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Effects of hydrogen gas on the electrical and thermal properties of metal film

Research Project

Project/Area Number 15K17989
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Thermal engineering
Research InstitutionKyushu University

Principal Investigator

FUKUNAGA Takanobu  九州大学, 工学研究院, 技術職員 (60591196)

Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2017: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2016: ¥390,000 (Direct Cost: ¥300,000、Indirect Cost: ¥90,000)
Fiscal Year 2015: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywords水素検知器 / MEMSセンサ / 白金薄膜 / デバイス開発 / 水素センサ / 常温駆動形 / MEMS / 水素漏洩検知器
Outline of Final Research Achievements

This study aims to measure the changes of electrical and thermal properties of metal film when exposuring to hydrogen gas. Also, the feasibility of developing a hydrogen sensor by using the "micro-beam" metal film is discussed based on the measurement results. We developed a gas supplying system using a handmade vacuum chamber. We also fabricated a platinum film MEMS sensor on a silicon substrate across a trench. We examined the effects of exposuring of time to the hydrogen gas, gas pressure and measurement temperature on the electrical-thermal properties of platinum film MEMS sensor. The electrical resistance of the sensor in hydrogen gas was 3 % smaller than the original value. Furthermore, the decrease of electrical resistance was irreversible.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (1 results)

All 2018

All Presentation (1 results)

  • [Presentation] マイクロビーム型MEMSセンサを用いた水素検知器の開発2018

    • Author(s)
      福永鷹信
    • Organizer
      九州大学 技術発表会
    • Related Report
      2017 Annual Research Report

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Published: 2015-04-16   Modified: 2019-03-29  

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