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Study on uncertainty of measurement of coordinate metrology for next generation manufacturing system

Research Project

Project/Area Number 16206025
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionThe University of Tokyo

Principal Investigator

TAKAMASU Kiyoshi  The University of Tokyo, Graduate School of Engineering, Professor (70154896)

Co-Investigator(Kenkyū-buntansha) TAKAHASHI Satoru  The University of Tokyo, Graduate School of Engineering, Associate Professor (30283724)
FURUTANI Ryoshu  Tokyo Denki University, Faculty of Engineering, Professor (50219119)
Project Period (FY) 2004 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥26,780,000 (Direct Cost: ¥20,600,000、Indirect Cost: ¥6,180,000)
Fiscal Year 2007: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2006: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2005: ¥6,760,000 (Direct Cost: ¥5,200,000、Indirect Cost: ¥1,560,000)
Fiscal Year 2004: ¥7,670,000 (Direct Cost: ¥5,900,000、Indirect Cost: ¥1,770,000)
Keywordsuncertainty of measurement / coordinate measuring machine / coordinate metrology / accuracy evaluation / next generation manufacturing system / calibration / 不確かさ / 三次元計測 / ナノメートル計測
Research Abstract

1. Geometrical torelancing for GPS The total theoretical methods for evaluation of uncertainty in coordinate metrology were established. Specially, the uncertainty from the strategy of measurement and the form deviation of a measured workpiece was evaluated using simulations and statistical experiments.
(1) Uncertainty from the form deviation The specified autocorrelation functions were obtained to circle features. We made several simulations to measure the calculated in the strategies of measurements such as number of measuring points and positions.
(2) Theoretical examinations on influences of form deviation The uncertainties can theoretically calculated using variance and covariance of the error matrix on the least squares method. These uncertainties were compared with the results of simulations.
(3) Measuring experiments using Coordinate Measuring Machine Several circle features were measured using CMM. The results of measurements were compared with the results of simulations.
2. Evaluation of uncertainty in coordinate metrology From these experiments and simulations, we confirmed our proposed methods can be applicable to coordinate metrology.(1) Evaluation of uncertainty for CMM after calibration(2) Uncertainty from form deviation of measured features
(1) Evaluation of uncertainty for CMM after calibration
(2) Uncertainty from form deviation of measured features

Report

(5 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • Research Products

    (86 results)

All 2008 2007 2006 2005 2004 Other

All Journal Article (42 results) (of which Peer Reviewed: 20 results) Presentation (36 results) Book (5 results) Remarks (2 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data2008

    • Author(s)
      M. Nara, M. Abbe, K. Takamasu
    • Journal Title

      Key Engineering Materials 381-382

      Pages: 587-590

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Study on Scanning Squareness Measurement Method and Uncertainty Estimation2008

    • Author(s)
      X. Chen, K. Takamasu
    • Journal Title

      Key Engineering Materials 381-382

      Pages: 569-572

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System2008

    • Author(s)
      S. Liu, K. Watanabe, S. Takahashi, K. Takamasu
    • Journal Title

      Key Engineering Materials 381-382

      Pages: 407-410

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Postural-induced phase shift of respiratory sinus arrhythmia and blood pressure variations: insight from respiratory-phase domain analysis2008

    • Author(s)
      Kiyoshi Kotani, Kiyoshi Takamasu, Yasuhiko Jimbo, Yoshiharu Yamamoto
    • Journal Title

      American Journal of Physiology-Heart and Circulatory Physiology 294

      Pages: 1481-1489

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Evanescent light photopolymerization and measurement of cure depth in nanostereolithography2008

    • Author(s)
      Y. Kajihara, Y. Inazuki, T. Takeuchi, S. Takahashi, K. Takamasu
    • Journal Title

      Applied Physics Letters 92

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Postural-induced phase shift of respiratory sinus arrhythmia and blood pressure variations : insight from respiratory-phase domain analysis2008

    • Author(s)
      Kiyoshi Kotani, Kiyoshi Takamasu, Yasuhiko Jimbo, Yoshiharu Yamamoto
    • Journal Title

      American Journal of Physiology-Heart and Circulatory Physiology 294

      Pages: 1481-1489

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Uncertainty Estimation Usin Monte-Carlo Method Constrained by Correlations of the Data2008

