Development of Nano-G Detection Method using Electroplated Au-Alloy with Controlled Crystal Structure

• Project/Area Number: 15K17453
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Nano/Microsystems
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: Yamane Daisuke 東京工業大学, 科学技術創成研究院, 助教 (70634096)
• Co-Investigator(Renkei-kenkyūsha): MASU Kazuya 東京工業大学, 科学技術創成研究院, 教授 (20157192) ; MACHIDA Katsuyuki 東京工業大学, 科学技術創成研究院, 特任教授 (90597676) ; SONE Masato 東京工業大学, 科学技術創成研究院, 教授 (30323752)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2017: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
• Keywords: ナノG / 加速度 / MEMS / ナノマイクロセンサ / 金 / 金合金 / 結晶 / 金めっき / ナノ結晶 / 電解めっき / 加速度センサ / ノイズ / カンチレバー / 電解金めっき / パルス金めっき

Outline of Final Research Achievements

Noise of the developed Au-alloy MEMS accelerometer was experimentally evaluated to be below 30 nG/√Hz, and therefore we achieved the target resolution of below 0.1 uG. Long-term vibration test results showed the device functioned even after 10^6 vibration cycles that would usually cause fatigue in metal materials. Temperature test results exhibited the device survived after temperature change from -50 ℃ to 100 ℃. Furthermore, we developed a sensing module with the fabricated MEMS device and demonstrated acceleration sensing on human body. In terms of mechanical strength of Au-alloy, we successfully developed an Au-alloy material with the yield strength of above the target value (1 GPa). In conclusion, the developed Au-alloy device has a promising potential to detect nano-G.

Research Products

• [Journal Article] Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide (2018)
  • Author(s): Hao-Chun Tang, Ken Hashigata, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Journal Title: Elsevier Surface and Coatings Technology Volume: 印刷中 Pages: 1065-1070
  • DOI: 10.1016/j.surfcoat.2018.02.041
  • Peer Reviewed / Open Access
• [Journal Article] Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer (2018)
  • Author(s): Motohiro Takayasu, Ippei Tsuji, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu
  • Journal Title: Sensors and Materials Volume: 印刷中
  • Peer Reviewed
• [Journal Article] Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices (2018)
  • Author(s): Tang Haochun、Chen Chun-Yi、Chang Tso-Fu Mark、Nagoshi Takashi、Yamane Daisuke、Konishi Toshifumi、Machida Katsuyuki、Masu Kazuya、Sone Masato
  • Journal Title: Journal of The Electrochemical Society Volume: 165 Issue: 2 Pages: D58-D63
  • DOI: 10.1149/2.0441802jes
  • Peer Reviewed / Open Access
• [Journal Article] A 0.18-µm CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers (2018)
  • Author(s): Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu
  • Journal Title: IEICE Electronics Express Volume: 15 Issue: 2 Pages: 20171227-20171227
  • DOI: 10.1587/elex.15.20171227
  • NAID: 130006320958
  • ISSN: 1349-2543
• [Journal Article] Enhancement in Structure Stability of Gold Micro-Cantilever by Constraints at the Fixed-End for Applications as Movable Structures of MEMS (2018)
  • Author(s): Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
  • Journal Title: Microelectronics Engineering Volume: 187-188 Pages: 105-109
  • DOI: 10.1016/j.mee.2017.11.015
  • Peer Reviewed / Open Access
• [Journal Article] Deformation behavior of electroplated gold composed of nano-columnar grains embedded in micro-columnar textures (2017)
  • Author(s): Yoshiba Masaharu、Chen Chun-Yi、Chang Tso-Fu Mark、Nagoshi Takashi、Yamane Daisuke、Machida Katsuyuki、Masu Kazuya、Sone Masato
  • Journal Title: Materials Letters Volume: 202 Pages: 82-85
  • DOI: 10.1016/j.matlet.2017.05.066
  • Peer Reviewed / Open Access
• [Journal Article] Micro-bending testing of electrodeposited gold for applications as movable components in MEMS devices (2017)
  • Author(s): Asano Keisuke、Tang Hao-Chun、Chen Chun-Yi、Nagoshi Takashi、Chang Tso-Fu Mark、Yamane Daisuke、Machida Katsuyuki、Masu Kazuya、Sone Masato
  • Journal Title: Microelectronic Engineering Volume: 180 Pages: 15-19
  • DOI: 10.1016/j.mee.2017.05.044
  • Peer Reviewed / Open Access
• [Journal Article] Tensile Tests of Micro-Specimens Made of Electroplated Gold (2017)
  • Author(s): Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Journal Title: Microelectronics Engineering Volume: 174 Pages: 6-10
  • DOI: 10.1016/j.mee.2016.12.004
  • Peer Reviewed / Open Access
• [Journal Article] High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices (2017)
  • Author(s): Hao-Chun Tang, Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Journal Title: J. Electrochemical Society Volume: なし Issue: 4 Pages: 244-247
  • DOI: 10.1149/2.141704jes
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer (2016)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu and Katsuyuki Machida
  • Journal Title: Microelectronics Reliability Volume: 66 Pages: 78-84
  • DOI: 10.1016/j.microrel.2016.09.018
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide (2016)
  • Author(s): Hao-chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Journal Title: Electrochemistry Communications Volume: 72 Pages: 126-130
  • DOI: 10.1016/j.elecom.2016.09.019
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression (2016)
  • Author(s): Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Journal Title: MATERIALS TRANSACTIONS Volume: 57 Issue: 8 Pages: 1257-1260
  • DOI: 10.2320/matertrans.MG201612
  • NAID: 130005165710
  • ISSN: 1345-9678, 1347-5320
  • Peer Reviewed / Open Access
• [Journal Article] Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength (2016)
  • Author(s): Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Journal Title: Electrochemistry Communications Volume: 67 Pages: 51-54
  • DOI: 10.1016/j.elecom.2016.03.017
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] A 1-mG MEMS Sensor (2016)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Journal Title: ECS Transactions Volume: 72 Issue: 3 Pages: 7-14
  • DOI: 10.1149/07203.0007ecst
