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RF MEMS device based on micromachining

Research Project

Project/Area Number 16201027
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionTohoku University

Principal Investigator

ESASHI Masayoshi  Tohoku University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授 (20108468)

Co-Investigator(Kenkyū-buntansha) ONO Takahito  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院工学研究科, 助教授 (90282095)
TANAKA Shuji  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院工学研究科, 助教授 (00312611)
戸津 健太郎  東北大学, 大学院・工学研究科, 助手 (60374956)
Project Period (FY) 2004 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥48,750,000 (Direct Cost: ¥37,500,000、Indirect Cost: ¥11,250,000)
Fiscal Year 2006: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
Fiscal Year 2005: ¥13,130,000 (Direct Cost: ¥10,100,000、Indirect Cost: ¥3,030,000)
Fiscal Year 2004: ¥24,440,000 (Direct Cost: ¥18,800,000、Indirect Cost: ¥5,640,000)
KeywordsMicromachining / Micromachine / Wireless / MEMS / Sensor / Actuator / Relay / Resonator / マイクロマシニング
Research Abstract

Three-dimensional microstructures, sensors and actuators can be fabricated on a silicon chip using micromachining which is an extended technology based microfabrication for integrated circuits. RF MEMS (Radio Frequency Micro Electro Mechanical Systems) has been developed to produce RF components for wireless systems. Switches (relays), variable capacitors, micromechanical resonators for time (frequency) references or RF filters, RF interconnection and coils which are fabricated on thin self supported membranes and hence have small stray capacitances can be made by this technology. Following achievements are obtained in this research program.
Packaging technologies for the RF MEMS as wafer level packaging processes and electrical feedthrough structures for an electrical interconnection for high speed signal from the top side to the backside of silicon chips were developed. MEMS switches as contact type and capacitive type which are actuated electrostatically were developed.
MEMS switches … More were applied for a flexible flat panel display and commercialized as components for high speed LSI testers.
Micromechanical resonators can have high resonant frequencies. The extension mode enables higher resonant frequency than the bending mode because of the high spring constant of the extension mode. By making the resonant frequency determined by the lateral dimension multiple resonators with different resonant frequencies can be integrated on a chip. An electrostatically driven wine glass mode silicon disk resonator of witch diameter is 20 μm demonstrated a resonant frequencies of approximately 100 MHz. Since the resonant frequency of such small resonators can be fluctuated by absorbing gas MEMS resonator was fabricated in a vacuum cavity in a silicon chip to stabilize the resonant frequency. Micromechanical resonators have an inherent problem of phase noise caused by thermomechanical noise.
The thermomechanical noise also limit the resolution of resonating sensors. Extreme sensitivity is required for MRFM (Magnetic Resonance Force Microscopy) for the MRI (Magnetic Resonance Microscopy) of small samples as biological cell. The noise problems were studied and the phase noise could be reduced by a parametric squeeze damping. Cantilever resonant sensors which have high quality factor in atmosphere were.developed by using quartz material with thickness share mode.
High aspect ratio planer coils.were fabricated to reduce the resistance.and high quality factor as high as 85 at 1.6 GHz was achieved for the purpose of the MRI for the small samples. Less

Report

(4 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • Research Products

    (83 results)

All 2007 2006 2005 2004

All Journal Article (78 results) Book (4 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] RIE of Solenoidal Microcoil Glass Mould with Integrated Sample Container for Mocro-MRI2007

    • Author(s)
      M.J.K.Klein et al.
    • Journal Title

      Technical Digest of MEMS 2007

      Pages: 345-348

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Development of High-Resolution Intraluminal and Intravascular MRI Probe Using Microfabrication on Cylindrical Substrates2007

    • Author(s)
      S.Goto et al.
    • Journal Title

      Technical Digest of MEMS 2007

      Pages: 329-332

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] MEMS-Based SAW Devices2007

    • Author(s)
      J.H.Kupers et al.
    • Journal Title

      Third Internl. Sympo. on Acoustic Wave Devices for Future Mobile Communication Systems 3

