Nano Hand-Eye System for Simultaneous Imaging and Characterization of Nano Objects

• Project/Area Number: 16101004
• Research Category: Grant-in-Aid for Scientific Research (S)
• Allocation Type: Single-year Grants
• Research Field: Microdevices/Nanodevices
• Research Institution: The University of Tokyo
• Principal Investigator: FUJITA Hiroyuki The University of Tokyo, 生産技術研究所, 教授 (90134642)
• Co-Investigator(Kenkyū-buntansha): HASHIGUCHI Gen 静岡大学, 電子工学研究所, 教授 (70314903) ; 安宅 学 (安毛 学) 東京大学, 生産技術研究所, 助手 (80302628) ; 横川 隆司 立命館大学, 理工学部, 講師 (10411216)
• Co-Investigator(Renkei-kenkyūsha): ATAKA Manabu 東京大学, 生産技術研究所, 助手 (80302628) ; YOKOKAWA Ryuji 立命館大学, 理工学部, 講師 (10411216)
• Project Period (FY): 2004 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥114,010,000 (Direct Cost: ¥87,700,000、Indirect Cost: ¥26,310,000); Fiscal Year 2008: ¥16,640,000 (Direct Cost: ¥12,800,000、Indirect Cost: ¥3,840,000); Fiscal Year 2007: ¥16,640,000 (Direct Cost: ¥12,800,000、Indirect Cost: ¥3,840,000); Fiscal Year 2006: ¥22,100,000 (Direct Cost: ¥17,000,000、Indirect Cost: ¥5,100,000); Fiscal Year 2005: ¥22,100,000 (Direct Cost: ¥17,000,000、Indirect Cost: ¥5,100,000); Fiscal Year 2004: ¥36,530,000 (Direct Cost: ¥28,100,000、Indirect Cost: ¥8,430,000)
• Keywords: マイクロマシン / ナノ加工 / ナノワイヤ / 透過電子顕微鏡 / ナノマニピュレーション / 生体分子モータ / ナノマニビュレーション / 生成分子モータ / 半導体微細加工 / トンネル電流 / DNA

Research Abstract

現在大きな注目を浴びているナノテクノロジーに関して、電子顕微鏡でナノサイズの物体を観察しながら、マイクロマシンの超微細ピンセットなどを用いて物体を機械的に操作することに成功した。電気的特性や機械的な強度、変形などを測り、ナノサイズ特有の現象を数多く発見した。例えば、シリコンはマクロサイズでは極めて脆い材料だが、それで作ったナノワイヤを引っ張ると元の長さの20 倍まで伸びる超塑性を示した。

Research Products

• [Journal Article] Real-time transmission electron microscope observation of gold nanoclusters diffusing into silicon at room temperature (2009)
  • Author(s): Tadashi I sh ida, Yuuki Naka jima, Jun ji Endo
  • Journal Title: Dominique Collard and Hiroyuki Fujita, Nanotechnology Vol.20, No.6
  • Peer Reviewed
• [Journal Article] Real-time transmission electron microscope observation of gold mamoclusters diffusing into silicon at room temperature (2009)
  • Author(s): Tadashi Ishida, Yuuki Nakajima, Jumji Endo, Dominique Collard andHurobuki Fujita
  • Journal Title: Nanotechnology Vol.20, No.6
  • Peer Reviewed
• [Journal Article] HAREM : High Aspect Ratio Etching and Metallization for microsystems fabrication (2008)
  • Author(s): E. Sarajlic, C.Yamahata, M. Cordero, D. Collard and H. Fujita
  • Journal Title: Journal of Micromechanics and Microengineering Vol.18, No.7
  • Peer Reviewed
• [Journal Article] Silicon Nanotweezers With Subnano meter Resolution for the Micromanipulation of Biomol eculesChr istophe Yamahata, Dominique Collard, Bernard Legrand, Tetsuya Takekawa (2008)
  • Author(s): Momoko Kumemura, Gen Hashiguchi, Hiroyuki Fujita
  • Journal Title: Journal of Microelectromechanical Systems Vol.17, No.3 Pages: 623-631
  • Peer Reviewed
• [Journal Article] HAREM: High Aspect Ratio Etching and Metallization for microsystems fabrication(Article Number. 075008) (2008)
  • Author(s): E. Sarajlic, C. Yamahata, M. Cordero, D. Collard, and H. Fujita
  • Journal Title: Journal of Micromechanics and Microengineering Vol.18, No.7 Pages: 8-8
  • Peer Reviewed
• [Journal Article] Silicon Nanotweezers With Subnanometer Resolution for the Micromanipulation of Biomolecules (2008)