    • Author(s)
      M.Nara, M.Abbe K.Takamasu
    • Journal Title

      Key Engineering Materials 381-382

      Pages: 587-590

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on Scanning Squareness Measurement Method and Uncertainty Estimation2008

    • Author(s)
      X.Chen, K.Takamasu
    • Journal Title

      Key Enineering Materials 381-382

      Pages: 569-572

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System2008

    • Author(s)
      S.Liu, K.Watanabe, S.Takahashi, K.Takamasu
    • Journal Title

      Key Emgineering Materials 381-382

      Pages: 407-410

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Postural-induced phase shift of respiratory sinus arrhythmia and blood pressure variations:insight from respiratory-phase domain analysis2008

    • Author(s)
      Kiyoshi Kotani, Kiyoshi Takamasu, Yasuhiko Jimbo, Yoshiharu Yamamoto
    • Journal Title

      American Journal of Phsiolo-Heart and Circulatory Physiology 294

      Pages: 1481-1489

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evanescent light photopolymerization and measurement of cure depth in nanostereolithography2008

    • Author(s)
      Y.Kajihara, Y.Inazuki, T.Takeuchi, S.Takahashi, K.Takamasu
    • Journal Title

      Applied Physics Letters 92

      Pages: 931201-3

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Respiratory-phase Domain Analysis of Heart Rate Variability can Accurately Estimate Cardiac Vagal Activity during a Mental Arithmetic Task2007

    • Author(s)
      K. Kotani, M. Tachibana, K. Takamasu
    • Journal Title

      Methods of Information in Medicine 46,3

      Pages: 376-385

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 空間周波数領域2点法に関する研究(第1報)-2組の2点法を組合わせる場合の系統誤差の補2007

    • Author(s)
      陳欣, 小谷潔, 高増潔
    • Journal Title

      精密工学会誌 73,6

      Pages: 653-658

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 現場環境における三次元測定機の高度化に関する研究(第2報)-直角誤差補正-2007

    • Author(s)
      大西徹, 高瀬省徳, 高増潔
    • Journal Title

      精密工学会誌 73,7

      Pages: 818-822

    • NAID

      110006342951

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第2報)-定在エバネッセント光を利用2007

    • Author(s)
      梶原優介, 稲月友一, 高橋哲, 高増潔
    • Journal Title

      精密工学会誌 73,8

      Pages: 934-939

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 体動の影響下におけるリアルタイム副交感神経活動推定法の開発とインタラクティブCGの生成2007

    • Author(s)
      小谷潔, 飯田文明, 赤川智洋, 斉藤
    • Journal Title

      電気学会論文誌C 127,10

      Pages: 1762-1769

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Study on Spatial Frequency Domain 2-point Method (1st Report)-Calibration of Systematic Error in Case of Combining Two Sets of 2-point Method2007

    • Author(s)
      Xin CHEN, Kiyoshi KOTANI, Kiyoshi TAKAMASU
    • Journal Title

      Journal of Japan Society for Precision Engineering 73,6

      Pages: 653-658

    • NAID

      110006278973

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Study on Improvement Methods of CMM (Coordinate Measuring Machine) in Workshop Environment-Correction of Squareness Error2007

    • Author(s)
      Tohru Ohnishi, Shotoku Takase, Kiyoshi Takamasu
    • Journal Title

      Journal of Japan Society for Precision Engineering 73,7

      Pages: 818-822

    • NAID

      110006342951

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Study on Nano-Stereolithography Using Evanescent Light (2nd report)-Photofabrication of Fine Lattice Structures Using Standing Evanescent Light2007

    • Author(s)
      Yusuke Kajihara, Yuichi Inazuki, Satoru Takahashi, Kiyoshi Takamasu
    • Journal Title

      Journal of Japan Society for Precision Engineering 73,8

      Pages: 934-939

    • NAID

      110006368886

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Development of the Method for Estimating Cardiac Vagal Activity in Real-Time during Body Motion and Generation of the Interactive CG2007

    • Author(s)
      Kiyoshi Kotani, Fumiaki Iida, Tomohiro Akagawa, Takashi Saitoh Yasuhiko Jimbo, Yoichiro Kawaguchi, Kiyoshi Takamasu
    • Journal Title