      Pages: 57-68

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] RIE of Solenoidal Microcoil Glass Mould with Integrated Sample Container for Mocro-MRI2007

    • Author(s)
      M.J.K.Klein et al.
    • Journal Title

      Technical Digest of MEMS 2007 345-348

      Pages: 345-348

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Development of High-Resolution Intraluminal and Intravascular MRI Probe Using Microfabrication on Cylindrical Substrates2007

    • Author(s)
      S.Goto et al.
    • Journal Title

      Technical Digest of MEMS 2007 329-332

      Pages: 329-332

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] MEMS-Based SAW Devices.2007

    • Author(s)
      J.H.Kupers et al.
    • Journal Title

      Third Internl.Sympo.on Acoustic Wave Devices for Future Mobile Communication Systems 3

      Pages: 57-68

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] RIE of Solenoidal Microcoil Glass Mould with Integrated Sample Container for Mocro-MRI2007

    • Author(s)
      M.J.K.Klein
    • Journal Title

      Tethnical Digest of MEMS 2007

      Pages: 345-348

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Development of High-Resolution Intraluminal and Intravascular MRI Probe Using Microfabrication on Cylindrical Substrates2007

    • Author(s)
      S.Goto
    • Journal Title

      Technical Digest of MEMS 2007

      Pages: 329-332

    • Related Report
      2006 Annual Research Report
  • [Journal Article] MEMS-Based SAW Devices2007

    • Author(s)
      J.H.Kupers
    • Journal Title

      Third Internl. Sympo. on Acoustic Wave Devices for Future Mobile Communication Systems 3

      Pages: 57-68

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Capacitive Resonant Mass Sensor with Frequency Demodulation Detection Based on Resonant Circuit2006

    • Author(s)
      S.-J.Kim et al.
    • Journal Title

      Applied Physics Letters 88・5

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Parasitic Leakage Resonance-free HRS MEMS Package for Microwave and Millimeter-wave2006

    • Author(s)
      Y.T.Song et al.
    • Journal Title

      Sensors and Actuators A 131

      Pages: 83-90

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] High Aspect Ratio Spiral Microcoils Fabricated by a Silicon Lost Molding Technique2006

    • Author(s)
      Y.Jiang et al.
    • Journal Title

      J.of Micromech. Microeng. 16

      Pages: 1057-1061

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Low Actuation Voltage Capacitive Shunt RF-MEMS Switch Having a Corrugated Bridge2006

    • Author(s)
      Y.T.Song et al.
    • Journal Title

      IEICE TRANSACTIONS on Electronics E89-C,12

      Pages: 1880-1887

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] センサネットワークに関連するMEMS技術2006

    • Author(s)
      江刺正喜
    • Journal Title

      電子情報通信学会誌 89・5

      Pages: 395-398

    • NAID

      110004735700

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Si技術を使ったMEMS発振器 水晶発振器の置き換えを狙う2006

    • Author(s)
      江刺正喜 他
    • Journal Title

      日経エレクトロニクス 923

      Pages: 125-134

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Microprobe with Integrated Single-Electron Transistor for Magnetic Resonance Force Microscopy2006

    • Author(s)
      S.-H.Song et al.
    • Journal Title

      Proc. of the 23th Sensor Symposium 23

      Pages: 482-486

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nanometric Application with Microfabricated Quartz-crystal Cantilever2006

    • Author(s)
      Y.-C.Lin et al.
    • Journal Title

      2006 International Symposium on Nano Science and Technology

      Pages: 78-79

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of Micromachined Quartz-crystal Resonators Using Surface Activated Bonding of Silicon and Quartz Wafers2006

    • Author(s)
      A.Takahashi et al.
    • Journal Title

      Proc. of IEEE Sensors 2006 5

      Pages: 1305-1308

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Wine Glass Mode Micro-Mechanical Resonator2006

    • Author(s)
      K.Ikoma et al.
    • Journal Title

      Proc. of IEEE Sensors 2006 5

      Pages: 1289-1292

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Mass Detection Using Capacitive Resonant Silicon Sensor2006

