• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of Cell Surgery System on a Chip with Nanoneedle Array

Research Project

Project/Area Number 16300147
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Biomedical engineering/Biological material science
Research InstitutionToyohashi University of Technology (2005)
Ibaraki University (2004)

Principal Investigator

SHIBATA Takayuki  Toyohashi Univeristy of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (10235575)

Co-Investigator(Kenkyū-buntansha) HORIUCHI Osamu  Toyohashi University of Technology, Faculty of Engineering, Professor, 工学部, 教授 (20029185)
MASUZAWA Toru  Ibaraki University, Faculty of Engineering, Professor, 工学部, 教授 (40199691)
KISHIDA Akio  Tokyo Medical and Dental University, Institute of Biomaterials and Bioengineering, Professor, 生体材料工学研究所, 教授 (60224929)
Project Period (FY) 2004 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥15,300,000 (Direct Cost: ¥15,300,000)
Fiscal Year 2005: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 2004: ¥12,700,000 (Direct Cost: ¥12,700,000)
KeywordsCell surgery system / Nanoneedle / MEMS / BioMEMS / PZT thin film / Actuator / Gene transfer / Cell multiplication
Research Abstract

In order to realize cell surgery on a chip-based system, we have developed key devices such as a bio-microdevice actuated by piezoelectric thin film for the enhancement of cell functions (cell multiplication and gene transfer) by applying mechanical stimulation to cells and a nanoneedle array capable of introducing biomolecules of interest into living cells and the parallel extracting biomolecules expressed in the cells.
First, we optimized the design of the bio-microdevice using a finite element method (FEM). The maximum displacement at the center of a silicon nitride (Si_3N_4) diaphragm (with more than 100×100 μm^2 in size) was estimated to be more than the target value of 100 nm, when a voltage of 10 V was applied to the PZT thin film actuator. Moreover, we fabricated PZT thin film to be used as an actuator by a sol-gel method, and characterized its crystallographic structure. As a result, when pyrolysis at 320℃ for 1 min and then annealed at 600℃ for 1 min in air, PZT thin films with (111) orientation were obtained.
In addition, we developed a novel and simple micromachining technique for the fabrication of out-of-plane, hollow nanoneedles in array. An array of silicon dioxide (SiO_2) needles with a circler tip shape (an inner diameter of 3.5 μm, an outer diameter of 6.0 μm and a height of 45 μm) were successfully fabricated by a combination of an anisotropic deep reactive ion etching (DRIE) process for producing thorough holes into a Si substrate as a needle mold followed by wet oxidation and an isotropic XeF_2 etching process for leaving SiO_2 nanoneedle structures. In order to fabricate high-aspect-ratio microchannels and through holes in a glass substrate, a sand blasting technique using a polymer (PDMS) as a mask material, which was patterned using a thick photoresist (SU-8) as a mold, was also developed.

Report

(3 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • Research Products

    (22 results)

All 2005 2004

All Journal Article (22 results)

  • [Journal Article] Development of Bio-Microdevice Actuated by Piezoelectric Thin Film for Cell Culture2005

    • Author(s)
      T.Shibata, Y.Makita, T.Masuzawa, A.Kishida, E.Makino, T.Mineta
    • Journal Title

      Proc. 5th Int. Conf. and 7th Annual General Meeting of the European Soc. for Precision Engineering and Nanotechnology

      Pages: 777-780

    • NAID

      110004075360

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 細胞機能制御のためのMEMS細胞加振デバイスの開発2005

    • Author(s)
      吉田典央, 柴田隆行, 堀内 宰, 増澤 徹, 岸田晶夫
    • Journal Title

      電気学会研究会資料 (リニアドライグ研究会)

      Pages: 57-60

    • NAID

      10017108627

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] ナノ微小振動と細胞2005

    • Author(s)
      増澤 徹, 草間 淳, 木村孝之, 柴田隆行, 岸田晶夫, 木村 剛
    • Journal Title

      第3回生活支援工学系学会連合大会講演論文集

      Pages: 80-80

    • NAID

      130001056271

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] 細胞機能制御のための圧電駆動型バイオマイクロデバイスの開発2005

    • Author(s)
      吉田典央, 柴田隆行, 水上良明, 堀内 宰, 増澤 徹 ほか
    • Journal Title

      精密工学会秋季大会学術講演会講演論文集

      Pages: 87-88

    • NAID

      130004657211

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] オンチップ細胞サージェリーシステムのためのナノニードルアレイの開発-シリコンのドライエッチング特性の評価-2005

    • Author(s)
      伊藤圭介, 柴田隆行, 水上良明, 堀内 宰, 増澤 徹 ほか
    • Journal Title

      精密工学会秋季大会学術講演会講演論文集

      Pages: 93-94

    • NAID

      130004657245

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of bio-microdevice actuated by piezoelectric thin film for cell culture2005

    • Author(s)
      T.Shibata, Y.Makita, T.Masuzawa, A.Kishida, E.Makino, T.Mineta
    • Journal Title

      Proc.of 5th International Conference and 7th Annual General Meeting of the European Society for Precision Engineering and Nanotechnology

      Pages: 777-780

    • NAID

      110004075360

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of MEMS device for enhancement of cell functions with mechanical stimulation2005

    • Author(s)
      N.Yoshida, T.Shibata, O.Horiuchi, T.Masuzawa, A.Kishida
    • Journal Title

      The Papers of Technical Meeting on Linear Drives, TEE Japan (in Japanese)

      Pages: 57-60

    • NAID

      10017108627

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Nano-vibration and cells2005

    • Author(s)
      J.Kusama, T.Masuzawa, T.Kimura, T.Shibata, A.Kishida, T.Kimura
    • Journal Title