      IEEJ Trans. EIS 127,10

      Pages: 1762-1769

    • NAID

      10019958910

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Respiratory-phase Domain Analysis of Heart Rate Variability can Accurately Estimate Cardiac Vagal Activity during a Mental Arithmetic Task2007

    • Author(s)
      K.Kotani, M.Tachibana, K, Takamasu
    • Journal Title

      Methods of Information in Medicine 46,3

      Pages: 376-385

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 空間周波数領域2点法に関する研究(第1報)-2組の2点法を組合わせる場合の系統誤差の補2007

    • Author(s)
      陳 欣, 小谷 潔, 高 増潔
    • Journal Title

      精密工学会誌 73,6

      Pages: 653-658

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 現場環算における三次元測定機の高度化に関する研究(第2報)一直角誤差補正-2007

    • Author(s)
      大西 徹, 高瀬 省徳, 高増 潔
    • Journal Title

      精密工学会誌 73,7

      Pages: 818-822

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] エバネッセント光を利用したナノ光造形疾に関する研究(第2報)一定在エバネッセント光を利用2007

    • Author(s)
      幌原 優介, 稲月 友一, 高橋 哲, 高増 潔
    • Journal Title

      精密工学会誌 73,8

      Pages: 934-939

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 体動の影響下におけるリアルタイム副交感神経活動推定法の開発とインタラクティブCGの生成2007

    • Author(s)
      小谷 潔, 飯田 文明, 赤川 智洋, 斉藤
    • Journal Title

      電気学会論文誌C 127,10

      Pages: 1762-1769

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Investigation of the Influence of Swalloing, Coughing and Vocalizationon Heart Rate Variability with Respiratory-phase Domain Analysis2007

    • Author(s)
      K.Kotani
    • Journal Title

      Methods of Information in Medicine 46・2

      Pages: 179-185

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 現場環境における三時限測定機の高度化に関する研究(第1報) : 温度ドリフトの評価および補正2007

    • Author(s)
      大西徹
    • Journal Title

      精密工学会誌 73・2

      Pages: 270-274

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Development of a Multi-Ball-Cantilever AFM for Measuring Resist Surface2006

    • Author(s)
      Shujie Liu
    • Journal Title

      Journal of Robotics and Mechatronics 18・8

      Pages: 698-704

    • Related Report
      2006 Annual Research Report
  • [Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第1報)2006

    • Author(s)
      梶原優介
    • Journal Title

      精密工学会誌 72・11

      Pages: 1391-1396

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 平面リニアモータの精度校正に関する研究(第1報) -反射ミラーの形状計測-2006

    • Author(s)
      陳欣
    • Journal Title

      精密工学会誌 72・12

      Pages: 1542-1546

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 輪帯エバネッセント照明による回路パターン付きSiウエハの表面異物欠陥検出法に関する研究(第1報) : 欠陥検出原理とその検証実験2006

    • Author(s)
      吉岡淑江
    • Journal Title

      精密工学会誌 72・7

      Pages: 878-883

    • Related Report
      2006 Annual Research Report
  • [Journal Article] リングビームを用いた三次元変位測定法(第2報)-リングイメージの楕円近似による非線形性の改善-2006

    • Author(s)
      臼杵深
    • Journal Title

      精密工学会誌 72・1

      Pages: 13-22

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 座標測定機のアーティファクト校正(第3報)-校正後の測定の不確かさの推定-2005

    • Author(s)
      高増潔
    • Journal Title

      精密工学会誌 71・7

      Pages: 890-894

    • NAID

      10016464429

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 形体計測における不確かさの見積り(第3報)-区分多項式による直線形体の形状偏差モデル-2005

    • Author(s)
      高増潔
    • Journal Title

      精密工学会誌 71・11

      Pages: 1454-1458

    • NAID

      110002238043

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Development of an Evanescent Light Measurement System for Si Wafer Microdefect Detection2005

    • Author(s)
      S.Takahashi
    • Journal Title

      Key Engineering Materials 295-296

      Pages: 15-20

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Evaluation of Thrust Force and Positioning Accuracy of a New Linear Motor2005

