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Research on Radiation-Hardened CMOS Integrated Circuits using Wide Bandgap SiC Semiconductor(Fostering Joint International Research)

Research Project

Project/Area Number 15KK0240
Research Category

Fund for the Promotion of Joint International Research (Fostering Joint International Research)

Allocation TypeMulti-year Fund
Research Field Electron device/Electronic equipment
Research InstitutionHiroshima University

Principal Investigator

Kuroki Shin-Ichiro  広島大学, ナノデバイス・バイオ融合科学研究所, 准教授 (70400281)

Research Collaborator Zetterling Carl-Mikael  KTH Royal Institute of Technology, School of Information and Communication Technology, Prof.
Östling Mikael  スウェーデン王立工科大学, School of Information and Communication Technology, Prof.
Project Period (FY) 2016 – 2017
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥14,170,000 (Direct Cost: ¥10,900,000、Indirect Cost: ¥3,270,000)
Keywords極限環境エレクトロニクス / シリコンカーバイド / CMOS集積回路 / MOSFETs / 耐放射線 / 高温動作 / 廃炉技術 / 耐高温動作 / MOSFET / 耐放射線デバイス / 耐高温デバイス
Outline of Final Research Achievements

For the decommissioning of the Fukushima Daiichi Nuclear Power Plant in Japan, installation of robots has been promoted. However the electronics are mainly consist of conventional silicon integrated circuits, which is vulnerable to radiation. And then the electronics limits the operation time for the decommissioning. For the radiation hardened electronics, we need to apply other semiconductor with radiation hardness. 4H-SiC semiconductor is one of the candidates for such a material. In this research project, we promoted research and developments on 4H-SiC MOSFET devices and integrated circuits, research for high performance, and for harsh environment applications, under the international collaboration.

Report

(3 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • Research Products

    (29 results)

All 2018 2017 2016

All Int'l Joint Research (1 results) Journal Article (7 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 7 results,  Acknowledgement Compliant: 3 results,  Open Access: 2 results) Presentation (20 results) (of which Int'l Joint Research: 10 results,  Invited: 3 results) Funded Workshop (1 results)

  • [Int'l Joint Research] スウェーデン王立工科大学(スウェーデン)2016

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Formation of epitaxial Ti-Si-C Ohmic contact on 4H-SiC C face using pulsed-laser annealing2017

    • Author(s)
      Milantha De Silva, Teruhisa Kawasaki, Takamichi Miyazaki, Tomoyuki Koganezawa, Satoshi Yasuno, and Shin-Ichiro Kuroki
    • Journal Title

      Appl. Phys. Lett.

      Volume: 110 Issue: 25 Pages: 2521081-2521085

    • DOI

      10.1063/1.4987136

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 4H-SiC Pseudo-CMOS Logic Inverters for Harsh Environment Electronics2017

    • Author(s)
      S-I. Kuroki, T. Kurose, H. Nagatsuma, S. Ishikawa, T. Maeda, H. Sezaki, T. Kikkawa, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Journal Title

      Mat. Sci. Forum

      Volume: 897 Pages: 669-672

    • Related Report
      2017 Annual Research Report 2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Low Resistance Ti-Si-C Ohmic Contacts for 4H-SiC Power Devices Using Laser Annealing2017

    • Author(s)
      Milantha De Silva, Teruhisa Kawasaki, Takamaro Kikkawa, and Shin-Ichiro Kuroki
    • Journal Title

      Mat. Sci. Forum

      Volume: 897 Pages: 399-402

    • Related Report
      2017 Annual Research Report 2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] Enhanced-Oxidation and Interface Modification on 4H-SiC(0001) Substrate Using Alkaline Earth Metal2017

    • Author(s)
      Kosuke Muraoka, Hiroshi Sezaki, Seiji Ishikawa, Tomonori Maeda, Tadashi Sato, Takamaro Kikkawa, and Shin-Ichiro Kuroki
    • Journal Title

      Mat. Sci. Forum

      Volume: 897 Pages: 348-351

    • Related Report
      2017 Annual Research Report 2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] High Gamma Ray Tolerance for 4H-SiC Bipolar Circuits2017

    • Author(s)
      S. S. Suvanam, S-I. Kuroki, L. Lanni, R. Hadayati, T. Ohshima, T. Makino, A. Hallen, C.-M. Zetterling
    • Journal Title