      Proc.of the 21st Conference of the Society of Life Support Technology and the 5th Conference of the Japanese Society for Wellbeing Science and Assistive Technology (in Japanese) 80

    • NAID

      130001056271

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of bio-microdevice actuated by piezoelectric thin film for enhancement of cell functions2005

    • Author(s)
      N.Yoshida, T.Shibata, Y.Mizukami, O.Horiuchi, T.Masuzawa, T.Mineta, E.Makino
    • Journal Title

      Proc.of the Japan Society for Precision Engineering (JSPE) Autumn Conference (in Japanese)

      Pages: 87-88

    • NAID

      130004657211

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of nanoneedle array for cell surgery in chip-based system - Dry etching characteristics of silicon by deep RIE and XeF_2 etching2005

    • Author(s)
      K.Itoh, T.Shibata, Y.Mizukami, O.Horiuchi, T.Masuzawa, T.Mineta, E.Makino
    • Journal Title

      Proc.of the Japan Society for Precision Engineering (JSPE) Autumn Conference (in Japanese)

      Pages: 93-94

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of Bio-Microdevice Actuated by Piezoelectric Thin Film for Cell Culture2005

    • Author(s)
      T.Shibata, Y.Makita, T.Masuzawa, A.Kishida, E.Makino, T.Mineta
    • Journal Title

      Proc.of 5th International Conference and 7th Annual General Meeting of the European Society for Precision Engineering and Nanotechnology

      Pages: 777-780

    • NAID

      110004075360

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 細胞機能制御のためのMEMS細胞加振デバイスの開発2005

    • Author(s)
      吉田典央, 柴田隆行, 堀内 宰, 増澤 徹, 岸田晶夫
    • Journal Title

      電気学会研究会資料(リニアドライブ研究会)

      Pages: 57-60

    • NAID

      10017108627

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 細胞機能制御のための圧電駆動型バイオマイクロデバイスの開発2005

    • Author(s)
      吉田典央, 柴田隆行, 水上良明, 堀内 宰, 増澤 徹 ほか
    • Journal Title

      2005年度精密工学会秋季大会学術講演会講演論文集

      Pages: 87-88

    • NAID

      130004657211

    • Related Report
      2005 Annual Research Report
  • [Journal Article] オンチップ細胞サージェリーシステムのためのナノニードルアレイの開発-シリコンのドライエッチング特性の評価-2005

    • Author(s)
      伊藤圭介, 柴田隆行, 水上良明, 堀内 宰, 増澤 徹 ほか
    • Journal Title

      2005年度精密工学会秋季大会学術講演会講演論文集

      Pages: 93-94

    • NAID

      130004657245

    • Related Report
      2005 Annual Research Report
  • [Journal Article] セルカルチャーのための圧電駆動型マイクロ細胞培養チップの開発2004

    • Author(s)
      蒔田喜之, 柴田隆行, 増澤 徹, 岸田晶夫, 牧野英司
    • Journal Title

      日本機械学会関東支部茨城講演会講演論文集

      Pages: 211-212

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 高精度ブラスト加工による微細パターンの形成とバイオチップへの応用2004

    • Author(s)
      安井 剛, 柴田隆行, 牧野英司
    • Journal Title

      日本機械学会関東支部茨城講演会講演論文集

      Pages: 215-216

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] ナノバイブレーションによる細胞増殖促進装置の開発2004

    • Author(s)
      草間 淳, 石丸正臣, 増澤 徹, 木村孝之, 柴田隆行, 岸田晶夫
    • Journal Title

      日本機械学会関東支部茨城講演会講演論文集

      Pages: 209-210

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 微小振動刺激の細胞機能への影響-水平振動刺激と垂直振動刺激の違い-2004

    • Author(s)
      石丸正臣, 増澤 徹, 柴田隆行, 草間 淳, 岸田晶夫, 木村 剛
    • Journal Title

      第2回生活支援工学系学会連合大会講演論文集

      Pages: 227-228

    • NAID

      130001056112

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of bio-microdevice actuated by piezoelectric thin film for cell culture2004

    • Author(s)
      Y.Makita, T.shibata, T.Masuzawa, A.Kishida, E.Makino
    • Journal Title

      Proc.of Ibaraki Distinct Conference of the Japan Society of Mechanical Engineers (in Japanese) No.040-3

      Pages: 211-212

    • NAID

      110004075360

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fine pattering by blasting technique and its application to the fabrication of biochip2004

    • Author(s)
      T.Yasui, T.shibata, E.Makino
    • Journal Title

      Proc.of Ibaraki Distinct Conference of the Japan Society of Mechanical Engineers (in Japanese) No.040-3

      Pages: 215-216

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Accelerating system of cell multiplication with nanometer vibration2004

    • Author(s)
      J.Kusama, M.Ishimaru, T.Masuzawa, T.Kimura, T.Shibata, A.Kishida
    • Journal Title

      Proc.of Ibaraki Distinct Conference of the Japan Society of Mechanical Engineers (in Japanese) No.040-3

      Pages: 209-210

    • NAID

      110004075359

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Effect of the cell function on a nano meter oscillation stimulus - The difference between a horizontal oscillating stimulus and a vertical oscillating stimulu2004

    • Author(s)
      M.Ishimaru, T.Masuzawa, T.Shibata, J.Kusama, A.Kishida, T.Kimura
    • Journal Title

      Proc.of the 20th Conference of the Society of Life Support Technology and the 4th Conference of the Japanese Society for Wellbeing Science and Assistive Technology (in Japanese)

      Pages: 227-228

    • NAID

      130001056112

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary

URL: 

Published: 2004-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi