| Project/Area Number |
15K17453
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Nano/Microsystems
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
Yamane Daisuke 東京工業大学, 科学技術創成研究院, 助教 (70634096)
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| Co-Investigator(Renkei-kenkyūsha) |
MASU Kazuya 東京工業大学, 科学技術創成研究院, 教授 (20157192)
MACHIDA Katsuyuki 東京工業大学, 科学技術創成研究院, 特任教授 (90597676)
SONE Masato 東京工業大学, 科学技術創成研究院, 教授 (30323752)
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2017: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
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| Keywords | ナノG / 加速度 / MEMS / ナノマイクロセンサ / 金 / 金合金 / 結晶 / 金めっき / ナノ結晶 / 電解めっき / 加速度センサ / ノイズ / カンチレバー / 電解金めっき / パルス金めっき |
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| Outline of Final Research Achievements |
Noise of the developed Au-alloy MEMS accelerometer was experimentally evaluated to be below 30 nG/√Hz, and therefore we achieved the target resolution of below 0.1 uG. Long-term vibration test results showed the device functioned even after 10^6 vibration cycles that would usually cause fatigue in metal materials. Temperature test results exhibited the device survived after temperature change from -50 ℃ to 100 ℃. Furthermore, we developed a sensing module with the fabricated MEMS device and demonstrated acceleration sensing on human body. In terms of mechanical strength of Au-alloy, we successfully developed an Au-alloy material with the yield strength of above the target value (1 GPa). In conclusion, the developed Au-alloy device has a promising potential to detect nano-G.
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