    • Author(s)
      S.-J.Kim et al.
    • Journal Title

      Proc. of IEEE Sensors 2006 5

      Pages: 1285-1288

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication and Characterization of High Aspect Ratio Microcoils Using Silicon Lost Molding Process2006

    • Author(s)
      Y.Jiang et al.
    • Journal Title

      Asia Pacific Conference of Transducer and Micro-Nano Technology, APCOT2006 3

      Pages: 133-133

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Capacitive Resonant Mass Sensor with Frequency Demodulation Detection Based on Resonant Circuit2006

    • Author(s)
      S.-J.Kim et al.
    • Journal Title

      Applied Physics Letters 88-5

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Low Actuation Voltage Capacitive Shunt RF-MEMS Switch Having a Corrugated Bridge2006

    • Author(s)
      Y.T.Song et al.
    • Journal Title

      IEICE TRANSACTIONS on Electronics E89-C, 12

      Pages: 1880-1887

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] MEMS Technology Related to Sensor Network (in Japanese)2006

    • Author(s)
      M.Esashi
    • Journal Title

      ICIEE Journal 89-5

      Pages: 395-398

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision Silicon MEMS Resonators versus Traditional Quartz (in Japanese)2006

    • Author(s)
      MEsashi et al.
    • Journal Title

      Nikkei Electronics 923

      Pages: 125-134

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Microprobe with Integrated Single-Electron Transistor for Magnetic Resonance Force Microscopy2006

    • Author(s)
      S.-H.Song et al.
    • Journal Title

      Proc.of the 23th Sensor Symposium 23

      Pages: 482-486

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nanometric Application with Microfabricated Quartz-crystal Cantilever2006

    • Author(s)
      Y-C.Lin et al.
    • Journal Title

      2006 International Symposium on Nano Science and Technology

      Pages: 78-79

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of Micromachined Quartz-crystal Resonators Using Surface Activated Bonding of Silicon and Quartz Wafers2006

    • Author(s)
      A.Takahashi et al.
    • Journal Title

      Proc.of IEEE Sensors 2006 5

      Pages: 1305-1308

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Wine Glass Mode Micro-Mechanical Resonator2006

    • Author(s)
      K.Ikoma et al.
    • Journal Title

      Proc.of IEEE Sensors 2006 5

      Pages: 1289-1292

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Mass Detection Using Capacitive Resonant Silicon Sensor2006

    • Author(s)
      S.-J.Kim et al.
    • Journal Title

      Proc.of IEEE Sensors 2006 5

      Pages: 1285-1288

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Capacitive Resonant Mass Sensor with Frequency Demodulation Detection Based on Resonant Circuit2006

    • Author(s)
      S.-J.Kim
    • Journal Title

      Applied Physics Letters 88・5

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Parasitic Leakage Resonance-free HRS MEMS Package for Microwave and Millimeter-wave2006

    • Author(s)
      Y.T.Song
    • Journal Title

      Sensors and Actuators A 131

      Pages: 83-90

    • Related Report
      2006 Annual Research Report
  • [Journal Article] High Aspect Ratio Spiral Microcoils Fabricated by a Silicon Lost Molding Technique2006

    • Author(s)
      Y.G.Jiang
    • Journal Title

      J.of Micromech. Microeng. 16

      Pages: 1057-1061

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Low Actuation Voltage Capacitive Shunt RF-MEMS Switch Having a Corrugated Bridge2006

    • Author(s)
      Y.T.Song
    • Journal Title

      IEICE TRANSACTIONS on Electronics E89-C,12

      Pages: 1880-1887

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Si技術を使ったMEMS発振器 水晶発振器の置き換えを狙う2006

    • Author(s)
      江刺正喜
    • Journal Title

      日経エレクトロニクス 923

      Pages: 125-134

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Microprobe with Integrated Single-Electron Transistor for Magnetic Resonance Force Microscopy2006

