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Fabrication of Lithium Niobate waveguides using ultra-precision ductile-mode cutting method

Research Project

Project/Area Number 15K18055
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Electron device/Electronic equipment
Research InstitutionKyushu University

Principal Investigator

Takigawa Ryo  九州大学, システム情報科学研究院, 助教 (80706846)

Project Period (FY) 2015-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2015: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords低損失光導波路 / ナノ・マイクロ加工 / 大気中異種材料低温接合 / 切削加工 / 強い光閉じ込め導波路 / 大気中異種材料接合 / 光導波路 / 異種材料接合
Outline of Final Research Achievements

Lithium Niobate (LiNbO3, LN)) crystal is a promising photonic material because of its excellent electro-optical and nonlinear optical effects. In this study, we introduces the application of ultra-precision ductile-mode cutting method to the fabrication of strongly confined LN ridged waveguides. As the result, ridged waveguides with ultra-smooth sidewalls (RMS: < 5 nm) were obtained in LN crystals. In addition, we demonstrated preparation of bonded LN thin films on Si substrates by transfer bonding in air for LN/Si hybrid photonic devices.

Report

(3 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • Research Products

    (9 results)

All 2017 2016 2015

All Journal Article (4 results) (of which Peer Reviewed: 3 results,  Acknowledgement Compliant: 4 results) Presentation (5 results) (of which Int'l Joint Research: 4 results,  Invited: 2 results)

  • [Journal Article] Investigation of the bonding interface of LiNbO3 and Si wafers bonded by laser irradiation2017

    • Author(s)
      Ryo Takigawa, Hiroki kawano, Hiroshi Ikenoue, and Tanemasa Asano
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 印刷中

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Demonstration of ultraprecision ductile-mode cutting for lithium niobate microring waveguides2016

    • Author(s)
      Ryo Takigawa, Eiji Higurashi, Testuya Kawanishi, and Tanemasa Asano
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 11 Pages: 110304-110304

    • DOI

      10.7567/jjap.55.110304

    • NAID

      210000147210

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Bonding of lithium niobate to silicon in ambient air using laser irradiation2016

    • Author(s)
      Hiroki kawano, Ryo Takigawa, Hiroshi Ikenoue, and Tanemasa Asano
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 8S3 Pages: 08RB09-08RB09

    • DOI

      10.7567/jjap.55.08rb09

    • NAID

      210000147023

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] 強誘電体材料の切削加工によるリッジ型光導波路2015

    • Author(s)
      多喜川 良
    • Journal Title

      MICROOPTICS NEWS

      Volume: 33 Pages: 31-36

    • Related Report
      2015 Research-status Report
    • Acknowledgement Compliant
  • [Presentation] Surface activated wafer bonding of LiNbO3 and SiO2/Si for LNOI on Si2017

    • Author(s)
      Ryo Takigawa, Eiji Higurashi, Tanemasa Asano
    • Organizer
      2017 5th International Workshop on Low Temperature Bonding for 3D Integration LTB-3D 2017
    • Place of Presentation
      The University of Tokyo, Tokyo, Japan
    • Year and Date
      2017-05-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Demonstration of strongly confined optical waveguides using ultra-precision ductile-mode cutting2017

    • Author(s)
      Ryo Takigawa
    • Organizer
      The 5th Joint Conference of Research Center for Advanced Biomechanics & Japan Institute of Electronics Packaging Kyushu Branch
    • Place of Presentation
      Kyushu University, Fukuoka, Japan
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] LiNbO3/Si hybrid wafer bonded in ambient air using laser irradiation2016

    • Author(s)
      Ryo Takigawa, Hiroki Kawano, Hiroshi Ikenoue, and Tanemasa Asano
    • Organizer
      29th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      ANA Crowne Plaza Kyoto, Kyoto, Japan
    • Year and Date
      2016-11-08
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Bonding of LiNbO3 thin film on Si substrate using laser irradiation2015

    • Author(s)
      Hiroki Kawano, Ryo Takigawa, Hiroshi Ikenoue, and Tanemasa Asano
    • Organizer
      THE TWENTIETH MICROOPTICS CONFERENCE
    • Place of Presentation
      Fukuoka、Japan
    • Year and Date
      2015-10-25
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] 強誘電体材料の切削加工によるリッジ型光導波路2015

    • Author(s)
      多喜川 良
    • Organizer
      応用物理学会 微小光学研究会「材料を創る・活かす-適材適所の微小光学-」
    • Place of Presentation
      東京
    • Year and Date
      2015-05-26
    • Related Report
      2015 Research-status Report
    • Invited

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Published: 2015-04-16   Modified: 2018-03-22  

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