    • Author(s)
      X.Chen
    • Journal Title

      Key Engineering Materials 295-296

      Pages: 613-618

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 3D profile measurement using color multi-line stripe pattern with one shot scanning2005

    • Author(s)
      Chanin Sinlapeecheewa
    • Journal Title

      Integrated Computer-Aided Engineering 12・4

      Pages: 333-341

    • Related Report
      2005 Annual Research Report
  • [Journal Article] GPS(製品の幾何特性仕様)に基づいた検証方法-幾何公差の解釈と三次元測定機の不確かさ評価2005

    • Author(s)
      高増潔
    • Journal Title

      設計工学 40・2

      Pages: 79-85

    • NAID

      10014331322

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 座標測定機のアーティファクト校正(第3報)-校正後の測定の不確かさの推定-2005

    • Author(s)
      高増潔, 佐藤理, 下嶋賢, 古谷涼秋
    • Journal Title

      精密工学会誌 71・7(発表予定)

    • NAID

      10016464429

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 座標測定機のアーティファクト校正(第2報)-冗長座標測定機の自己校正-2004

    • Author(s)
      高増潔, 下嶋賢, 古谷涼秋, 佐藤理
    • Journal Title

      精密工学会誌 70・5

      Pages: 711-715

    • NAID

      110001823998

    • Related Report
      2004 Annual Research Report
  • [Journal Article] パラレルメカニズムを用いたマイクロフライス盤の開発(第1報,設計パラメータの決定と試作機の製作)2004

    • Author(s)
      佐藤理, 高増潔, 無類井格, Gheorghe Olea
    • Journal Title

      設計工学 39・4

      Pages: 175-181

    • NAID

      10012869260

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 計測標準高度化に関する研究2004

    • Author(s)
      高瀬省徳, 大西徹, 高増潔
    • Journal Title

      技研所報 40・3

      Pages: 17-23

    • Related Report
      2004 Annual Research Report
  • [Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第5報)-定在波照明の2方向シフトを用いた2次元超解像特性の検討-2008

    • Author(s)
      工藤 良太, 臼杵 深, 高橋 哲, 高増 潔
    • Organizer
      2008年度精密工学会春季大会学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2007 Annual Research Report
  • [Presentation] 半導体の線幅標準に関する研究(第3報)-STEM画像による線幅のエッジおよびピッチの決定2008

    • Author(s)
      桑原 一樹, 澤内 佑介, 高橋 哲, 高増 潔
    • Organizer
      2008年度精密工学会春季大会学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2007 Annual Research Report
  • [Presentation] レジスト表面形状の計測(第五報)-マルチトポセンサの提案-2008

    • Author(s)
      徳田 雄一郎 高橋 哲, 高増 潔
    • Organizer
      2008年度精密工学会春季大会学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2007 Annual Research Report
  • [Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第2報)-創製構造体の気相取り出し方法の実験的検討-2008

    • Author(s)
      吉田 大助, 武内 徹, 高橋 哲, 高増 潔
    • Organizer
      2008年度精密工学会春季大会学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2007 Annual Research Report
  • [Presentation] Uncertainty Evaluation of CMM by Modeling with Spatial Constraint2007

    • Author(s)
      M. Abbe, M. Nara, K. Takamasu
    • Organizer
      ISMQC2007
    • Place of Presentation
      India
    • Year and Date
      2007-11-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Thin Film Thickness Measurement for Evaluation of Residual layer of Nano-Imprint Lithography Using Near-Field Optics2007

    • Author(s)
      S. Minamiguchi, S. Usuki, S. Takahashi, K. Takamasu
    • Organizer
      ISMQC2007
    • Place of Presentation
      India
    • Year and Date
      2007-11-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Calibration of 6 DOF Parallel Mechanism Driven by Planar Motors2007

    • Author(s)
      Kiyoshi Takamasu, Keisuke Yoshida, Tatsuya Senoo, Xin Chen, Kiyoshi
    • Organizer
      ISMQC2007
    • Place of Presentation
      India
    • Year and Date
      2007-11-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Uncertainty Estimation for Coordinate Metrology:Calibration, Form Deviation and Strategy of Measurement2007

    • Author(s)
      K. Takamasu, S. Takahashi, M. Abbe, R. Furutani
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System2007

    • Author(s)
      Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illuminatio Shift2007