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers (2016)
  • Author(s): Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone,
  • Journal Title: Microelectronics Engineering Volume: 153 Pages: 90-93
  • DOI: 10.1016/j.mee.2016.02.054
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] A 0.1G-to-20G Integrated MEMS Inertial Sensor (2015)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Journal Title: Japanese Journal of Applied Physics Volume: 54 Issue: 8 Pages: 1-4
  • DOI: 10.7567/jjap.54.087202
  • NAID: 210000145523
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] A dual-axis MEMS capacitive inertial sensor with high-density proof mass (2015)
  • Author(s): Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Journal Title: Microsystem Technologies Volume: 印刷中 Issue: 3 Pages: 459-464
  • DOI: 10.1007/s00542-015-2539-y
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] A Sub-1G MEMS Sensor (2015)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Journal Title: ECS Transactions Volume: 66 Issue: 5 Pages: 131-138
  • DOI: 10.1149/06605.0131ecst
  • Peer Reviewed
• [Presentation] A Study on Tri-Axis Fully-Differential Electrodes for MEMS Accelerometer With Segmented Capacitance Detection (2018)
  • Author(s): Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
  • Organizer: Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018)
  • Int'l Joint Research
• [Presentation] Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices (2018)
  • Author(s): Kyoutarou Nitta, Koichiro Tachibana, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu
  • Organizer: 233rd ECS Meeting
  • Int'l Joint Research
• [Presentation] Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology (2018)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Shin-ichi Iida, Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu
  • Organizer: 13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018)
  • Int'l Joint Research
• [Presentation] Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys (2018)
  • Author(s): Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 22nd Topical Meeting of the International Society of Electrochemistry
  • Int'l Joint Research
• [Presentation] Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film (2018)
  • Author(s): Ken Hashigata, Hao-Chun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 22nd Topical Meeting of the International Society of Electrochemistry
  • Int'l Joint Research
• [Presentation] 積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2) (2018)
  • Author(s): 古賀 達也, 高安 基大, 山根 大輔, 伊藤 浩之, 小西 敏文, 道正 志郎, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第64回応用物理学会春季学術講演会
• [Presentation] 高感度MEMS加速度センサのBrownian Noise評価に関する検討 (2018)
  • Author(s): 新島 宏文, 乙部 翔太, 高安 基大, 山根 大輔, 小西 敏文, 佐布 晃昭, 伊藤 浩之, 年吉 洋, 町田 克之, 益 一哉
  • Organizer: 第64回応用物理学会春季学術講演会
• [Presentation] 積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性 (2018)
  • Author(s): 小西 敏文, 山根 大輔, 佐布 晃昭, 陳 君怡, Chang Tso-Fu Mark, 伊藤 浩之, 道正 志郎, 石原 昇, 曽根 正人, 町田 克之, 益 一哉, 飯田 慎一
  • Organizer: 第64回応用物理学会春季学術講演会
• [Presentation] 電解めっき法によるMEMS用金銅合金の作製及び機械的特性評価 (2018)
  • Author(s): 唐 浩峻, Chen Chun-Yi, Chang Tso-Fu Mark, 山根 大輔, 小西 敏文, 町田 克之, 益 一哉, 曽根 正人
  • Organizer: 第64回応用物理学会春季学術講演会
• [Presentation] 電解めっき法によるTi/Au微小カンチレバーのヤング率評価 (2018)
  • Author(s): 中島 英亮, Tso-Fu Mark Chang, Chun-Yi Chen, 山根 大輔, 小西 敏文, 町田 克之, 年吉 洋, 益 一哉, 曽根 正人
  • Organizer: 第64回応用物理学会春季学術講演会
• [Presentation] 長期振動試験によるAu-Cu合金微小カンチレバーの構造安定性 (2018)
  • Author(s): 新田 京太朗, 橘 航一朗, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, 山根 大輔, 小西 敏文, 町田 克之, 益 一哉, 曽根 正人
  • Organizer: 第64回応用物理学会春季学術講演会
• [Presentation] 電析制御による微小金カンチレバーの曲げ特性の改善 (2018)
  • Author(s): 浅野 啓介, 唐 浩峻, Chun-Yi Chen, 名越 貴志, Tso-Fu Mark Chang, 山根 大輔, 小西 敏文, 町田 克之, 益 一哉, 曽根 正人
  • Organizer: 第64回応用物理学会春季学術講演会
• [Presentation] Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever For MEMS Accelerometers (2018)
  • Author(s): Ken Hashigata, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 第64回応用物理学会春季学術講演会
• [Presentation] 集積化CMOS-MEMS技術による高感度慣性センサと応用システム (2018)
  • Author(s): 伊藤 浩之, 山根 大輔, 小西 敏文, 道正 志郎, 石原 昇, 町田 克之, 曽根 正人, 三宅 美博, 益 一哉
  • Organizer: 第64回応用物理学会春季学術講演会
  • Invited
• [Presentation] 単一Au錘3軸差動MEMS加速度センサの検討 (2018)
  • Author(s): 新島 宏文, 乙部 翔太, 高安 基大, 山根 大輔, 伊藤 浩之, 佐布 晃昭, 小西 敏文, 道正 志郎, 飯田 慎一, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 平成30年電気学会全国大会
• [Presentation] 傾斜を用いた1mG MEMS加速度センサの分解能評価の検討 (2018)
  • Author(s): 高安 基大, 古賀 達也, 辻 一平, 伊藤 浩之, 山根 大輔, 道正 志郎, 小西 敏文, 飯田 慎一, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 平成30年電気学会全国大会
• [Presentation] Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technolog (2017)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu
  • Organizer: The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
  • Place of Presentation: Kaohsiung Exhibition Center, Kaohsiung, Taiwan
  • Year and Date: 2017-06-18
  • Int'l Joint Research
• [Presentation] Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer (2017)
  • Author(s): Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
  • Organizer: 21st Topical Meeting of the International Society of Electrochemistry
  • Place of Presentation: Szeged, Hungary
  • Year and Date: 2017-04-23
  • Int'l Joint Research
• [Presentation] 積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討 (2017)
  • Author(s): 鈴木 拓真, Tso-Fu Mark Chang, Chun-Yi Chen, 小西 敏文, 町田 克之, 年吉 洋, 山根 大輔, 益 一哉, 曽根 正人
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2017-03-14
• [Presentation] 積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討 (2017)
  • Author(s): 橘 航一朗, Tso-Fu Mark Chang, Chun-Yi Chen, 小西 敏文, 町田 克之, 年吉 洋, 山根 大輔, 益 一哉, 曽根 正人
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2017-03-14
• [Presentation] 積層メタル技術によるTi/Auめっき構造体のヤング率評価（１） (2017)
  • Author(s): 山根 大輔, 小西 敏文, 佐布 晃昭, 中島 英亮, 寺西 美波, 陳 君怡, Tso-Fu Mark Chang, 曽根 正人, 年吉 洋, 益 一哉, 町田 克之
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2017-03-14
