Development of pizoelectric micromachined ultrasonic transducer array using epitaxila PZT thin films on Si substrates

• Project/Area Number: 15K18050
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Electron device/Electronic equipment
• Research Institution: Toyohashi University of Technology
• Principal Investigator: Akai Daisuke 豊橋技術科学大学, エレクトロニクス先端融合研究所, 助教 (50378246)
• Project Period (FY): 2015-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2016: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000); Fiscal Year 2015: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
• Keywords: 超音波トランスデューサ / pMUTアレイ / 超音波ビーム / 圧電薄膜 / pMUT / アニュラーアレイ / 振動解析

Outline of Final Research Achievements

We have proposed piezoelectric micromachined ultrasonic transducers (pMUTs) annular array using γ-Al2O3 thin films as an epitaxial buffer layer on Si substrates for obtaining epitaxial Pb(Zr,Ti)O3 (PZT) thin films. Ultrasonic pressure and -6dB beamwidth at 5 mm of the 4 channel pMUT annular array were exhibited 10 times larger and sharper than the single pMUT. These experimental results good agree with analysis results. It will be applied to design miniature 2-D pMUTs array ultrasonic probe.

Research Products

• [Presentation] Structural Investigation of Piezoelectric Layer and Electrode Layer for Circular Piezoelectric Micromachined Ultrasonic Transducers (2016)
  • Author(s): Daisuke Akai, Hongqu Yu, Takeo Katori, and Makoto Ishida
  • Organizer: APCOT2016
  • Place of Presentation: 金沢文化ホール(石川県金沢市)
  • Year and Date: 2016-06-26
  • Int'l Joint Research
• [Presentation] UNDERWATER OBSERVATION OF VIBRATION BEHAVIOR OF THE MINIATURE CIRCULAR PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS (2015)
  • Author(s): Daisuke Akai, Daisuke Takashima, and Makoto Ishida
  • Organizer: 2015 IEEE Sensors
  • Place of Presentation: Busan, South Korea
  • Year and Date: 2015-11-01
  • Int'l Joint Research
• [Presentation] 圧電駆動型超音波トランスデューサのダイアフラム直径変更による受信感度および共振周波数への影響 (2015)
  • Author(s): 鹿取 丈朗 ，高島 大輔，赤井 大輔，石田 誠
  • Organizer: 第31回センサ・マイクロマシンと応用システムシンポジウム
  • Place of Presentation: 新潟県新潟市
  • Year and Date: 2015-10-28
• [Remarks]
  • URL: http://www.vbl.tut.ac.jp/akai/index.html