      IEEE Transactions on Nuclear Science

      Volume: 64 Issue: 2 Pages: 852-858

    • DOI

      10.1109/tns.2016.2642899

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Formation of amorphous alloys on 4H-SiC with NbNi film using pulsed-laser annealing2016

    • Author(s)
      Milantha De Silva,Seiji Ishikawa, Takamichi Miyazaki, Takamaro Kikkawa,and Shin-Ichiro Kuroki
    • Journal Title

      Applied Physics Letters

      Volume: 109 Issue: 1

    • DOI

      10.1063/1.4955406

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Characterization of Grapho-Silicidation on n+ 4H-SiC C-Face for Back Side Ohmic Contacts of Power Devices2016

    • Author(s)
      Milantha De Silva,Tomonori Maeda, Seiji Ishikawa,Hiroshi Sezaki, Takamichi Miyazaki, Takamaro Kikkawa, and Shin-Ichiro Kuroki
    • Journal Title

      ECS Journal of Solid State Science and Technology

      Volume: 5 Pages: 457-460

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] 極限環境応用に向けた4H-Si C上Ni /Nbオーミックコンタクトの高温信頼性2018

    • Author(s)
      ヴォーン ヴァン クォン、石川 誠治、瀬崎 洋、前田 知徳、小金澤 智之、安野 聡、宮崎 孝道、黒木 伸一郎
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 高周波CMOSインバータに向けた4H-Si CトレンチpMOSFETsの研究2018

    • Author(s)
      井上 純、黒木 伸一郎、石川 誠治、前田 知徳、瀬崎 洋、牧野 高紘、大島 武、Mikael Ostling、Carl -Mikael Zetterling
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Research on 4H-SiC pMOSFETs with NbNi silicide2017

    • Author(s)
      Jun Kajihara, Shin-Ichiro Kuroki, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki,Takamaro Kikkawa, Takahiro Makino, Takeshi Oshima, M. Ostling, and C.-M. Zetterling
    • Organizer
      The 64th JSAP Spring Meeting
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Effects of surface etching with CF4 on 4H-SiC MOS Capacitors2017

    • Author(s)
      Kiichi Kobayakawa, Kousuke Muraoka, Hiroshi Sezaki, Seiji Ishikawa, Tomonori Maeda,Takamaro Kikkawa, Shin-Ichiro Kuroki
    • Organizer
      The 64th JSAP Spring Meeting
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Improvements of 4H-SiC MOS interface with barium2017

    • Author(s)
      Kousuke Muraoka, Hiroshi Sezaki, Seiji Ishikawa, Tomonori Maeda, Takamaro Kikkawa, Shin-Ichiro Kuroki
    • Organizer
      The 64th JSAP Spring Meeting
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Ti-Si-C Ohmic contact formation by laser annealing on n+ 4H-SiC C face2017

    • Author(s)
      Milantha De Silva, Teruhisa Kawasaki, Takamaro Kikkawa, and Shin-Ichiro Kuroki
    • Organizer
      The 64th JSAP Spring Meeting
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] 4H-SiC MOSFETs and Logic Inverters for Harsh Environment Electronics2017

    • Author(s)
      Shin-Ichiro Kuroki
    • Organizer
      19th Takayanagi Kenjiro Memorial Symposium
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 4H-SiC pMOSFETs with Al-doped S/D and NbNi silicide ohmic contacts2017

    • Author(s)
      J. Kajihara, S-I. Kuroki, S. Ishikawa, T. Maeda, H. Sezaki, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2017 (ICSCRM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Low-parasitic-capacitance self-aligned 4H-SiC nMOSFETs for harsh environment electronics2017

    • Author(s)
      T. Kurose, S.-I. Kuroki, S. Ishikawa, T. Maeda, H. Sezaki, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2017 (ICSCRM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Correlation between field effect mobility and accumulation conductance at 4H-SiC MOS interface with barium2017

    • Author(s)
      K. Muraoka, S. Ishikawa, H. Sezaki, T. Maeda, and S.-I. Kuroki
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2017 (ICSCRM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of CF4 surface etching on 4H-SiC MOS Capacitors2017