• [Presentation] 積層メタル技術によるTi/Auめっき構造体のヤング率評価（２） (2017)
  • Author(s): 中島 英亮, Tso-Fu Mark Chang, Chun-Yi Chen, 小西 敏文, 町田 克之, 年吉 洋, 山根 大輔, 益 一哉, 曽根 正
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2017-03-14
• [Presentation] 積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討 (2017)
  • Author(s): 小西 敏文, 山根 大輔, 佐布 晃昭, 曽根 正人, 年吉 洋, 益 一哉, 町田 克之
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2017-03-14
• [Presentation] 積層メタル技術による3軸MEMS加速度センサのばね定数設計方法 (2017)
  • Author(s): 佐布 晃昭, 小西 敏文, 山根 大輔, 年吉 洋, 曽根 正人, 益 一哉, 町田 克之
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2017-03-14
• [Presentation] 積層メタル技術で作製したMEMS慣性センサのモジュール化の検討 (2017)
  • Author(s): 高安 基大, 權田 惇晟, 山根 大輔, 伊藤 浩之, 小西 敏文, 道正 志郎, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2017-03-14
• [Presentation] 移動体制御による慣性センサ評価系の構築 (2017)
  • Author(s): 權田 惇晟, 高安 基大, 山根 大輔, 伊藤 浩之, 小西 敏文, 道正 志郎, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2017-03-14
• [Presentation] Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology (2017)
  • Author(s): Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 2017 MRS Fall Meeting
  • Int'l Joint Research
• [Presentation] Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests (2017)
  • Author(s): Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 2017 MRS Fall Meeting
  • Int'l Joint Research
• [Presentation] Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology (2017)
  • Author(s): Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 2017 MRS Fall Meeting
  • Int'l Joint Research
• [Presentation] A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes (2017)
  • Author(s): Hirofumi Niijima, Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
  • Organizer: The 30th International Microprocesses and Nanotechnology Conference (MNC 2017)
  • Int'l Joint Research
• [Presentation] Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating (2017)
  • Author(s): Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu, Shinichi Iida
  • Organizer: The 30th International Microprocesses and Nanotechnology Conference (MNC 2017)
  • Int'l Joint Research
• [Presentation] Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition (2017)
  • Author(s): Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: IUMRS International Conference in Asia (IUMRS-ICA) 2017
  • Int'l Joint Research
• [Presentation] Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions (2017)
  • Author(s): Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: IUMRS International Conference in Asia (IUMRS-ICA) 2017
  • Int'l Joint Research
• [Presentation] Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components (2017)
  • Author(s): Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: IUMRS International Conference in Asia (IUMRS-ICA) 2017
  • Int'l Joint Research
• [Presentation] Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever (2017)
  • Author(s): Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: IUMRS International Conference in Asia (IUMRS-ICA) 2017
  • Int'l Joint Research
• [Presentation] Strategies of Mechanical Strengthening in Electroplated Au Materials (2017)
  • Author(s): Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: IUMRS International Conference in Asia (IUMRS-ICA) 2017
  • Int'l Joint Research
• [Presentation] Sub-1mG Inertial Sensors by Multi-layer Metal Technology (2017)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
  • Organizer: IUMRS International Conference in Asia (IUMRS-ICA) 2017
  • Int'l Joint Research / Invited
• [Presentation] Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2 (2017)
  • Author(s): Tso-Fu Mark Chang, Haochun Tang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: IUMRS International Conference in Asia (IUMRS-ICA) 2017
  • Int'l Joint Research / Invited
• [Presentation] Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers (2017)
  • Author(s): Masato Sone, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu
  • Organizer: IUMRS International Conference in Asia (IUMRS-ICA) 2017
  • Int'l Joint Research / Invited
• [Presentation] Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components (2017)
  • Author(s): Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: TACT2017 International Thin Films Conference
  • Int'l Joint Research
• [Presentation] A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes (2017)
  • Author(s): Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
  • Organizer: 2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017)
  • Int'l Joint Research
• [Presentation] Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology (2017)
  • Author(s): Ippei Tsuji, Motohiro Takayasu, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
  • Organizer: 2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017)
  • Int'l Joint Research
• [Presentation] A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors (2017)
  • Author(s): Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu
  • Organizer: 2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017)
  • Int'l Joint Research
• [Presentation] Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test (2017)
  • Author(s): Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 43rd Micro and Nano Engineering (MNE2017)
  • Int'l Joint Research
• [Presentation] Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End (2017)
  • Author(s): Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 43rd Micro and Nano Engineering (MNE2017)
  • Int'l Joint Research
• [Presentation] Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices (2017)
  • Author(s): Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 43rd Micro and Nano Engineering (MNE2017)
  • Int'l Joint Research
• [Presentation] Enahnced Bending Strength of Electrodeposited Pure Gold Canrilevers in Micro-Bending Test (2017)
  • Author(s): Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Kazuya Masu, Masato Sone
  • Organizer: 43rd Micro and Nano Engineering (MNE2017)
