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Synthesis of metal encapsulated Si clusters and its application to formation of interfacial nanostructures

Research Project

Project/Area Number 16201026
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Nanomaterials/Nanobioscience
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

KANAYAMA Toshihiko  National Institute of Advanced Industrial Science and Technology, Advanced Semiconductor Research Center, Deputy Director, 次世代半導体研究センター, 副研究センター長 (70356799)

Co-Investigator(Kenkyū-buntansha) TADA Tetsuya  National Institute of Advanced Industrial Science and Technology, Advanced Semiconductor Research Center, Senior Researcher, 次世代半導体研究センター, 主任研究員 (40188248)
MIYAZAKI Takehide  National Institute of Advanced Industrial Science and Technology, Research Institute for Computational Sciences, Senior Researcher, 計算科学研究部門, 主任研究員 (10212242)
日浦 英文  日本電気株式会社, 基礎・環境研究所, 主任研究員
Project Period (FY) 2004 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥48,100,000 (Direct Cost: ¥37,000,000、Indirect Cost: ¥11,100,000)
Fiscal Year 2006: ¥12,610,000 (Direct Cost: ¥9,700,000、Indirect Cost: ¥2,910,000)
Fiscal Year 2005: ¥14,690,000 (Direct Cost: ¥11,300,000、Indirect Cost: ¥3,390,000)
Fiscal Year 2004: ¥20,800,000 (Direct Cost: ¥16,000,000、Indirect Cost: ¥4,800,000)
Keywordssurface and interface / atomic process / scanning tunneling microscopy / nano-materials / electronic materials / 遷移金属内包シリコンクラスター / 走査トンネル顕微鏡 / 第一原理計算 / 走査トンネルスペクトル / シリコン表面 / イオントラップ / 電荷移動型ドーピング / カーボンナノチューブトランジスタ / 反転層形成
Research Abstract

The objective of this research project is to investigate the possibility of a cage cluster composed of 12 Si atoms encapsulating a transition metal atom M, MSi_<12> as a building block of nanostructures on surfaces or interfaces of Si. We obtained the following achievements.
1. We have developed a multi-pole ion trap for synthesis of clusters with a specific atomic composition. This trap consists of 36 pole electrodes arranged in a square lattice surrounded by a cage electrode, and has the ability to confine ions with a wide range of mass values and extract efficiently ions having a mass larger than a specific value.
2. Our ab-initio calculations demonstrated that the structural stability of the MSi_<12> cluster originates in the efficient covalent bonding of the central M atom with the surrounding Si atoms accompanied with charge transfer.
3. It has been shown by scanning tunneling microscopy and X-ray photoelectron spectroscopy that the reaction of SiH_4 molecules with Mo atoms deposite … More d on Si (111)7x7 surfaces yields MoSi_n clusters with a semiconducting band gap.
4. We predict by first principles calculations that an atomically-thin layered compound, (MoSi_<12>)_n is a semiconductor with the energy band gap larger than 0.5 eV. This material is composed of a layer of Mo atoms sandwiched by two layers of Si atoms, and is characterized by the fact that the electronic structure can be tuned by replacing the Mo atoms with other transition metals.
5. The charge transfer doping has been demonstrated for carbon-nanotube transistors and Si surfaces. This doping method utilizes the principle that the charge transfer is induced and electrons or holes are generated when solid surfaces are deposited with clusters or molecules having a sufficiently low ionization potential or a large electron affinity. We actually demonstrated the hole carrier generation using such clusters as TaF_6 and C_<60>F_<36> and analyzed the relation between the induced charge density and the energy levels of clusters. Less

Report

(4 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • Research Products

    (19 results)

All 2007 2006 2005 Other

All Journal Article (12 results) Patent(Industrial Property Rights) (7 results)

  • [Journal Article] Ultra-thin layered semiconductor : Si-rich transition metal silicide2007

    • Author(s)
      T.Miyazaki, T.Kanayama
    • Journal Title

      Japanese Journal of Applied Physics 46・2

    • NAID

      10018495388

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] A Multipole Ion Trap as Cluster-ion Source2007

    • Author(s)
      N.Uchida, Y.Ohishi, T.Sho, K.Kimura, T.Kanayama
    • Journal Title

      Japanese Journal of Applied Physics 46

    • NAID

      40015465549

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Ultra-thin layered semiconductor : Si-rich transition metal silicide2007

    • Author(s)
      T.Miyazaki, T.Kanayama
    • Journal Title

      Jpn. J. Appl. Phys. 46

    • NAID

      10018495388

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] A Multipole Ion Trap as Cluster-ion Source2007

    • Author(s)
      N.Uchida, Y.Ohishi, T.Sho, K.Kimura, T.Kanayama
    • Journal Title

      Jpn. J. Appl. Phys.