    • Author(s)
      S.-H.Song
    • Journal Title

      Proc. of the 23th Sensor Symposium 23

      Pages: 482-486

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Nanometric Application with Microfabricated Quartz-crystal Cantilever2006

    • Author(s)
      Y.-C.Lin
    • Journal Title

      2006 International Symposium on Nano Science and Technology

      Pages: 78-79

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Fabrication of Micromachined Quartz-crystal Resonators Using Surface Activated Bonding of Silicon and Quartz Wafers2006

    • Author(s)
      A.Takahashi
    • Journal Title

      Proc. of IEEE Sensors 2006 5

      Pages: 1305-1308

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Wine Glass Mode Micro-Mechanical Resonator2006

    • Author(s)
      K.Ikoma
    • Journal Title

      Proe. of IEEE Sensors 2006 5

      Pages: 1289-1292

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Mass Detection Using Capacitive Resonant Silicon Sensor2006

    • Author(s)
      S.-J.Kim
    • Journal Title

      Proc. of IEEE Sensors 2006 5

      Pages: 1285-1288

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Fabrication and Characterization of High Aspect Ratio Microcoils Using Silicon Lost Molding Process2006

    • Author(s)
      Y.Jiang
    • Journal Title

      Asia Pacific Conference of Transducer and Micro-Nano Technology, APCOT2006 3

      Pages: 133-133

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Capacitive Resonant Mass Sensor with Frequency Demodulation Detection Based on Resonant Circuit2006

    • Author(s)
      S.J.Kim, T.Ono, M.Esashi
    • Journal Title

      Applied Physics Letters 88

    • NAID

      120000775862

    • Related Report
      2005 Annual Research Report
  • [Journal Article] センサネットワークに関連するMEMS技術2006

    • Author(s)
      江刺正喜
    • Journal Title

      電子情報通信学会誌 89・5(印刷中)

    • NAID

      110004735700

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Low Actuation Voltage Capacitive Shunt RF-MEMS Switch having a Corrugated Membrane on a Concave Structure2006

    • Author(s)
      Y.T.Song, H.Y.Lee, M.Esashi
    • Journal Title

      IEICE Transactions on Electronics 89・12(印刷中)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Resonance-free HRS MEMS Package for Microwave and Millimeter-wave2005

    • Author(s)
      Y.T.Song et al.
    • Journal Title

      Technical Digest of Transducers 2005 13

      Pages: 427-432

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of High Aspect Retio Planar Microcoil Based on Silicon Molding Technique2005

    • Author(s)
      Y.Jiang et al.
    • Journal Title

      Proceedings of the 22th Sensor Symposium 22

      Pages: 29-32

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Parametrically Amplified Thermal Resonant Sensor with Pseudo-Cooling Effect2005

    • Author(s)
      T.Ono et al.
    • Journal Title

      J.of Micromech. Microeng. 15-11

      Pages: 2282-2288

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication and Characterization of Micromachined Quartz-crystal Cantilever for Force Sensing2005

    • Author(s)
      Y.C.Lin et al.
    • Journal Title

      J.of Micromech. Microeng. 15-11

      Pages: 2426-2432

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] MEMS resonators : getting the packaging right2005

    • Author(s)
      A.Partridge et al.
    • Journal Title

      第9回SEMIマイクロシステム/MEMSセミナー 9

      Pages: 55-58

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Flat Panel Display用Membrane SW Arrayの研究開発2005

    • Author(s)
      泉田和夫 他
    • Journal Title

      第22回「センサ・マイクロマシンと応用システム」シンポジウム(レートニュース) 22

      Pages: 76-76

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package Using a Lightly-doped Silicon Chip Carrier2005

    • Author(s)
      Y.T.Song et al.
    • Journal Title

      Jap. J. of Applied Physics 44・4A

      Pages: 129-133

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Paremetrically Amprified Resonant Sensor with Psudo-Cooling Effect2005

