enabled us to vary the ambient relative humidity within 0.02 s. It was revealed that the response time was almost proportional to the square of the thickness of the polyimide dielectric layer, d, and the sensitivity was inversely proportional to d. The rise time decreased to 40 ms. This is suitable for use in high-speed humidity sensors to realize a real-time humidity and breath-sensing measurement system. An very sensitive acetone sensors were obtained by the nano-hybrid sistem of alumina nanorods, nano-catalysis, and organic semiconductors. Sub-ppm response was successfully obtained by p-type air-stable organic semiconductor.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (30 results)

All 2018 2017 2016 2015

All Journal Article (6 results) (of which Peer Reviewed: 6 results,  Open Access: 1 results,  Acknowledgement Compliant: 2 results) Presentation (23 results) (of which Int'l Joint Research: 4 results,  Invited: 2 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Inverted bulk-heterojunction organic solar cells with the transfer-printed anodes and low-temperature-processed ultrathin buffer layers2018

    • Author(s)
      Eiji Itoh, Shota Sakai, and Katsutoshi Fukuda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 3S2 Pages: 03EJ07-03EJ07

    • DOI

      10.7567/jjap.57.03ej07

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Estimation of carrier mobility and charge behaviors of organic semiconductor films in metal insulatorsemiconductor diodes consisting of highk oxide/organic semiconductor double layers2018

    • Author(s)
      Naoya Chosei and Eiji Itoh
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 2S2 Pages: 02CA05-02CA05

    • DOI

      10.7567/jjap.57.02ca05

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Comparative study of all-printed polyimide humidity sensors with single- and multiwalled carbon nanotube gas-permeable top electrodes2017

    • Author(s)
      Eiji Itoh and Zihan Yuan
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 5S2 Pages: 05EC03-05EC03

    • DOI

      10.7567/jjap.56.05ec03

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of fast, highly sensitive all-printed capacitive humidity sensors with carbon nanotube/polyimide hybrid electrodes2016

    • Author(s)
      Eiji Itoh and Akinori Takada
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 2S Pages: 02BB10-02BB10

    • DOI

      10.7567/jjap.55.02bb10

    • Related Report
      2016 Research-status Report 2015 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Interfacial Energy Alignment at the ITO/Ultra-Thin Electron Selective Dielectric Layer Interface and Its Effect on the Efficiency of Bulk-Heterojunction Organic Solar Cells2016

    • Author(s)
      Eiji Itoh, Yoshinori Goto, Yusuke Saka and Katsutoshi Fukuda
    • Journal Title

      Journal of Nanoscience and Nanotechnology

      Volume: 16 Issue: 4 Pages: 3248-3253

    • DOI

      10.1166/jnn.2016.12322

    • Related Report
      2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication of organic FETs based on printing techniques and the improvement of FET properties by the insertion of solution-processable buffer layers2016

    • Author(s)
      Eiji Itoh and Akira Kanamori
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 4S Pages: 04EL06-04EL06

    • DOI

      10.7567/jjap.55.04el06

    • Related Report
      2016 Research-status Report 2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] グラフェンコートした白金触媒担持アルミナナノロッドハイブリッド膜を用いた抵抗式高感度アセトンセンサ2018

    • Author(s)
      杉浦 弘晃、伊東 栄次、小野 博信
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] MISダイオード構造を用いたP3HT及びPCBM膜のキャリア輸送と蓄積現象の検討2018

    • Author(s)
      長生 直哉、 伊東 栄次
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 室温動作する白金触媒担持アルミナナノロッドと有機半導体の複合体を用いた抵抗式高感度アセトンセンサの開発2017

    • Author(s)
      杉浦 弘晃、エンシハン、伊東 栄次、小野博信
    • Organizer
      電子情報通信学会2017年総合大会
    • Place of Presentation
      名城大学(愛知県名古屋市)
    • Year and Date
      2017-03-22
    • Related Report
      2016 Research-status Report
  • [Presentation] ナノハイブリッド界面層を持つ有機薄膜デバイスの作製と高性能化2017

    • Author(s)
      伊東 栄次
    • Organizer
      電子情報通信学会2017年総合大会 シンポジウム
    • Place of Presentation
      名城大学(愛知県名古屋市)
    • Year and Date
      2017-03-22
    • Related Report
      2016 Research-status Report
    • Invited
  • [Presentation] カーボンナノチューブ複合電極を有する超高速容量式湿度センサと計測システムの開発2017

    • Author(s)
      伊東 栄次、袁 子はん
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Estimation of Carrier Mobility of Organic Semiconductor Films in MIS Diodes Consisting of High-k Oxide/Organic Semiconductor Double Layers2017

    • Author(s)
      Naoya Chosei, Eiji Itoh
    • Organizer
      The 6th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] リアルタイムセンシングを目指した超高速容量式湿度センサ2017

    • Author(s)
      伊東 栄次
    • Organizer
      第78回応用物理学秋季学術講演会 シンポジウム(萌芽的デバイスと有機センサ― IoT時代に向けて―)
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] MIS型ダイオード構造を用いた有機半導体膜のキャリア注入と輸送特性の検討2017

    • Author(s)
      長生 直哉、 伊東 栄次
    • Organizer
      2017年電子情報通信学会ソサイエティ大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 塗布型カーボンナノチューブ電極を有するハイブリッドセンサの高性能化に向けた検討と計測システムの開発2017