  • Int'l Joint Research
• [Presentation] Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications (2017)
  • Author(s): Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: RACI National Centenary Conference
  • Int'l Joint Research
• [Presentation] FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices (2017)
  • Author(s): Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 21th International Conference on Solid State Ionics
  • Int'l Joint Research
• [Presentation] Micro-Mechanical Property Evaluation of Electroplated Au/Cu Alloys toward Applications in MEMS Accelerometers (2017)
  • Author(s): Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 21th International Conference on Solid State Ionics
  • Int'l Joint Research
• [Presentation] Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components (2017)
  • Author(s): Chun-Yi Chen, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 21th International Conference on Solid State Ionics
  • Int'l Joint Research
• [Presentation] Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology (2017)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu
  • Organizer: The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
  • Int'l Joint Research
• [Presentation] Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer (2017)
  • Author(s): Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 21st Topical Meeting of the International Society of Electrochemistry
  • Int'l Joint Research
• [Presentation] MEMS inertial sensors for biomedical applications (2017)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, Kazuya Masu
  • Organizer: 12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017)
  • Int'l Joint Research / Invited
• [Presentation] A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices (2017)
  • Author(s): Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Masato Sone, Kazuya Masu
  • Organizer: 12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017)
  • Int'l Joint Research
• [Presentation] 3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討 (2017)
  • Author(s): 乙部 翔太, 高安 基大, 山根 大輔, 小西 敏文, 佐布 晃昭, 伊藤 浩之, 道正 志郎, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第34回「センサ・マイクロマシンと応用システム」シンポジウム
• [Presentation] 発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討 (2017)
  • Author(s): 折原 恒祐, 高安 基大, 道正 志郎, 伊藤 浩之, 山根 大輔, 小西 敏文, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第34回「センサ・マイクロマシンと応用システム」シンポジウム
• [Presentation] 静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2) (2017)
  • Author(s): 新島 宏文, 高安 基大, 山根 大輔, 小西 敏文, 佐布 晃昭, 伊藤 浩之, 年吉 洋, 町田 克之, 益 一哉
  • Organizer: 第34回「センサ・マイクロマシンと応用システム」シンポジウム
• [Presentation] 積層メタル技術によるMEMS加速度センサの傾斜時感度特性の検討 (2017)
  • Author(s): 古賀達也, 辻 一平, 高安 基大, 伊藤 浩之, 山根 大輔, 道正 志郎, 小西 敏文, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第9回集積化MEMSシンポジウム
• [Presentation] 積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討 (2017)
  • Author(s): 辻 一平, 高安 基大, 伊藤 浩之, 山根 大輔, 道正 志郎, 小西 敏文, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第9回集積化MEMSシンポジウム
• [Presentation] MEMS慣性センサ用弛張発振型容量検出回路 (2017)
  • Author(s): 高安 基大, 道正 志郎, 伊藤 浩之, 山根 大輔, 小西 敏文, 町田 克之, 石原 昇, 益 一哉
  • Organizer: 第9回集積化MEMSシンポジウム
• [Presentation] 積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討 (2017)
  • Author(s): 小西 敏文, 山根 大輔, 佐布 晃昭, 曽根 正人, 年吉 洋, 益 一哉, 町田 克之
  • Organizer: 第9回集積化MEMSシンポジウム
• [Presentation] 積層メタルMEMS慣性センサの長期振動特性評価 (2017)
  • Author(s): 山根 大輔, 小西 敏文, 佐布 晃昭, 橘 航一朗, 寺西 美波, 陳 君怡, Tso-Fu Mark Chang, 曽根 正人, 町田 克之, 益 一哉
  • Organizer: 第9回集積化MEMSシンポジウム
• [Presentation] 積層メタル技術によるMEMS慣性センサの傾斜時感度特性の検討 (2017)
  • Author(s): 古賀達也, 辻 一平, 高安 基大, 伊藤 浩之, 山根 大輔, 道正 志郎, 小西 敏文, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第9回集積化MEMSシンポジウム
• [Presentation] 積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討 (2017)
  • Author(s): 辻 一平, 高安 基大, 伊藤 浩之, 山根 大輔, 道正 志郎, 小西 敏文, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第78応用物理学会秋季学術講演会
• [Presentation] MEMS加速度センサ用高分解能容量検出回路 (2017)
  • Author(s): 高安 基大, 道正 志郎, 伊藤 浩之, 山根 大輔, 小西 敏文, 町田 克之, 石原 昇, 益 一哉
  • Organizer: 第78応用物理学会秋季学術講演会
• [Presentation] 金めっきで形成したMEMS加速度センサの長期振動特性に関する検討 (2017)
  • Author(s): 山根 大輔, 小西 敏文, 佐布 晃昭, 橘 航一朗, 寺西 美波, 陳 君怡, Tso-Fu Mark Chang, 曽根 正人, 町田 克之, 益 一哉
  • Organizer: 第78応用物理学会秋季学術講演会
• [Presentation] 積層メタル技術を用いた高感度MEMS 傾斜計の検討 (2017)
  • Author(s): 辻 一平, 高安 基大, 伊藤 浩之, 山根 大輔, 小西 敏文, 道正 志郎, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第8回集積化MEMS技術研究ワークショップ
• [Presentation] MEMS 加速度センサ用高分解能容量検出回路の評価 (2017)
  • Author(s): 高安 基大, 道正 志郎, 伊藤 浩之, 山根 大輔, 小西 敏文, 町田 克之, 石原 昇, 益 一哉
  • Organizer: 第8回集積化MEMS技術研究ワークショップ
• [Presentation] 非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価 (2017)
  • Author(s): 曽根 正人, Tso-Fu Mark Chang, Chun-Yi Chen, 山根 大輔, 小西 敏文, 町田 克之, 益 一哉
  • Organizer: 第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー
• [Presentation] Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices (2016)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hideaki Nakajima, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Organizer: 29th International Microprocesses and Nanotechnology Conference (MNC 2016)
  • Place of Presentation: ANA Crowne Plaza Kyoto, Kyoto, Japan
  • Year and Date: 2016-11-08
  • Int'l Joint Research
• [Presentation] A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology (2016)
  • Author(s): Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Organizer: IEEE Sensors 2016
  • Place of Presentation: Orland, FL, USA
  • Year and Date: 2016-10-30
  • Int'l Joint Research
• [Presentation] 微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価 (2016)
  • Author(s): 浅野 啓介, 唐 浩峻, Chen Chun-Yi, Chang Tso-Fu Mark, 名越 貴志, 山根 大輔, 町田 克之, 益 一哉, 曽根 正人
  • Organizer: 第33回センサ・マイクロマシンと応用シンポジウム
  • Place of Presentation: 平戸文化センター, 長崎県平戸市
  • Year and Date: 2016-10-24
• [Presentation] 高感度MEMS 加速度センサー用金電気めっきの変形挙動 および強度の結晶方位依存性評価 (2016)
  • Author(s): 葭葉 将治, Chen Chun-Yi, 名越 貴志, Chang Tso-Fu Mark, 山根 大輔, 町田 克之, 益 一哉, 曽根 正人
  • Organizer: 第33回センサ・マイクロマシンと応用シンポジウム