    • Author(s)
      K. Kobayakawa, K. Muraoka, H. Sezaki, S. Ishikawa,T. Maeda, and S.-I. Kuroki
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2017 (ICSCRM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electrical properties of Ti-Si-C Ohmic contact on ion-implanted n-type 4H-SiC C face2017

    • Author(s)
      Milantha De Silva, Teruhisa Kawasaki, and Shin-Ichiro Kuroki
    • Organizer
      International Conference on Silicon Carbide and Related Materials 2017 (ICSCRM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 4H-SiC pMOSFETsの高温特性及びガンマ線曝露効果2017

    • Author(s)
      梶原純, 黒木伸一郎, 瀬崎洋, 石川誠治,前田知徳, 牧野高紘, 大島武, Mi kael Ostling, and Carl -Mikael Zetterling
    • Organizer
      応用物理学会 先進パワー半導体分科会 第4回講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 極限環境エレクトロニクスのための4H-SiC nMOSFETs セルフアラインプロセス2017

    • Author(s)
      黒瀬 達也、黒木 伸一郎、石川 誠治、前田 知徳、瀬崎 洋、牧野 高紘、大島 武、Mikael Ostling、Carl -Mikael Zetterling
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 4H-SiC MOSFETs and Logic Inverters for Harsh Environment Electronics2017

    • Author(s)
      Shin-Ichiro Kuroki
    • Organizer
      IEEE Sweden(IEEE米国電気電子学会スウェーデン支部)
    • Place of Presentation
      Kista, Sweden
    • Related Report
      2016 Research-status Report
    • Invited
  • [Presentation] 4H-SiC Pseudo-CMOS Logic Inverters for Harsh Environment Electronics2016

    • Author(s)
      S.-I. Kuroki, H. Nagatsuma, T. Kurose, S. Ishikawa, T. Maeda, H. Sezaki, T. Kikkawa, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Organizer
      11th European Conference on Silicon Carbide and Related Materials (ECSCRM2016)
    • Place of Presentation
      Halkidiki, Greece
    • Year and Date
      2016-09-26
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Enhanced-oxidation and interface modification on 4H-SiC(0001) substrate using alkaline earth metal2016

    • Author(s)
      K. Muraoka, H. Sezaki, S. Ishikawa, T. Maeda, T. Sato, T. Kikkawa and S-I. Kuroki
    • Organizer
      11th European Conference on Silicon Carbide and Related Materials (ECSCRM2016)
    • Place of Presentation
      Halkidiki, Greece
    • Year and Date
      2016-09-26
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Low resistance Ti-Si-C ohmic contacts for 4H-SiC power devices using Laser annealing2016

    • Author(s)
      Milantha De Silva, Teruhisa Kawasaki, Takamaro Kikkawa, and Shin-Ichiro Kuroki
    • Organizer
      11th European Conference on Silicon Carbide and Related Materials (ECSCRM2016)
    • Place of Presentation
      Halkidiki, Greece
    • Year and Date
      2016-09-26
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Low resistance Ni/Ti multilayer ohmic contact formation by Laser annealing on 4H-SiC C face2016

    • Author(s)
      Milantha De Silva, Teruhisa Kawasaki, Takamaro Kikkawa, and Shin-Ichiro Kuroki
    • Organizer
      The77th JSAP Autumn Meeting
    • Place of Presentation
      新潟市朱鷺メッセ
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] 4H-SiC MOSFETs and Logic Inverters for Radiation-Hardened Electronics2016

    • Author(s)
      Shin-Ichiro Kuroki, Hirofumi Nagatsuma, Tatsuya Kurose, Milantha De Silva, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, Takamaro Kikkawa, Takahiro Makino, Takashi Ohshima, Mikael Ostling, and Carl-Mikael Zetterling
    • Organizer
      International Workshop on Radiation Resistant Sensors and Related Technologies for Nuclear Power Plant Decommissioning (R2SRT2016)(廃炉に向けた耐放射線性センサー及び関連研究に関する国際ワークショップ)
    • Place of Presentation
      福島県いわき市
    • Year and Date
      2016-04-19
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Funded Workshop] International Workshop on Nanodevice Technologies 2017 (IWNT2017)2017

    • Place of Presentation
      広島大学 東広島キャンパス サタケホール
    • Related Report
      2016 Research-status Report

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Published: 2016-10-04   Modified: 2019-03-29  

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