    • Author(s)
      S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Study on Scanning Squareness Measurement Method and Uncertainty Estimation2007

    • Author(s)
      X. Chen, K. Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Lisht2007

    • Author(s)
      S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] An Optical and Confocal Microscopic System for Nanostereolithography Using Evanescent Light Eliminate of the Nonlinearity in Heterodyne Interferometer2007

    • Author(s)
      Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data2007

    • Author(s)
      M. Nara, M. Abbe, K. Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Study on algorithm of reconstructing topography based on topography difference2007

    • Author(s)
      X. Chen, K. Kotani, K. Takamasu
    • Organizer
      Euspen 2007
    • Place of Presentation
      Germany
    • Year and Date
      2007-05-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development for a High Percisin Positioning Systems Family with Parallel Structure and Short Planar Motion2007

    • Author(s)
      G. Olea, S. Rathmann, J. Hesselbach, K. Takamasu
    • Organizer
      Euspen 2007
    • Place of Presentation
      Germany
    • Year and Date
      2007-05-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Development of laser-assisted microfabrication sysetm for three-dimensional metal structures by photocatalysis2007

    • Author(s)
      S. Takahashi, M. Okuno, Y. Kajihara, K. Takamasu
    • Organizer
      Euspen 2007
    • Place of Presentation
      Germany
    • Year and Date
      2007-05-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Uncertainty Estimation for Coordinate Metrology : Calibration, Form Deviation and Strategy of Measurement2007

    • Author(s)
      K. Takamasu, S. Takahashi, M. Abbe, R. Furutani
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Experimenta Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift2007

    • Author(s)
      S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light2007

    • Author(s)
      S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Study on alorithm of reconstructing topography based on topography difference2007

    • Author(s)
      X. Chen, K. Kotani, K. Takamasu
    • Organizer
      Euspen 2007
    • Place of Presentation
      Germany
    • Related Report
      2007 Annual Research Report
  • [Presentation] Uncertainty Estimation for Coordinate Metrology: Calibration, Form Deviation and Strategy of Measurement2007

    • Author(s)
      K. Takamasu, S. Takahashi, M. Abbe, R. Furutani
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Experimental Verification fbr Super-resolution Optical Inspection fbr Semiconductor Defect by using Standing Wave Illumination Shift2007

    • Author(s)
      Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kioshi Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift2007

    • Author(s)
      S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Stud on Scanning Suareness Measurement Method and Uncertainty Estimation2007

    • Author(s)
      Y. Chen, Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Analysis of Lateral Resoltition Improvement for Fluorescence Microscopy using Standing Evanescent Light2007

    • Author(s)
      S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] An Optical and Confocal Microscopic System for Nanostereolithography Using Evanescent Light Eliminate of the Nonlinearity in Heterode Interferometer2007

    • Author(s)
      Y. Kajihara, T. Takeuchi, S. Takahashi K. Takamasu
    • Organizer
      ISMTII2007
    • Place of Presentation
      Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Uncertain Evaluation of CMM b Modelin with Satial Constraint2007

    • Author(s)
      M. Abbe M. Nara K. Takamasu
    • Organizer
      ISMQC 2007
    • Place of Presentation
      India
    • Related Report
      2007 Annual Research Report
  • [Presentation] Thin Film Thickness Measurement for Evaluation of Residual layer of Nano-Imprint Lithography Using Near-Field Optics2007

    • Author(s)
      S. Minamiguchi, S. Usuki, S. Takahashi, K. Takamasu
    • Organizer
      ISMQC 2007
    • Place of Presentation
      India
    • Related Report
      2007 Annual Research Report
  • [Presentation] Calibration of 6 DOF Parallel Mechanism Driven by Planar Motors2007

    • Author(s)
      Kiyoshi Takamasu, Keisuke Yoshida, Tatsuya Senoo, Xin Chen, Kiyoshi
    • Organizer
      ISMQC 2007
    • Place of Presentation
      India
    • Related Report
      2007 Annual Research Report
  • [Presentation] エバネッセント光を利用したナノ光造形法の研究(第9報)-DMDによるエバネッセント強度分布制御法の検討-2007