    • NAID

      40015465549

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] A Multipole Ion Trap as Cluster-ion Source2007

    • Author(s)
      N.Uchida, Y.Ohishi, T.Sho, K.Kimura, T.Kanayama
    • Journal Title

      Japanese Journal of Applied Physics 46・

    • NAID

      40015465549

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Stabilization Mechanism of Si12 Cage Clusters by Encapsulation of a Transition Metal Atom : A density-functional theory study2006

    • Author(s)
      N.Uchida, T.Miyazaki, T.Kanayama
    • Journal Title

      Physical Review B 74・20

      Pages: 205427-205427

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Stabilization Mechanism of Sii2 Cage Clusters by Encapsulation of a Transition Metal Atom : A density-functional theory study2006

    • Author(s)
      N.Uchida, T.Miyazaki, T.Kanayama
    • Journal Title

      Phys. Rev. B74

      Pages: 205427-205427

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Carborane superclusters formed by ion molecule reactions in an ion trap2005

    • Author(s)
      H.Hiura, T.Kanayama
    • Journal Title

      J. Molecular Structure 735・736

      Pages: 367-374

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Carborane superclusters formed by ion-molecule reactions in an ion trap2005

    • Author(s)
      H.Hiura, T.Kanayama
    • Journal Title

      J. Molecular Structure 735-736

      Pages: 367-374

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Carborane superclusters formed by ion-molecule reactions in an ion trap2005

    • Author(s)
      H.Hiura, T.Kanayama
    • Journal Title

      Journal of Molecular Structure 735-736

      Pages: 367-374

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Local modification of electronic structure of Si (111)-7x7 surfaces by forming molybdenum-encapsulating Si clusters

    • Author(s)
      N.Uchida, H.Yahata, T.Kanayama, L.Bolotov
    • Journal Title

      Applied Physics Letters

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Local modification of electronic structure of Si (111)-7x7 surfaces by forming molybdenum-encapsulating Si clusters

    • Author(s)
      N.Uchida, H.Yahata, T.Kanayama, L.Bolotov
    • Journal Title

      Appl. Phys. Lett.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] グラフェンを用いる半導体装置及びその製造方法2007

    • Inventor(s)
      多田哲也, 金山敏彦, 日浦英文, 二瓶 史行
    • Industrial Property Rights Holder
      産総研, 日本電気(株)
    • Industrial Property Number
      2007-052887
    • Filing Date
      2007-03-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 層状物質及びこれを用いた半導体装置2006

    • Inventor(s)
      宮剛英, 金山敏彦, 内田紀行
    • Industrial Property Rights Holder
      (独)産業技術総合研究所
    • Industrial Property Number
      2006-198612
    • Filing Date
      2006-07-20
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 半導体装置及びその製造方法2006

    • Inventor(s)
      多田哲也, 金山敏彦, 日浦英文, 東口達
    • Industrial Property Rights Holder
      産総研, 日本電気(株)
    • Industrial Property Number
      2006-315050
    • Filing Date
      2006-11-22
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 層状物質及びこれを用いた半導体装置2006

    • Inventor(s)
      宮崎 剛英, 金山 敏彦, 内田 紀行
    • Industrial Property Rights Holder
      (独)産業技術総合研究所
    • Industrial Property Number
      2006-198612
    • Filing Date
      2006-07-20
    • Related Report
      2006 Annual Research Report
  • [Patent(Industrial Property Rights)] ドーパント材料、ドーパント材料の製造方法およびこれを用いた半導体素子2005

    • Inventor(s)
      多田哲也, 金山敏彦, 日浦英文
    • Industrial Property Rights Holder
      産総研, 日本電気(株)
    • Industrial Property Number
      2005-001422
    • Filing Date
      2005-01-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 半導体装置及びその製造方法2005

    • Inventor(s)
      多田哲也, 金山敏彦, 日浦英文
    • Industrial Property Rights Holder
      産総研, 日本電気(株)
    • Industrial Property Number
      2005-315627
    • Filing Date
      2005-10-31
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] ドーパント材料、ドーパント材料の製造方法およびこれを用いた半導体素子2005

    • Inventor(s)
      日浦 英文, 多田 哲也, 金山 敏彦
    • Industrial Property Rights Holder
      日本電気(株), 産業技術総合研究所
    • Industrial Property Number
      2005-001422
    • Filing Date
      2005-01-06
    • Related Report
      2004 Annual Research Report

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Published: 2004-04-01   Modified: 2016-04-21  

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