  • Place of Presentation: 平戸文化センター, 長崎県平戸市
  • Year and Date: 2016-10-24
• [Presentation] 電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価 (2016)
  • Author(s): 寺西 美波, Chang Tso-Fu Mark, Chen Chun-Yi, 小西 敏文, 町田 克之, 年吉 洋, 山根 大輔, 益 一哉, 曽根 正人
  • Organizer: 第33回センサ・マイクロマシンと応用シンポジウム
  • Place of Presentation: 平戸文化センター, 長崎県平戸市
  • Year and Date: 2016-10-24
• [Presentation] 微小引張試験片を用いたMEMS 用金めっき材料の機械的特性の評価 (2016)
  • Author(s): 柳田 佐理, Chang Tso-Fu Mark, Chen Chu-Yi, 名越 貴志, 山根 大輔, 町田 克之, 益 一哉, 曽根 正人
  • Organizer: 第33回センサ・マイクロマシンと応用シンポジウム
  • Place of Presentation: 平戸文化センター, 長崎県平戸市
  • Year and Date: 2016-10-24
• [Presentation] 積層メタル技術によるMEMS加速度センサを用いた慣性センサモジュールの検討 (2016)
  • Author(s): 權田 惇晟, 高安 基大, 山根 大輔, 小西 敏文, 伊藤 浩之, 道正 志郎, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第8回集積化MEMSシンポジウム
  • Place of Presentation: 平戸文化センター, 長崎県平戸市
  • Year and Date: 2016-10-24
• [Presentation] RC発振器型高感度容量検出回路 (2016)
  • Author(s): 高安 基大, 道正 志郎, 伊藤 浩之, 石原 昇, 山根 大輔, 小西 敏文, 町田 克之, 益 一哉
  • Organizer: 第8回集積化MEMSシンポジウム
  • Place of Presentation: 平戸文化センター, 長崎県平戸市
  • Year and Date: 2016-10-24
• [Presentation] マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法 (2016)
  • Author(s): 小西 敏文, 山根 大輔, 伊藤 浩之, 道正 志郎, 石原 昇, 年吉 洋, 益 一哉, 町田 克之
  • Organizer: 第8回集積化MEMSシンポジウム
  • Place of Presentation: 平戸文化センター, 長崎県平戸市
  • Year and Date: 2016-10-24
• [Presentation] 積層メタル技術によるMEMS加速度センサのばね定数設計方法 (2016)
  • Author(s): 佐布 晃昭, 小西 敏文, 山根 大輔, 年吉 洋, 曽根 正人, 益 一哉, 町田 克之
  • Organizer: 第8回集積化MEMSシンポジウム
  • Place of Presentation: 平戸文化センター, 長崎県平戸市
  • Year and Date: 2016-10-24
• [Presentation] 差動型積層メタルMEMS加速度センサの検討 (2016)
  • Author(s): 山根 大輔, 小西 敏文, 佐布 晃昭, 伊藤 浩之, 曽根 正人, 年吉 洋, 益 一哉, 町田 克之
  • Organizer: 第8回集積化MEMSシンポジウム
  • Place of Presentation: 平戸文化センター, 長崎県平戸市
  • Year and Date: 2016-10-24
• [Presentation] Sub-1mG検出へ向けた積層メタルMEMS慣性センサ (2016)
  • Author(s): 山根 大輔, 小西 敏文, 佐布 晃昭, 曽根 正人, 年吉 洋, 益 一哉, 町田 克之
  • Organizer: 第8回集積化MEMSシンポジウム
  • Place of Presentation: 平戸文化センター, 長崎県平戸市
  • Year and Date: 2016-10-24
• [Presentation] Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating (2016)
  • Author(s): Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: The 2016 PRiME Meeting
  • Place of Presentation: Hawaii, USA
  • Year and Date: 2016-10-02
  • Int'l Joint Research
• [Presentation] A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology (2016)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida
  • Organizer: 2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)
  • Place of Presentation: Tsukuba International Congress Center, Tsukuba, Japan
  • Year and Date: 2016-09-26
  • Int'l Joint Research
• [Presentation] A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System (2016)
  • Author(s): Toshifumi Konishi,Daisuke Yamane, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Organizer: 2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)
  • Place of Presentation: Tsukuba International Congress Center, Tsukuba, Japan
  • Year and Date: 2016-09-26
  • Int'l Joint Research
• [Presentation] High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers (2016)
  • Author(s): Chun-Yi Chen, Masaharu Yoshiba, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
  • Organizer: 2nd International Conference and Expo on Separation Techniques
  • Place of Presentation: Valencia, Spain
  • Year and Date: 2016-09-26
  • Int'l Joint Research / Invited
• [Presentation] RC発振器型容量検出回路の高感度化の検討 (2016)
  • Author(s): 高安 基大, 道正 志郎, 伊藤 浩之, 石原 昇, 山根 大輔, 益 一哉
  • Organizer: 電子情報通信学会ソサイエティ大会
  • Place of Presentation: 北海道大学札幌キャンパス, 北海道
  • Year and Date: 2016-09-20
• [Presentation] Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer (2016)
  • Author(s): Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 42nd Micro and Nano Engineering (MNE2016)
  • Place of Presentation: the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
  • Year and Date: 2016-09-19
  • Int'l Joint Research
• [Presentation] Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer (2016)
  • Author(s): Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 42nd Micro and Nano Engineering (MNE2016)
  • Place of Presentation: the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
  • Year and Date: 2016-09-19
  • Int'l Joint Research
• [Presentation] Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices (2016)
  • Author(s): Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 42nd Micro and Nano Engineering (MNE2016)
  • Place of Presentation: the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
  • Year and Date: 2016-09-19
  • Int'l Joint Research
• [Presentation] Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide (2016)
  • Author(s): Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 42nd Micro and Nano Engineering (MNE2016)
  • Place of Presentation: the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
  • Year and Date: 2016-09-19
  • Int'l Joint Research
• [Presentation] High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications (2016)
  • Author(s): Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 新潟県新潟市 朱鷺メッセ
  • Year and Date: 2016-09-13
• [Presentation] CMOS-MEMS慣性センサにおける機械的ノイズの解析手法 (2016)
  • Author(s): 小西 敏文, 山根 大輔, 伊藤 浩之, 道正 志郎, 石原 昇, 年吉 洋, 益 一哉, 町田 克之
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 新潟県新潟市 朱鷺メッセ
  • Year and Date: 2016-09-13
• [Presentation] 積層メタル技術によるMEMS加速度センサのばね定数設計方法（I） (2016)
  • Author(s): 佐布 晃昭, 小西 敏文, 山根 大輔, 年吉 洋, 曽根 正人, 益 一哉, 町田 克之
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 新潟県新潟市 朱鷺メッセ
  • Year and Date: 2016-09-13
• [Presentation] 積層メタル差動型MEMS加速度センサの基礎検討 (2016)
  • Author(s): 山根 大輔, 小西 敏文, 佐布 晃昭, 伊藤 浩之, 道正 志郎, 石原 昇, 曽根 正人, 年吉 洋, 益 一哉, 町田 克之
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 新潟県新潟市 朱鷺メッセ
  • Year and Date: 2016-09-13
• [Presentation] 1mG以下検出へ向けた積層メタルMEMS加速度センサの基礎検討 (2016)
  • Author(s): 山根 大輔, 小西 敏文, 佐布 晃昭, 曽根 正人, 年吉 洋, 益 一哉, 町田 克之
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 新潟県新潟市 朱鷺メッセ