    • Author(s)
      H.Wakamatsu et al.
    • Journal Title

      Proceedings MEMS'2005 18

      Pages: 343-346

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 高速伝送対応のSi貫通配線構造2005

    • Author(s)
      住川雅人 他
    • Journal Title

      第19回エレクトロニクス実装学会学術講演大会 19

      Pages: 117-118

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Design and Fabrication of Gradient Coils for Micro-MRI2005

    • Author(s)
      Y.Jiang et al.
    • Journal Title

      平成17年電気学会全国大会

      Pages: 211-212

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Resonating Quartz-crystal Cantilever for Force Sensing2005

    • Author(s)
      Y.C.Lin et al.
    • Journal Title

      Proc. of IEEE Sensors 2005 4

      Pages: 260-264

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of High Aspect Retio Planar Microcoil Based on Silicon Molding Teehnique2005

    • Author(s)
      Y.Jiang et al.
    • Journal Title

      Proceedings of the 22th Sensor Symposium 22

      Pages: 29-32

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Parametrically Amplified Thermal Resonant Sensor with Pseudo-Cooling Effect2005

    • Author(s)
      T.Ono et al.
    • Journal Title

      J.of Micromech.Microeng. 15-11

      Pages: 2282-2288

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] MEMS resonators : getting the packaging right2005

    • Author(s)
      A.Partridge et al.
    • Journal Title

      9th SEMI Microsystem/MEMS Seminor 9

      Pages: 55-58

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Development of Membrane MEMS SwitchArray for Flat Panel Display (in Japanese)2005

    • Author(s)
      K.Senda et al.
    • Journal Title

      Late News of the 22th Sensor Symposium 22

      Pages: 76-76

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package Using a Lightly-doped Silicon Chip Carrier2005

    • Author(s)
      Y.T.Song et al.
    • Journal Title

      Jap.J.of Applied Physics 44-4A

      Pages: 129-133

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Electrical Interconnection through Silicon wafer for High Speed Signal Transmission (in Japanese)2005

    • Author(s)
      M.Sumikawa et al.
    • Journal Title

      19th Electronics Packaging Convention 19

      Pages: 117-118

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Design and Fabrication of Gradient Coils for Micro-MRI2005

    • Author(s)
      Y.Jiang et al.
    • Journal Title

      2005 IEEJ Convention

      Pages: 211-212

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Resonance-free HRS MEMS Package for Microwave and Millimeter-wave2005

    • Author(s)
      Y.T.Song, T.Ono, H.Y.Lee, M.Esashi
    • Journal Title

      Technical Digest of Transducers 2005 13

      Pages: 427-432

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fabrication of High Aspect Retio Planar Microcoil Based on Silicon Molding Technique2005

    • Author(s)
      Y.Jiang, T.Ono, M.Esashi
    • Journal Title

      Proceedings of the 22th Sensor Symposium 22

      Pages: 29-32

    • Related Report
      2005 Annual Research Report
  • [Journal Article] MEMS resonators : getting the packaging right2005

    • Author(s)
      A.Partridge, M.Lutz, B.Kim, M.Hopcroft, R.N.Candler, T.W.Kenny, K.Petersen, M.Esashi
    • Journal Title

      第9回SEMIマイクロシステム/MEMSセミナー 9

      Pages: 55-58

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Flat Panel Display用Membrane SW Arrayの研究開発2005

    • Author(s)
      原田和夫, 江刺正喜
    • Journal Title

      第22回「センサ・マイクロマシンと応用システム」シンポジウム(レートニュース) 22

      Pages: 76-76

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Resonance-free HRS MEMS Package for Microwave and Millimeter-wave2005

    • Author(s)
      Y.T.Song, T.Ono, H.Y.Lee, M.Esashi
    • Journal Title

      Technical Digest of Transducers (in press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package Using a Lightly-doped Silicon Chip Carrier2005

    • Author(s)
      Y.T.Song, H.Y.Lee, M.Esashi
    • Journal Title

      Jap.J.of Applied Physics 44・4A

      Pages: 129-133

    • NAID

      10015470011

    • Related Report
      2004 Annual Research Report
  • [Journal Article] MEMSによるスイッチとRF共振子2005

