| Budget Amount *help |
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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| Outline of Final Research Achievements |
Polarity inverted multilayered transducers are attractive for high order mode excitation and high power operation. The control of the polarity in ScAlN and ZnO films by ion beam irradiation during film growth were reported. We found that the usual ScAlN and ZnO films grown by a standard planar sputtering possess (0001) Al-polarity and (000-1) O-polarity, respectively. In this study, we considered that the polarity inverted (0001)/(000-1) multilayer can be easily obtained by depositing usual (0001) Al-polar ScAlN film on usual (000-1) O-polar ZnO film. The polarities of the layers were determined by a press test using an oscilloscope. 2nd mode excitations were clearly observed in the longitudinal wave conversion loss in the transducers.
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