  • Year and Date: 2016-09-13
• [Presentation] Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease (2016)
  • Author(s): Kazuya Masu, Daisuke Yamane, Katsuyuki Machida, Masato Sone, Yoshihiro Miyake
  • Organizer: the 46th European Solid-State Device Re-search Conference (ESSDERC)
  • Place of Presentation: Swisstech Convention Centre, Lausanne, Switzerland
  • Year and Date: 2016-09-12
  • Int'l Joint Research / Invited
• [Presentation] Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer (2016)
  • Author(s): Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: The 15th Symposium on Development of Supercritical Fluid Technology and Application and The 2nd International Workshop on Supercritical Fluid Dyeing Technology
  • Place of Presentation: Kaohsiung, Taiwan
  • Year and Date: 2016-09-08
  • Int'l Joint Research / Invited
• [Presentation] Electrodeposited Gold for Next Generation MEMS Accelerometer Toward Medical Applications (2016)
  • Author(s): Masato Sone, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu
  • Organizer: Integrative Biology-2016
  • Place of Presentation: Berlin, Germany
  • Year and Date: 2016-07-18
  • Int'l Joint Research / Invited
• [Presentation] A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology (2016)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Hiroshi Toshiyohi, Kazuya Masu, Katsuyuki Machida
  • Organizer: Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016)
  • Place of Presentation: Kanazawa, Japan
  • Year and Date: 2016-06-26
  • Int'l Joint Research
• [Presentation] A 1-mG MEMS Sensor (2016)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Organizer: 229th ECS Meeting
  • Place of Presentation: San Diego, CA, USA
  • Year and Date: 2016-05-29
  • Int'l Joint Research / Invited
• [Presentation] A Study of Railroad Vehicle Control by Inertial Sensors (2016)
  • Author(s): Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Masakazu Sonobe, Takumi Kobayashi, Yamato Fukuta, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, Katsuyuki Machida
  • Organizer: 11th World Congress on Railway Research
  • Place of Presentation: Milan, Italy
  • Year and Date: 2016-05-29
  • Int'l Joint Research
• [Presentation] Pulse Electroplating of Au Films with Ultra High Strength (2016)
  • Author(s): Chun-Yi Chen, Masaharu Yoshiba, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 229th ECS Meeting
  • Place of Presentation: San Diego, CA, USA
  • Year and Date: 2016-05-29
  • Int'l Joint Research
• [Presentation] 小型高感度MEMS慣性センサモジュールの試作評価 (2016)
  • Author(s): 高安 基大, 權田 惇晟, 山根 大輔, 小西 敏文, 伊藤 浩之, 道正 志郎, 石原 昇, 町田 克之, 益 一哉
  • Organizer: LSIとシステムのワークショップ
  • Place of Presentation: 東京大学 生産技術研究所 総合研究実験棟(An棟) 2階 コンベンションホール
  • Year and Date: 2016-05-16
• [Presentation] Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating (2016)
  • Author(s): Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
  • Organizer: ISE - Topical Meeting
  • Place of Presentation: Auckland, New Zealand
  • Year and Date: 2016-04-17
  • Int'l Joint Research
• [Presentation] Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure (2016)
  • Author(s): Yota Ishizuka, Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
  • Organizer: ISE - Topical Meeting
  • Place of Presentation: Auckland, New Zealand
  • Year and Date: 2016-04-17
  • Int'l Joint Research
• [Presentation] Study of Gold Electroplating by Constant and Pulse Current Method with Non-Cyanide Gold Sulfite Electrolyte (2016)
  • Author(s): Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: ISE - Topical Meeting
  • Place of Presentation: Auckland, New Zealand
  • Year and Date: 2016-04-17
  • Int'l Joint Research
• [Presentation] Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices (2016)
  • Author(s): Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: ISE - Topical Meeting
  • Place of Presentation: Auckland, New Zealand
  • Year and Date: 2016-04-17
  • Int'l Joint Research
• [Presentation] Preparation and Characterization of Gold Films by Electroplating with Supercritical Carbon Dioxide (2016)
  • Author(s): Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone
  • Organizer: ISE - Topical Meeting
  • Place of Presentation: Auckland, New Zealand
  • Year and Date: 2016-04-17
  • Int'l Joint Research
• [Presentation] A Design of Spring Constant Arranged for MEMS Accelerometer by Multi-layer Metal Technology (2016)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida
  • Organizer: IEEE NEMS 2016
  • Place of Presentation: Matsushima Bay and Sendai, Miyagi, Japan
  • Year and Date: 2016-04-17
  • Int'l Joint Research
• [Presentation] Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Struct (2016)
  • Author(s): Yota Ishizuka, Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
  • Organizer: ISE - Topical Meeting
  • Place of Presentation: Auckland, New Zealand
  • Year and Date: 2016-04-17
  • Int'l Joint Research
• [Presentation] 積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討 (2016)
  • Author(s): 小西敏文, 山根大輔, 佐布晃昭, 年吉 洋, 曽根正人, 益 一哉, 町田克之
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス、東京都目黒区
  • Year and Date: 2016-03-19
• [Presentation] Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討 (2016)
  • Author(s): 山根大輔, 小西敏文, 伊藤浩之, 年吉 洋, 益 一哉, 町田克之
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス、東京都目黒区
  • Year and Date: 2016-03-19
• [Presentation] 電解金めっきで作製した Ti/Au 微小カンチレバーの構造安定性 (2016)
  • Author(s): 寺西美波, Chang Tso-Fu Mark, Chen Chun-Yi, 小西敏文, 町田克之, 年吉 洋, 山根大輔, 益 一哉, 曽根 正人
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス、東京都目黒区
  • Year and Date: 2016-03-19
• [Presentation] Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices (2016)
  • Author(s): Haochun Tang,Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス、東京都目黒区
  • Year and Date: 2016-03-19
• [Presentation] マイクロ圧縮試験による金 / チタン積層構造の機械的特性評価 (2016)
  • Author(s): 石塚陽大, 柳田佐理, Chang Tso-Fu Mark, Chen Chun-Yi, 小西敏文, 町田克之, 年吉 洋, 山根大輔, 益 一哉, 曽根正人