  • Author(s): Chrisbophe Yamahata, Dommique Collard, Bernard Legrand, Tetsuya Takekawa, Momoko Kumemura, Gen Hashifuchi, and Hiroyuki Fujita
  • Journal Title: Journal of Microelectromechanical Systems Vol.17, NO.3 Pages: 623-631
  • Peer Reviewed
• [Journal Article] FEM Analysis of Mechanical Characteristics of Nano Tweezers with MemsOne (TM) (2008)
  • Author(s): Hirofumi Miura, Junji Some, Dominique Collard, Christophe Yamahata, Hiroyuki Fujita
  • Journal Title: 電気学会論文誌,Eセンサ・マイクロマシン部門誌 Vol.128, No.5 Pages: 252-256
  • Peer Reviewed
• [Journal Article] Humidity Dependence of Charge Transport through DNA Revealed by Silicon-Based Nanotweezers Manipulation (2008)
  • Author(s): Christophs Yamahata, Dominique Collard, Tetsuya Takekawa, Momoko Kumemura, Gen Hashiguchi, and Hiroyuki Fujita
  • Journal Title: Biophysical Journal Vol.94, No.1 Pages: 63-70
  • Peer Reviewed
• [Journal Article] Mechanically Controlled Quantum Contact With On-Chip MEMS Actuator (2007)
  • Author(s): Murat Gel, Tadashi Ishida, Tetsuo Akasaka, Akinori Umeno,Koji Araki,Kaz Hirakawa, Hiroyuki Fujita
  • Journal Title: IEEE Journalof Microelectromechanical Systems Vol.16, No.1 Pages: 1-6
  • Peer Reviewed
• [Journal Article] In situ Visualization of Degradation of Silicon Field Emitter Tips (2007)
  • Author(s): Naoyuki Nozawa, Kuniyuki Kakushima, Gen Hashiguchi, Hiroyuki Fujita
  • Journal Title: IEEJ Transactions on Electrical and Electronic Engineering Vol.2, No.3 Pages: 284-288
  • NAID: 10025771911
  • Peer Reviewed
• [Journal Article] Mechanically Controlled Quantum Contact With On-Chip MEMS Actuator (2007)
  • Author(s): Murat Gel, Tadashi Ishida, Tetsuo Akasaka, Akinori Umeno, Koji Araki, Kaz Hirakawa, and Hiroyuki Fujita
  • Journal Title: Journal of Microelectromechanical Systems Vol.16,No.1 Pages: 1-6
  • Peer Reviewed
• [Journal Article] In situ Visualization of Degradation of Silicon Field Emitter Tips (2007)
  • Author(s): Naoyuki Nozawa, Kuniyuki Kakushima, Gen Hashiguchi, Hiroyuki Fujita
  • Journal Title: IEEJ Transactions on Electrical and Electronic Engineering Vol.20,No.3 Pages: 284-288
  • NAID: 10025771911
  • Peer Reviewed
• [Journal Article] Vacuum, temerature, and time dependencies of field-emission eurrent for RF・MEMS apphcations (2007)
  • Author(s): K Yamashita, W. Sun, B. Charlot, K. Kakushma, H. Fujita, and H. Toshiyoshi
  • Journal Title: Microelectronic Engineering Vol.84,Issue5-8 Pages: 1345-1353
  • Peer Reviewed
• [Journal Article] Rea1-time observation of FIB-created dots and ripples on GaAs (2007)
  • Author(s): F. Rose, H. Fujita and H. Kawakatsu
  • Journal Title: Nanetechnology Vol.19 Pages: 35301-35307
  • Peer Reviewed
• [Journal Article] MEMS方向探針による金ナノコンタクト接近-衝突-引張-破断実験のHRTEM観察と電流測定 (2006)
  • Author(s): 石田忠, 角嶋邦之, 藤田博之
  • Journal Title: 電気学会論文誌E, センサ・マイクロマシン準部門誌 Vol.126, No.9 Pages: 504-509
  • Peer Reviewed
• [Journal Article] Design,Fabrication,and Control of MEMS-Based Actuator Arrays for Air-Flow Distributed Micromanipulation (2006)
  • Author(s): Yamato Fukuta, Yves-Andre Chapuis, Yoshio Mita, Hiroyuki Fujita
  • Journal Title: IEEE Journal of Microelectromechanical Systems,August 2006,vol.15,No4,pp212-226(2006) Vol.15,No4 Pages: 212-226
• [Journal Article] Electromechanical Analysis of a Micromachined Comb-Dive Actuator by Admittance Measurement (2006)
  • Author(s): Kenjiro Ayano, Katuyori Suzuki, Gen Hashiguchi, Hiroyuki Fujita
