| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2017: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2016: ¥390,000 (Direct Cost: ¥300,000、Indirect Cost: ¥90,000)
Fiscal Year 2015: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
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| Outline of Final Research Achievements |
This study aims to measure the changes of electrical and thermal properties of metal film when exposuring to hydrogen gas. Also, the feasibility of developing a hydrogen sensor by using the "micro-beam" metal film is discussed based on the measurement results. We developed a gas supplying system using a handmade vacuum chamber. We also fabricated a platinum film MEMS sensor on a silicon substrate across a trench. We examined the effects of exposuring of time to the hydrogen gas, gas pressure and measurement temperature on the electrical-thermal properties of platinum film MEMS sensor. The electrical resistance of the sensor in hydrogen gas was 3 % smaller than the original value. Furthermore, the decrease of electrical resistance was irreversible.
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