Development of pizoelectric micromachined ultrasonic transducer array using epitaxila PZT thin films on Si substrates
Project/Area Number |
15K18050
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Research Category |
Grant-in-Aid for Young Scientists (B)
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Allocation Type | Multi-year Fund |
Research Field |
Electron device/Electronic equipment
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Research Institution | Toyohashi University of Technology |
Principal Investigator |
Akai Daisuke 豊橋技術科学大学, エレクトロニクス先端融合研究所, 助教 (50378246)
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Project Period (FY) |
2015-04-01 – 2017-03-31
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Project Status |
Completed (Fiscal Year 2016)
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Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2016: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2015: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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Keywords | 超音波トランスデューサ / pMUTアレイ / 超音波ビーム / 圧電薄膜 / pMUT / アニュラーアレイ / 振動解析 |
Outline of Final Research Achievements |
We have proposed piezoelectric micromachined ultrasonic transducers (pMUTs) annular array using γ-Al2O3 thin films as an epitaxial buffer layer on Si substrates for obtaining epitaxial Pb(Zr,Ti)O3 (PZT) thin films. Ultrasonic pressure and -6dB beamwidth at 5 mm of the 4 channel pMUT annular array were exhibited 10 times larger and sharper than the single pMUT. These experimental results good agree with analysis results. It will be applied to design miniature 2-D pMUTs array ultrasonic probe.
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Report
(3 results)
Research Products
(4 results)