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス、東京都目黒区
  • Year and Date: 2016-03-19
• [Presentation] マイクロ曲げ試験による電析金薄膜の機械的特性評価 (2016)
  • Author(s): 浅野啓介, 唐 浩峻, Chen Chun-Yi, Chang Tso-Fu Mark, 山根大輔, 町田克之, 益 一哉, 曽根正人
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス、東京都目黒区
  • Year and Date: 2016-03-19
• [Presentation] マイクロ圧縮試験による MEMS 用金電気めっきの機械的特性の評価 (2016)
  • Author(s): 葭葉将治, Chen Chun-Yi, Chang Tso-Fu Mark, 山根大輔, 町田克之, 益 一哉, 曽根正人
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス、東京都目黒区
  • Year and Date: 2016-03-19
• [Presentation] CMOS低雑音オペアンプ設計法の検討 (2016)
  • Author(s): 劉安琪, 小西敏文, 山根大輔, 伊藤浩之, 道正志郎, 石原昇, 町田克之, 益 一哉
  • Organizer: 電子情報通信学会2016年総合大会
  • Place of Presentation: 九州大学伊都キャンパス、福岡県福岡市
  • Year and Date: 2016-03-15
• [Presentation] Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討 (2016)
  • Author(s): 山根大輔, 小西敏文, 年吉 洋, 益 一哉, 町田克之
  • Organizer: 電子情報通信学会2016年総合大会
  • Place of Presentation: 九州大学伊都キャンパス、福岡県福岡市
  • Year and Date: 2016-03-15
• [Presentation] A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology (2016)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Organizer: IEEE Inertial Sensors 2016
  • Place of Presentation: Laguna Beach, California, USA
  • Year and Date: 2016-02-23
  • Int'l Joint Research
• [Presentation] 微小電子機械システムのための超臨界流体を用いた金属皮膜形成技術 (2016)
  • Author(s): 曽根 正人, Tso-Fu Mark Chang, Chun-yi Chen, 山根 大輔, 益 一哉, 町田 克之
  • Organizer: 第6回CSJ化学フェスタ
  • Place of Presentation: タワーホール船堀, 東京
  • Invited
• [Presentation] 高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価 (2016)
  • Author(s): 曽根 正人, Tso-Fu Mark Chang, 陳 君怡, 山根 大輔, 益 一哉, 町田 克之
  • Organizer: 日本学術振興会・第172委員会
  • Place of Presentation: 物質・材料研究機構, 茨城県つくば市
  • Invited
• [Presentation] Micro-Mechanical Properties of Electrodeposited Gold Thin Films (2015)
  • Author(s): Masaharu Yoshiba, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: TACT 2015 International Thin Films Conference
  • Place of Presentation: Tainan, Taiwan
  • Year and Date: 2015-11-15
  • Int'l Joint Research
• [Presentation] A Sub-1G CMOS-MEMS Accelerometer (2015)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Organizer: IEEE Sensors 2015
  • Place of Presentation: Busan, South Korea
  • Year and Date: 2015-11-01
  • Int'l Joint Research
• [Presentation] MEMS加速度センサのための金属構造体の密着力評価 (2015)
  • Author(s): 佐布晃昭, 小西敏文, 松島隆明, 山根大輔, 年吉 洋, 曽根正人, 益 一哉, 町田克之
  • Organizer: 第7回集積化MEMSシンポジウム
  • Place of Presentation: 新潟コンベンションセンター（朱鷺メッセ）、新潟県新潟市
  • Year and Date: 2015-10-28
• [Presentation] マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討 (2015)
  • Author(s): 小西敏文, 山根大輔, 高安基大, 伊藤浩之, 道正志郎, 石原昇, 益 一哉, 年吉 洋, 町田克之
  • Organizer: 第7回集積化MEMSシンポジウム
  • Place of Presentation: 新潟コンベンションセンター（朱鷺メッセ）、新潟県新潟市
  • Year and Date: 2015-10-28
• [Presentation] Sub-1G～20G集積化MEMS慣性センサ (2015)
  • Author(s): 山根大輔, 小西敏文, 年吉 洋, 益 一哉, 町田克之
  • Organizer: 第7回集積化MEMSシンポジウム
  • Place of Presentation: 新潟コンベンションセンター（朱鷺メッセ）、新潟県新潟市
  • Year and Date: 2015-10-28
• [Presentation] Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology (2015)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida
  • Organizer: 2015 International Conference on Solid State Devices and Materials (SSDM 2015)
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2015-09-27
  • Int'l Joint Research
• [Presentation] Study on Ti/Au Two-Layered Cantilevers with Different Aspect Ratio for MEMS Devices (2015)
  • Author(s): Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
  • Organizer: 2015 International Conference on Solid State Devices and Materials (SSDM 2015)
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2015-09-27
  • Int'l Joint Research
• [Presentation] Mechanical Properties of Electrodeposited Gold for MEMS Device (2015)
  • Author(s): Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 2015 International Conference on Solid State Devices and Materials (SSDM 2015)
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2015-09-27
  • Int'l Joint Research
• [Presentation] Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer (2015)
  • Author(s): Toshifumi Konishi, Daisuke Yamane, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, Hiroshi Toshiyoshi, Katsuyuki Machida
  • Organizer: 2015 International Conference on Solid State Devices and Materials (SSDM 2015)
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2015-09-27
  • Int'l Joint Research
• [Presentation] Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers (2015)
  • Author(s): Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
  • Organizer: 41st Micro and Nano Engineering (MNE2015)
  • Place of Presentation: Hague, Netherlands
  • Year and Date: 2015-09-21
  • Int'l Joint Research
• [Presentation] High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating (2015)
  • Author(s): Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 41st Micro and Nano Engineering (MNE2015)
  • Place of Presentation: Hague, Netherlands
  • Year and Date: 2015-09-21
  • Int'l Joint Research
• [Presentation] Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test (2015)
  • Author(s): Masaharu Yoshiba, Chun-Yi Chen, Tsu-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone
  • Organizer: 41st Micro and Nano Engineering (MNE2015)
  • Place of Presentation: Hague, Netherlands
  • Year and Date: 2015-09-21
  • Int'l Joint Research
• [Presentation] A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology (2015)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Organizer: 41st Micro and Nano Engineering (MNE2015)
  • Place of Presentation: Hague, Netherlands
  • Year and Date: 2015-09-21
  • Int'l Joint Research
• [Presentation] A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology (2015)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, Katsuyuki Machida
  • Organizer: 5th Advanced Metallization Conference Asian Session (ADMETAplus2015)
  • Place of Presentation: Seoul, Korea
  • Year and Date: 2015-09-16
  • Int'l Joint Research
