Effects of hydrogen gas on the electrical and thermal properties of metal film
Project/Area Number |
15K17989
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Research Category |
Grant-in-Aid for Young Scientists (B)
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Allocation Type | Multi-year Fund |
Research Field |
Thermal engineering
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Research Institution | Kyushu University |
Principal Investigator |
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Project Period (FY) |
2015-04-01 – 2018-03-31
|
Project Status |
Completed (Fiscal Year 2017)
|
Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2017: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2016: ¥390,000 (Direct Cost: ¥300,000、Indirect Cost: ¥90,000)
Fiscal Year 2015: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
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Keywords | 水素検知器 / MEMSセンサ / 白金薄膜 / デバイス開発 / 水素センサ / 常温駆動形 / MEMS / 水素漏洩検知器 |
Outline of Final Research Achievements |
This study aims to measure the changes of electrical and thermal properties of metal film when exposuring to hydrogen gas. Also, the feasibility of developing a hydrogen sensor by using the "micro-beam" metal film is discussed based on the measurement results. We developed a gas supplying system using a handmade vacuum chamber. We also fabricated a platinum film MEMS sensor on a silicon substrate across a trench. We examined the effects of exposuring of time to the hydrogen gas, gas pressure and measurement temperature on the electrical-thermal properties of platinum film MEMS sensor. The electrical resistance of the sensor in hydrogen gas was 3 % smaller than the original value. Furthermore, the decrease of electrical resistance was irreversible.
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Report
(4 results)
Research Products
(1 results)