    • Author(s)
      江刺正喜
    • Journal Title

      第1回MEMSパークコンソーシアム研究会 1

      Pages: 61-64

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Paremetrically Amprified Resonant Sensor with Psudo-Cooling Effect2005

    • Author(s)
      H.Wakamatsu, T.Ono, M.Esashi
    • Journal Title

      Proceedings MEMS'2005 18

      Pages: 343-346

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Noise Squeezed Resonant Infrared Sensor2004

    • Author(s)
      H.Wakamatsu et al.
    • Journal Title

      Proceedings of the 21th Sensor Symposium 21

      Pages: 285-290

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] High Sensitivity Silicon Mass Sensor in Viscous Environment2004

    • Author(s)
      S.-J.Kim et al.
    • Journal Title

      Proceedings of the 21th Sensor Symposium 21

      Pages: 305-308

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Mass Sensing with Resonating Ultra-thin Silicon Beams Detected by a Double-Beam Laser Doppler Vibrometer2004

    • Author(s)
      T.Ono et al.
    • Journal Title

      Measurement Science and Technology 15・10

      Pages: 1977-1981

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] RF MEMS スイッチの開発2004

    • Author(s)
      中村陽登 他
    • Journal Title

      Advantest Technical Report 22

      Pages: 9-16

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Mass Sensing with Resonating Ultra-thin Silicon Beams Detected by a Double-Beam Laser Doppler Vibrometer2004

    • Author(s)
      T.Ono et al.
    • Journal Title

      Measurement Science and Technology 15-10

      Pages: 1977-1981

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Development of RF MEMST.Switch (in Japanese)2004

    • Author(s)
      A.Nakamura et al.
    • Journal Title

      Advantest Technical Report 22

      Pages: 9-16

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] AlN Based Thin Bulk Acoustic Resonator with an Energy-trapping Structures2004

    • Author(s)
      M.Hara, T.Abe, M.Esashi
    • Journal Title

      Proceedings of the 21th Sensor Symposium 21

      Pages: 23-26

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 高速伝送対応のSi貫通配線構造2004

    • Author(s)
      住川雅人, 江刺正喜
    • Journal Title

      エレクトロニクス実装学会学術講演大会

    • NAID

      130004588797

    • Related Report
      2004 Annual Research Report
  • [Book] Future Medical Engineering Based on Bionanotechnology (Quartz-Crystal Cantilevered Resonator for Nanometric Sensing)2006

    • Author(s)
      M.Esashi et al.
    • Publisher
      Imperial College Press
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] Frontiers in Electronics (Recent Progress of Application-oriented MEMS through Industry-university Collaboration)2006

    • Author(s)
      M.Esashi et al.
    • Publisher
      World Scientific
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] Future Medical Engineering Based on Bionanotechnology (Quartz-Crystal Cantilevered Resonator for Nanometric Sensing)2006

    • Author(s)
      M.Esashi
    • Total Pages
      1115
    • Publisher
      Imperial College Press
    • Related Report
      2006 Annual Research Report
  • [Book] Recent Progress of Application-oriented MEMS through Industry-university Collaboration 「Frontiers in Electronics (Proceedings of the WOFE-04)」[Intl. J. of High Speed Electronics and Systems, 16, 2 (2006) 693-704] (MEMS-Based Thin Film Bulk Acoustic Resonator for Wireless Medical Sensing System)2006

    • Author(s)
      M.Esashi
    • Total Pages
      749
    • Publisher
      World Scientific
    • Related Report
      2006 Annual Research Report
  • [Patent(Industrial Property Rights)] 微小スイッチ2004

    • Inventor(s)
      大山 直樹, 江刺 正喜
    • Industrial Property Rights Holder
      三菱重工(株)
    • Industrial Property Number
      2004-170687
    • Filing Date
      2004-06-09
    • Related Report
      2004 Annual Research Report

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Published: 2004-04-01   Modified: 2016-04-21  

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