  • Journal Title: 電気学会論文誌E、センサ・マイクロマシン準部門誌 vol.126,No.7 Pages: 281-285
• [Journal Article] Evolution from MEMS-based Linear Drives to Bio-based Drives (2006)
  • Author(s): Hiroyuki Fujita
  • Journal Title: 電気学会論文誌D(産業応用部門誌)平成18年10月号, IEEEJ Trans.IA vol.126,No.10 Pages: 1314-1318
• [Journal Article] MEMS方向探針による金ナノコンタクト接近-衝突-引張-破断実験のHRTEM観察と電流測定 (2006)
  • Author(s): 石田忠, 角嶋邦之, 藤田博之
  • Journal Title: 電気学会論文誌E,社団法人電気学会,センサ・マイクロマシン準部門誌 vol.126,No.9 Pages: 504-509
• [Journal Article] On-trip syringe pumps for picoliter-scale liquid manipulation (2006)
  • Author(s): Ryuji Yokokawa, Tomohiko Saika, Tetsuya Nakayama, Hiroyuki Fujita, Satoshi Konishi
  • Journal Title: Lab Chip vol.6 Pages: 1062-1066
• [Journal Article] Unidirectional transport of a bead on a single microtubule immobilized in a submicrometre channel (2006)
  • Author(s): R.Yokokawa, Y.Yumi, S.Takeuchi, T.Kon, H.Fujita
  • Journal Title: Nanotechnology vol.17 Pages: 289-294
• [Journal Article] Bulk micromachined tunneling tips integrated with positioning actuators (2005)
  • Author(s): M. Mita, H. Kawara, H. Toshiyoshi, J. Endo, H. Fujita
  • Journal Title: Journal of Microelectromechanical Systems Vol.14 Pages: 23-28
  • Peer Reviewed
• [Journal Article] DNA molecular isolation in nano channel for single molecule trapping between micro electrodes (2005)
  • Author(s): M.Kumemura, K.Tamura, G.Hashiguchi, H.Fujita
  • Journal Title: μ-TAS 2005, Boston, Sept.2005 Pages: 521-523
• [Journal Article] Silicon periodic nano-structures obtained by laser exposure of nano-wires (2005)
  • Author(s): K.Kakushima, T.Bourouina, T.Sarnet, G.Kerrien, D.Debarre, J.Boulmer, H.Fujita
  • Journal Title: Microelectronics Journal Vol.36 Pages: 629-633
• [Journal Article] A LATERAL FIELD-EMISSION RF MEMS DEVICE (2005)
  • Author(s): Kiyotaka Yamashita, Winston Sun, Kuniyuki Kakushima, Hiroyuki Fujita, Hiroshi Toshiyoshi
  • Journal Title: Proc.13th Int.Conf.on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5-9,2005, Seoul, Korea Pages: 1096-1099
• [Journal Article] Real Time Observation of Micromachined Field Emission Tip using Transmission Electron Microscope (2005)
  • Author(s): Kakushima, G.Hashiguchi, M.Ataka, H.Toshiyoshi, H.Fujita
  • Journal Title: Proc.13th Int.Conf.on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5-9,2005, Seoul, Korea Pages: 867-870
• [Journal Article] An RF-MEMS Device with a Lateral Field-Emission Detector (2005)
  • Author(s): Kiyotaka Yamashita, Winston Sun, Kuniyuki Kakushima, Hiroyuki Fujita, Hiroshi Toshiyoshi
  • Journal Title: The 18th Int.Vacuum Nanoelectronics Conference (IVNC 2005), 10-14 July 2005, Oxford, UK. Pages: 29-30
• [Journal Article] Controllable Nano-gap Mechanism for Characterization of Nanoscale Objects (2005)
  • Author(s): Gel M, Edura T, Wada Y, Fujita H
  • Journal Title: Proceedings of Micro TAS 2005, Boston, Sept.2005 Pages: 739-741
• [Journal Article] Bulk Micromachined Tunneling Tips Integrated With Positioning Actuators (2005)
  • Author(s): M.Mita, H.Kawara, H.Toshiyoshi, I.Endo, H.Fujita
  • Journal Title: Joumal of Microelectromechanical Systems vol.14,no.1 Pages: 23-28
• [Journal Article] TEM Observation of Tensile Deformation of Silicon Nanowire between Micromachined Sharp Opposing Tips (2005)
  • Author(s): T.Isbida, K.Kakushima, M.Mita, H.Fujita
