| Project/Area Number |
15K17450
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Nano/Microsystems
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| Research Institution | Tohoku University |
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Principal Investigator |
Inomata Naoki 東北大学, 工学研究科, 助教 (40712823)
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| Project Period (FY) |
2015-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2016: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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| Keywords | 熱センサ / 酸化バナジウム / MEMS / 機械振動子 |
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| Outline of Final Research Achievements |
The fabrication process of VOx mechanical resonators was established: then, the VOx resonator was fabricated and evaluated the temperature coefficient of resonant frequency (TCRF) and Q factor (TCRF:-1308 ppm/K, Q: approximately 500). To obtain the high TCRF which is important parameter for high thermal sensitivity, a microfluidic chip thermal detection device having Si double-supported resonator was fabricated and evaluated (TCRF: 1900 ppm/K, thermal resolution: 79uK&1.90nW). The thermal measurements of a brown fat cell was succeeded using this device. Also, the thermal detection device using a VOx microthermistor was fabricated and evaluated (thermal resolution: 0.3mK/√Hz). The device could detect the heat generation of glucose and cholesterol solutions. The minimum detectable concentration was 30，15uM/√Hz in glucose and cholesterol, respectively.
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