Fabrication of Lithium Niobate waveguides using ultra-precision ductile-mode cutting method
| Project/Area Number |
15K18055
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Kyushu University |
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Principal Investigator |
Takigawa Ryo 九州大学, システム情報科学研究院, 助教 (80706846)
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| Project Period (FY) |
2015-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2015: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | 低損失光導波路 / ナノ・マイクロ加工 / 大気中異種材料低温接合 / 切削加工 / 強い光閉じ込め導波路 / 大気中異種材料接合 / 光導波路 / 異種材料接合 |
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| Outline of Final Research Achievements |
Lithium Niobate (LiNbO3, LN)) crystal is a promising photonic material because of its excellent electro-optical and nonlinear optical effects. In this study, we introduces the application of ultra-precision ductile-mode cutting method to the fabrication of strongly confined LN ridged waveguides. As the result, ridged waveguides with ultra-smooth sidewalls (RMS: < 5 nm) were obtained in LN crystals. In addition, we demonstrated preparation of bonded LN thin films on Si substrates by transfer bonding in air for LN/Si hybrid photonic devices.
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Report
(3 results)
Research Products
(9 results)