• [Presentation] Sub-1G～20G集積化MEMS加速度センサの基本評価 (2015)
  • Author(s): 山根大輔, 小西敏文, 年吉 洋, 益 一哉, 町田克之
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場 愛知県名古屋市
  • Year and Date: 2015-09-13
• [Presentation] ゲイン制御型CMOS-MEMS加速度センサ回路の検討 (2015)
  • Author(s): 小西敏文, 山根大輔, 高安基大, 伊藤浩之, 道正志郎, 石原昇, 益 一哉, 年吉 洋, 町田克之
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場 愛知県名古屋市
  • Year and Date: 2015-09-13
• [Presentation] MEMS加速度センサのための金属構造体の密着力評価 (2015)
  • Author(s): 佐布晃昭, 小西敏文, 松島隆明, 山根大輔, 年吉 洋, 曽根正人, 益 一哉, 町田克之
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場 愛知県名古屋市
  • Year and Date: 2015-09-13
• [Presentation] A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology (2015)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, Katsuyuki Machida
  • Organizer: 32nd Advanced Metallization Conference (AMC2015)
  • Place of Presentation: Austin, Texas, US
  • Year and Date: 2015-09-09
  • Int'l Joint Research
• [Presentation] Compression Deformation of Micro-components Fabricated by FIB from Gold Electrodeposited Films (2015)
  • Author(s): Masaharu Yoshiba, Chun-Yi Chen, Tso-fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: International Symposium for Advanced Materials Research (ISAMR 2015)
  • Place of Presentation: Sun Moon Lake, Taiwan
  • Year and Date: 2015-08-16
  • Int'l Joint Research
• [Presentation] A Sub-1G MEMS Inertial Sensor (2015)
  • Author(s): Daisuke Yamane, Kazuya Masu, Katsuyuki Machida
  • Organizer: International Symposium for Advanced Materials Research (ISAMR 2015)
  • Place of Presentation: Sun Moon Lake, Taiwan
  • Year and Date: 2015-08-16
  • Int'l Joint Research / Invited
• [Presentation] Nano-G metrology system and its biomedical applications by CMOS-MEMS technology (2015)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu
  • Organizer: 3rd International Conference on Integrative Biology
  • Place of Presentation: Valencia, Spain
  • Year and Date: 2015-08-04
  • Int'l Joint Research / Invited
• [Presentation] 電解金めっきで作製したMEMSデバイスにおける動作構造安定性 (2015)
  • Author(s): 寺西美波, Chang Tso-Fu Mark, 小西敏文, 松島隆明, 町田克之, 年吉 洋, 山根大輔, 伊藤浩之, 益 一哉, 曽根正人
  • Organizer: 第6回集積化MEMS技術研究ワークショップ
  • Place of Presentation: NHK放送技術研究所、東京都世田谷区
  • Year and Date: 2015-07-31
• [Presentation] 電解金めっきで作製した微小カンチレバーの形状安定性評価 (2015)
  • Author(s): 寺西美波, Chang Tso-Fu Mark, 山根大輔, 小西敏文, 松島隆明, 伊藤浩之, 年吉 洋, 町田克之, 益 一哉, 曽根正人
  • Organizer: 平成27年電気学会センサ・マイクロマシン部門総合研究会
  • Place of Presentation: 九州大学医学部百年講堂、福岡県福岡市
  • Year and Date: 2015-07-02
• [Presentation] Stability of Movable Structure Formed by Au Electroplating for MEMS Devices (2015)
  • Author(s): Minami Teranishi, Tso-Fu Mark Chang, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Hiroyuki Ito, Kazuya Masu, Tatsuo Sato, Masato Sone
  • Organizer: 8th Int. Conf. on Materials for Advanced Technologies (ICMAT 2015)
  • Place of Presentation: SUNTEC, Singapore
  • Year and Date: 2015-06-28
  • Int'l Joint Research
• [Presentation] A Sub-1G MEMS Sensor (2015)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  • Organizer: the 227th ECS Meeting
  • Place of Presentation: Chicago, Illinois, USA
  • Year and Date: 2015-05-24
  • Int'l Joint Research / Invited
• [Presentation] CMOS -MEMS -New Frontier of Multilevel Interconnect Technology- (2015)
  • Author(s): Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu
  • Organizer: 2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015)
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 2015-04-14
  • Int'l Joint Research / Invited
• [Book] Advances in Microelectronics: Reviews, Vol. 1, "Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors" (2018)
  • Author(s): Tso-Fu Mark Chang, Chun-Yi Chen, Hao-Chun Tang, Masaharu Yoshiba, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Total Pages: 534
  • Publisher: IFSA Publishing
  • ISBN: 9788469786338
• [Remarks] 研究者（山根 大輔）紹介のwebページ
  • URL: http://masu-www.pi.titech.ac.jp/member_files/daisuke_yamane/daisuke_yamane.html
• [Remarks] 所属研究機関（東京工業大学）が作成した研究者（山根 大輔）の研究内容・成果に関するwebページ
  • URL: http://t2r2.star.titech.ac.jp/cgi-bin/researcherinfo.cgi?q_researcher_content_number=CTT100635307
• [Remarks] 山根大輔 研究業績一覧
  • URL: http://t2r2.star.titech.ac.jp/cgi-bin/researcherpublicationlist.cgi?q_researcher_content_number=CTT100635307
• [Remarks] 平成28年度「東工大挑戦的研究賞」受賞者決定
  • URL: http://www.titech.ac.jp/news/2016/035941.html
• [Remarks] 山根大輔助教が平成28年度東工大挑戦的研究賞を受賞
  • URL: http://educ.titech.ac.jp/ee/news/2016_09/052621.html
• [Remarks] 益・伊藤研究室 山根大輔助教が、「平成28年度東工大挑戦的研究賞 学長特別賞」を受賞
  • URL: http://www.first.iir.titech.ac.jp/news/2016/detail_120.html
• [Remarks] 山根大輔 研究室ＨＰ
  • URL: http://masu-www.pi.titech.ac.jp/member_files/daisuke_yamane/daisuke_yamane.html
• [Remarks] 研究者の研究内容・業績・受賞・報道発表などを記載したwebページ
  • URL: http://masu-www.pi.titech.ac.jp/member_files/daisuke_yamane/daisuke_yamane.html
• [Remarks] 研究者の所属期間が作成した研究者の研究成果に関するwebページ
  • URL: http://www.titech.ac.jp/news/2015/032878.html
• [Patent(Industrial Property Rights)] 微細素子とその製造方法 (2017)
  • Inventor(s): 小西敏文, 佐布晃昭, 町田克之, 山根大輔, 益 一哉
  • Industrial Property Rights Holder: 小西敏文, 佐布晃昭, 町田克之, 山根大輔, 益 一哉
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2017-055732
  • Filing Date: 2017-03-22
• [Patent(Industrial Property Rights)] 微細素子およびその製造方法 (2017)
  • Inventor(s): 小西,佐布,町田,曽根,Chang,Chen,山根,益
  • Industrial Property Rights Holder: 小西,佐布,町田,曽根,Chang,Chen,山根,益
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2017-055730
  • Filing Date: 2017-03-22
• [Patent(Industrial Property Rights)] 半導体素子の構造解析装置および解析プログラム (2015)
  • Inventor(s): 小西敏文，佐布晃昭，町田克之，益 一哉，山根大輔
  • Industrial Property Rights Holder: 小西敏文，佐布晃昭，町田克之，益 一哉，山根大輔
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2015-186382
  • Filing Date: 2015-09-24
• [Patent(Industrial Property Rights)] "微細素子およびその製造方法 (2015)
  • Inventor(s): 小西敏文，佐布晃昭，町田克之，益 一哉，伊藤浩之，山根大輔
  • Industrial Property Rights Holder: 小西敏文，佐布晃昭，町田克之，益 一哉，伊藤浩之，山根大輔
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2015-256285
  • Filing Date: 2015-12-28