  • Journal Title: Proceedings IEEE of the 18th Annual International Conference on 2005 (MEMS 2005) Miami, USA, Jan 30-Feb 3, 2005 Pages: 879-879
• [Journal Article] パラレルAFMリソグラフィー用カンチレバーの製作 (2004)
  • Author(s): 角嶋邦之, 渡邉稔之, 島本浩司, 合田拓史.安宅学, 三村秀典, 磯野吉正, 橋原口, 三原豊, 藤田博之
  • Journal Title: 電気学会論文誌E, センサ・マイクロマシン準部門誌 Vol.124.No.7 Pages: 248-254
  • NAID: 10013268487
  • Peer Reviewed
• [Journal Article] Atomic Force Microscope Cantilever Array for Par allel Lithography of Quantum Devices (2004)
  • Author(s): Kuniyuki Kakushima, Toshiyuki Watanabe, Kouji Shimamoto, Takushi Gouda, Manabu Ataka, Hidenori Mimura, Yoshimasa Isono, GenHashiguchi, Yutaka Mihara, Hiroyuki Fujita
  • Journal Title: Japanese Journal of Applied Physics Vol.43, No.6B Pages: 4041-4044
  • NAID: 10013276597
  • Peer Reviewed
• [Journal Article] Current Measurement of Mechanically Stretched Nanowire with Transmission Electron Microscope Direct Observation (2004)
  • Author(s): T.Ishida, K.Kakushima, H.Fujita
  • Journal Title: 2004 International Microprocess and Nanotechnology Conference, Hotel Hankyu Expo Park. Japan. Oct 27-29.2004 Pages: 154-154
• [Journal Article] Handling of DNA Molecules by MEMS Tweezers (2004)
  • Author(s): K.Kakushima, G.Hashiguchi, K.Tamura, H.Fujita
  • Journal Title: KIMM-EPFL IIS Joint Workshop On Micro/Nano System and Process Development. Oct. 11-12. 2004 Pages: 3-6
• [Journal Article] Batch bulk-micromachined high-precision metal-on-insulator microspires and their application to scanning tunneling microscopy (2004)
  • Author(s): D.Kobayashi, Y.Mita, T.Shibata, T.Bourouina, H.Fujita
  • Journal Title: Journal of Micromechanics and Microengineering (JMM) vol.14
• [Presentation] Mechanical Characterization of Biomolecules in Liquid Using Silicon Tweezers with Subnanonewton Resolution (2009)
  • Author(s): C. Yamahata, E. Sarajlic, L. Jalabdrt, M. Kumemura, D. Collard and H. Fujita
  • Organizer: 22nd IEEE International Conference on Micro Electro Mechanical
  • Place of Presentation: Sorrento Italy
  • Year and Date: 2009-01-29
• [Presentation] Building Nano Transport System by Relocation Single Microtubule by Motor Proteins (2009)
  • Author(s): M. Cagatay Tarhan, Ryuji Yokokawa, Celine Bottier, Dominique Collard, and Hiroyuki Fujita
  • Organizer: The 9th Seoul National University-University of Tokyo Joint Seminar on Electrical Engineering
  • Place of Presentation: 東京
  • Year and Date: 2009-01-09
• [Presentation] Trapping and characterization of gelatin with nanotweezers (2008)
  • Author(s): M. Kumemura, D. Collard, C. Yamahata, M. Hosogi, G. Hashiguchi, and H. Fujita
  • Organizer: IUMRS International Conference in Asia
  • Place of Presentation: 名古屋
  • Year and Date: 2008-12-09
• [Presentation] Molecules manipulation and characterization with MEMS tools (2008)
  • Author(s): D. Collard, C. Yamahata, M. Kumemura, H. Fujita
  • Organizer: Japan-Taiwan Symposium on nano bio research
  • Place of Presentation: Tokyo Japan
  • Year and Date: 2008-10-27
• [Presentation] In Situ TEM Observation of Structural Change in Contact-Growth-Retracittion-Fracture Process of Pt Nano Wite (2008)
  • Author(s): Haruki Shoji, Tadashi Ishida, Hiroyuki Fujita
  • Organizer: the 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems
  • Place of Presentation: 沖縄
  • Year and Date: 2008-10-24
• [Presentation] Isolation of single DNA molecule in a picolitre-sized droplet formed by Liquid Dielectrophoresis (2008)