    • Author(s)
      伊東 栄次
    • Organizer
      電子情報通信学会OME研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 酸化膜/ポリマーの二層誘電体を持つMISキャパシタの閾値電圧の検討2017

    • Author(s)
      尾川 卓、伊東 栄次
    • Organizer
      平成29年度応用物理学会北陸・信越支部学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] メニスカス法によりHigh-k酸化膜上に製膜した面内配向TIPS-pentacene FETの電気的特性の向上2017

    • Author(s)
      上野 純平、伊東 栄次
    • Organizer
      平成29年度応用物理学会北陸・信越支部学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 上部電極としてガス透過性のある多層カーボンナノチューブ(MWCNT)を用いたポリイミド湿度センサの研究2017

    • Author(s)
      畑山 誠、伊東 栄次
    • Organizer
      平成29年度応用物理学会北陸・信越支部学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ポリマーコートHigh-k酸化膜絶縁層とカーボンナノチューブキャリア注入層を用いた塗布型有機FETの高性能化2016

    • Author(s)
      上野 純平、伊東 栄次
    • Organizer
      平成28年度応用物理学会 北陸・信越支部学術講演会
    • Place of Presentation
      富山県民会館(富山県富山市)
    • Year and Date
      2016-12-10
    • Related Report
      2016 Research-status Report
  • [Presentation] 白金触媒担持アルミナナノロッドと有機半導体の複合体を用いた室温動作する高感度アセトンセンサの開発2016

    • Author(s)
      杉浦 弘晃、エンシハン、伊東 栄次、小野博信
    • Organizer
      平成28年度応用物理学会 北陸・信越支部学術講演会
    • Place of Presentation
      富山県民会館(富山県富山市)
    • Year and Date
      2016-12-10
    • Related Report
      2016 Research-status Report
  • [Presentation] 高誘電率絶縁体/有機半導体のMISダイオード構造を用いたキャリア移動度の解析2016

    • Author(s)
      長生 直哉、伊東 栄次
    • Organizer
      平成28年度応用物理学会 北陸・信越支部学術講演会
    • Place of Presentation
      富山県民会館
    • Year and Date
      2016-12-10
    • Related Report
      2016 Research-status Report
  • [Presentation] 塗布形成カーボンナノチューブを両極性キャリア注入層に用いて印刷形成したp型及びn型有機トランジスタの作製と評価2016

    • Author(s)
      伊東 栄次、金森 暉
    • Organizer
      第77回 応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] Comparative study of all-printed polyimide humidity sensors with Single- and multi-walled carbon nanotube gas permeable top electrodes2016

    • Author(s)
      Zihan Yuan and Eiji Itoh
    • Organizer
      International Conference on Flexibleand Printed Electronics
    • Place of Presentation
      Yamagata University(山形県米沢市)
    • Year and Date
      2016-09-06
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] オール印刷ポリイミド静電容量型湿度センサーとリアルタイム混合ガス制御・計測システムの開発2016

    • Author(s)
      袁 子涵, 伊東 栄次
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学 大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] 塗布型カーボンナノチューブをバッファー層に用いた印刷形成有機FETの作製・評価2015

    • Author(s)
      金森暉, 伊東栄次
    • Organizer
      平成27年度 応用物理学会 北陸・信越支部学術講演会
    • Place of Presentation
      信州大学 工学部
    • Year and Date
      2015-12-12
    • Related Report
      2015 Research-status Report
  • [Presentation] Fabrication of Organic Field Effect Transistors Based on Printing Techniques and the Improvement of FET Properties by the Insertion of Solution Processable Buffer Layers2015

    • Author(s)
      Akira Kanomori and Eiji Itoh
    • Organizer
      International Conference on Solid State Devices and Materials (SSDM2015)
    • Place of Presentation
      札幌国際鍵場
    • Year and Date
      2015-09-28
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] 塗布型カーボンナノチューブを電極バッファー層とした印刷形成有機トランジスタの作製と評価2015

    • Author(s)
      金森 暉, 伊東 栄次
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] カーボンナノチューブ複合電極を有するポリイミド静電容量型湿度センサーの特性や安定性における電極形成条件の影響2015

    • Author(s)
      袁 子涵, 伊東 栄次
    • Organizer
      2015年度特別企画応用物理学会北陸・信越支部 若手研究者サマーセミナー合宿勉強会と研究討論会
    • Place of Presentation
      斑尾高原ホテル(長野県)
    • Year and Date
      2015-08-31
    • Related Report
      2015 Research-status Report
  • [Presentation] Fast, high sensitive all-printed capacitive humidity sensors with carbon nanotubes/polyimide hybrid electrodes2015

    • Author(s)
      Eiji Itoh, Akinori Takada
    • Organizer
      The 5th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO2015)
    • Place of Presentation
      朱鷺メッセ(新潟市)
    • Year and Date
      2015-06-16
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Patent(Industrial Property Rights)] 容量型ガスセンサ及びその製造方法2016

    • Inventor(s)
      伊東 栄次
    • Industrial Property Rights Holder
      信州大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-046713
    • Filing Date
      2016-03-10
    • Related Report
      2015 Research-status Report

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Published: 2015-04-16   Modified: 2019-03-29  

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