    • Author(s)
      武内 徹, 梶原 優介, 高橋 哲, 高増 潔
    • Organizer
      2007年度精密工学会秋季大会学術講演会
    • Place of Presentation
      旭川
    • Related Report
      2007 Annual Research Report
  • [Presentation] 平面リニアモータシステムの開発(第6報)-6自由度パラレルメカニズムの校正実験-2007

    • Author(s)
      吉田 敬亮, 妹尾 達也, 陳 欣, 小谷 潔, 高増 潔
    • Organizer
      2007年度精密工学会秋季大会学術講演会
    • Place of Presentation
      旭川
    • Related Report
      2007 Annual Research Report
  • [Presentation] 現場環境における三次元測定機の高精度化に関する研究(第5報)-時間的な影響を考慮した温度補正-2007

    • Author(s)
      大西 徹, 高瀬 省徳, 高増 潔
    • Organizer
      2007年度精密工学会秋季大会学術講演会
    • Place of Presentation
      旭川
    • Related Report
      2007 Annual Research Report
  • [Presentation] 半導体の線幅標準に関する研究(第2報)-ラインエッジの不確かさ要因-2007

    • Author(s)
      澤内 佑介, 高橋 哲, 高増 潔
    • Organizer
      2007年度精密工学会秋季大会学術講演会
    • Place of Presentation
      旭川
    • Related Report
      2007 Annual Research Report
  • [Presentation] 定在エバネッセント光を用いた超解像顕微法に関する研究(第4報)-定在波シフトによる変調散乱光観察実験-2007

    • Author(s)
      岡田 真一, 臼杵 深, 高橋 哲, 高増 潔
    • Organizer
      2007年度精密工学会秋季大会学術講演会
    • Place of Presentation
      旭川
    • Related Report
      2007 Annual Research Report
  • [Presentation] 近接場光を用いたナノインプリント残膜測定法に関する研究(第3報)-偏光特性を利用した残膜厚計測-2007

    • Author(s)
      南口 修一, 臼杵 深, 高橋 哲, 高増 潔
    • Organizer
      2007年度精密工学会秋季大会学術講演会
    • Place of Presentation
      旭川
    • Related Report
      2007 Annual Research Report
  • [Book] 日本機械学会編:機械工学便覧デザイン編β5計測工学2007

    • Author(s)
      高増潔他
    • Total Pages
      350
    • Publisher
      日本機械学会
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 日本機械学会編:機械工学便覧デザイン編β5計測工学2007

    • Author(s)
      高増 潔, 他
    • Total Pages
      350
    • Publisher
      日本機械学会
    • Related Report
      2007 Annual Research Report
  • [Book] 機械工学便覧デザイン編β3 加工学・加工機器(日本機械学会編 : )2006

    • Author(s)
      日本機械学会
    • Total Pages
      250
    • Publisher
      日本機械学会
    • Related Report
      2006 Annual Research Report
  • [Book] Precision Assembly Technologies for Mini and Micro Products (IFIP (International Federation for Information Processing) series Vol.198) (edited by Svetan Ratchev)2006

    • Author(s)
      Gheorghe Olea
    • Total Pages
      336
    • Publisher
      Precision Multi-Degrees-Of-Freedom Positioning Systems - Modular Design For Assembly Applications -
    • Related Report
      2005 Annual Research Report
  • [Book] 人と共存するコンピュータ・ロボット学(実世界情報システム)2004

    • Author(s)
      高増潔, 小谷潔(東京大学21世紀COE実世界情報プロジェクト)
    • Total Pages
      292
    • Publisher
      オーム社
    • Related Report
      2004 Annual Research Report
  • [Remarks] 「研究成果報告書概要(和文)」より

    • URL

      http://www.nanolab.t.u-tokyo.ac.jp/research.html

    • Related Report
      2007 Final Research Report Summary
  • [Remarks]

    • URL

      http://www.nanolab.t.u-tokyo.ac.jp/research.html

    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] 移動システム2005

    • Inventor(s)
      高増潔, 高橋哲, 小谷潔, 大和淳司
    • Industrial Property Rights Holder
      高増潔, 高橋哲, 小谷潔, 大和淳司
    • Industrial Property Number
      2005-134471
    • Filing Date
      2005-05-02
    • Related Report
      2005 Annual Research Report

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Published: 2004-04-01   Modified: 2016-04-21  

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