| Project/Area Number |
16300147
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Biomedical engineering/Biological material science
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| Research Institution | Toyohashi University of Technology (2005)
Ibaraki University (2004) |
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Principal Investigator |
SHIBATA Takayuki Toyohashi Univeristy of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (10235575)
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| Co-Investigator(Kenkyū-buntansha) |
HORIUCHI Osamu Toyohashi University of Technology, Faculty of Engineering, Professor, 工学部, 教授 (20029185)
MASUZAWA Toru Ibaraki University, Faculty of Engineering, Professor, 工学部, 教授 (40199691)
KISHIDA Akio Tokyo Medical and Dental University, Institute of Biomaterials and Bioengineering, Professor, 生体材料工学研究所, 教授 (60224929)
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| Project Period (FY) |
2004 – 2005
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| Project Status |
Completed (Fiscal Year 2005)
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| Budget Amount *help |
¥15,300,000 (Direct Cost: ¥15,300,000)
Fiscal Year 2005: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 2004: ¥12,700,000 (Direct Cost: ¥12,700,000)
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| Keywords | Cell surgery system / Nanoneedle / MEMS / BioMEMS / PZT thin film / Actuator / Gene transfer / Cell multiplication |
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| Research Abstract |
In order to realize cell surgery on a chip-based system, we have developed key devices such as a bio-microdevice actuated by piezoelectric thin film for the enhancement of cell functions (cell multiplication and gene transfer) by applying mechanical stimulation to cells and a nanoneedle array capable of introducing biomolecules of interest into living cells and the parallel extracting biomolecules expressed in the cells.
First, we optimized the design of the bio-microdevice using a finite element method (FEM). The maximum displacement at the center of a silicon nitride (Si_3N_4) diaphragm (with more than 100×100 μm^2 in size) was estimated to be more than the target value of 100 nm, when a voltage of 10 V was applied to the PZT thin film actuator. Moreover, we fabricated PZT thin film to be used as an actuator by a sol-gel method, and characterized its crystallographic structure. As a result, when pyrolysis at 320℃ for 1 min and then annealed at 600℃ for 1 min in air, PZT thin films with (111) orientation were obtained.
In addition, we developed a novel and simple micromachining technique for the fabrication of out-of-plane, hollow nanoneedles in array. An array of silicon dioxide (SiO_2) needles with a circler tip shape (an inner diameter of 3.5 μm, an outer diameter of 6.0 μm and a height of 45 μm) were successfully fabricated by a combination of an anisotropic deep reactive ion etching (DRIE) process for producing thorough holes into a Si substrate as a needle mold followed by wet oxidation and an isotropic XeF_2 etching process for leaving SiO_2 nanoneedle structures. In order to fabricate high-aspect-ratio microchannels and through holes in a glass substrate, a sand blasting technique using a polymer (PDMS) as a mask material, which was patterned using a thick photoresist (SU-8) as a mold, was also developed.
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