  • Author(s): B. Wee, M. Kumemura, D. Collard, H. Fujita
  • Organizer: The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2008 (uTAS2008)
  • Place of Presentation: San Diego, CA, USA
  • Year and Date: 2008-10-12
• [Presentation] Isolation and Manipulation of Single Microtubule by Silicon Microtweezers (2008)
  • Author(s): M. C. Tarhan, D. Collard, Bottier, R. .Yokokawa, M. Hosogi, G. Hashiguchi and H. Fujita
  • Organizer: The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS'08
  • Place of Presentation: San Diego, CA, USA
  • Year and Date: 2008-10-12
• [Presentation] Modulation And Detection OF Field-Emission Current By Using MEMS Resonator For Application To RF-MEMS Band-Pass Filters (2008)
  • Author(s): K. Yamashita, B. Charlot, W. Sun, K. Kakushima, H. Fujita and H. Toshiyoshii
  • Organizer: The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies(APCOT2008)
  • Place of Presentation: Taian, Taiwan
  • Year and Date: 2008-06-23
• [Presentation] 金対シリコン対向探針を用いたシリコン表面への金ナノクラスターのTEM内散布方法 (2008)
  • Author(s): 石田忠, 仲島祐樹, 藤田博之
  • Organizer: センサ・マイクロマシン部門綜合研究会
  • Place of Presentation: 東北大学
  • Year and Date: 2008-06-12
• [Presentation] Superplasticity of Silicon Nanocontact during Tensile Test under TEM Observation (2008)
  • Author(s): T. Ishida and H. Fujita
  • Organizer: The forth International Nanotechnology Conference on Communication and Cooperation
  • Place of Presentation: 東京
  • Year and Date: 2008-04-14
• [Presentation] Trapping and characterization of gelatin with nanotweezers (2008)
  • Author(s): M. Kumemura, D. Collard, C. Yamahata, M. Hosogi, G. Hashiguchi, and H. Fujita
  • Organizer: IUMRS International Conference in Asia
  • Place of Presentation: Nagoya, Japan
• [Presentation] In-situ tem observatioR of crystal-facet-dependent self-rearrange gold atolns under tensie stress contmlled by MEMS nanoprobe positioned (2007)
  • Author(s): Tadashi lshida, Kuniyuki Kakushima, Makoto Mita, Hhroshi Tibshiyoshi, and Hiroyuki Fujita
  • Organizer: the 14th international conference on sohd-state sensors, actuators and microsystems(Transducers07)
  • Place of Presentation: Lyon,France
  • Year and Date: 2007-06-12
• [Presentation] In - Situ TEMObservation Of Crystal-Facet-Dependent Self-Rearranging Gold Atoms Under Tensile Stress Controlled By MEMS Nsnoprobe Positioner (2007)
  • Author(s): Tadashi Ishida, Kuniyuki Kakushima, Makoto Mita, Hiroshi Toshiyoshi, Hiroyuki Fujita
  • Organizer: the 14th International Conference on Solid-state Sensors, Actuators and Microsystems (Transducers '07)
  • Place of Presentation: Lyon, France
• [Presentation] MEMS fbr Bio Molecular Handhng,characterization and Utilization (2007)
  • Author(s): Hliroyuki Fujita
  • Organizer: CNSI-CNBI Symposium on NanoBiotechnology
  • Place of Presentation: CNSI Auditorium,UCLA
• [Patent(Industrial Property Rights)] 蛍光顕微鏡様全反射バイオチップ及びその製法、並びに蛍光顕微鏡用全反射バイオチップアセンブリ (2008)
  • Inventor(s): 杉山進, 横川隆司, ジョン・シー・ウェルズ, ナム・カオ・ホアイ・レ, ズン・ベト・ダオ
  • Industrial Property Rights Holder: 学校法人立命館
  • Industrial Property Number: 2008-119835
  • Filing Date: 2008-05-01
• [Patent(Industrial Property Rights)] 表面特性解析装置、表面特性解析方法およびプローブユニット (2006)
  • Inventor(s): 藤田博之, 橋口原
  • Industrial Property Rights Holder: 国立大学法人香川大学、国立大学法人東京大学
  • Industrial Property Number: 2006-270618
  • Filing Date: 2006-10-02