Sound velocity, refractive index, and thickness measurement of thin films below room temperature.
Project/Area Number |
15K17938
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Research Category |
Grant-in-Aid for Young Scientists (B)
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Allocation Type | Multi-year Fund |
Research Field |
Materials/Mechanics of materials
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Research Institution | Osaka University |
Principal Investigator |
Nagakubo Akira 大阪大学, 基礎工学研究科, 特任助教(常勤) (70751113)
|
Project Period (FY) |
2015-04-01 – 2017-03-31
|
Project Status |
Completed (Fiscal Year 2016)
|
Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2016: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
|
Keywords | 音速 / 薄膜 / 温度依存性 / レーザー超音波 / GHz / ナノ薄膜 / 弾性率 / 低温 / 圧電体 / 酸化物 / 屈折率 |
Outline of Final Research Achievements |
In this study, I have developed a method to accurately measure the sound velocity of functional materials, which are widely used in wireless communication devices such as cell phone. Using home built optics, I succeeded in observing ultrasound propagations in micro-order films with two different incident angle, which enable me to measure the sound velocity, refractive index, and film thickness of the film at the same time. Furthermore, I have measured the temperature dependence of acoustic properties of functional materials such as AlN and diamond. These results contribute to device design and give many important knowledge for material science.
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Report
(3 results)
Research Products
(8 results)