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Cost reduction and performance improvement of electric field measurement in plasmas by laser-induced fluorescence-dip spectroscopy

Research Project

Project/Area Number 16340181
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionNagoya University

Principal Investigator

SASAKI Koichi  Nagoya University, Graduate School of Engineering, Associate Professor, 大学院工学研究科, 助教授 (50235248)

Co-Investigator(Kenkyū-buntansha) SUGAI Hideo  Nagoya University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授 (40005517)
KONO Akihiro  Nagoya University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授 (40093025)
Project Period (FY) 2004 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥14,300,000 (Direct Cost: ¥14,300,000)
Fiscal Year 2006: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 2005: ¥6,400,000 (Direct Cost: ¥6,400,000)
Fiscal Year 2004: ¥6,300,000 (Direct Cost: ¥6,300,000)
KeywordsLaser-induced fluorescence-dip spectroscopy / Measurement of sheath electric field / Cost reduction / Diode laser / Argon / Stark spectroscopy
Research Abstract

The objective of this project is to reduce the equipment cost and to improve the data acquisition efficiency of the electric field measurement by laser-induced fluorescence-dip spectroscopy. The research results are summarized as follows. 1) We proposed excitation-observation schemes which are compatible with the use of diode lasers. 2) We analyzed the proposed scheme by rate equations. We found that the intensity of laser-induced fluorescence (LIF) was reduced temporally even when cw diode lasers were used for excitation. We examined the reduction ratio and the duration of the temporal reduction of LIF. 3) We demonstrated a two-step excitation scheme using a pulsed tunable laser and a diode laser. 4) To realize the excitation scheme using two diode lasers, we constructed a spectroscopy system employing a photon counter and an acoustic-optical modulator. 5) We showed the possibility that the less significant reduction LIF in the two-step excitation was attributed to the cascade transition from the laser-excited state. 6) We proposed a two-route scheme as an alternative excitation-observation scheme. We demonstrated the reduction of LIF by the two-route scheme. 7) We proposed an excitation-observation scheme employing a two-step excitation and cavity-ringdown absorption spectroscopy. 8) We demonstrated the enhancement of the data acquisition efficiency by employing a two-dimensional LIF spectroscopy system. 9) We compared the experimentally observed structure of sheathe electric field in an electronegative plasma with a theory based on a fluid model. We summarized the agreement and the discrepancy between the experimental and theoretical results.

Report

(4 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • Research Products

    (9 results)

All 2007 2005 2004

All Journal Article (9 results)

  • [Journal Article] Distribution of electric field in the sheath of an electronegative plasma2007

    • Author(s)
      K.Takizawa, A.Kono, K.Sasaki
    • Journal Title

      Appl. Phys. Lett. 90・1

      Pages: 11503-11503

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Ultra-sensitive measurement of sheath electric field by laser-induced fluorescence-dip spectroscopy2007

    • Author(s)
      U Czarnetzki, K. Sasaki
    • Journal Title

      J. Plasma Fusion Res. 83・3

      Pages: 215-215

    • NAID

      110006271892

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Distribution of electric field in the sheath of an electronegative plasma2007

    • Author(s)
      K.Takizawa, A.Kono, K.Sasaki
    • Journal Title

      Appl. Phys. Lett. Vol.90, No.1

      Pages: 11503-11503

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Ultra-sensitive measurement of sheath electric field by laser-induced fluorescence-dip spectroscopy2007

    • Author(s)
      U Czarnetzki, K. Sasaki
    • Journal Title

      J. Plasma Fusion Res. Vol.83, No.3

      Pages: 215-215

    • NAID

      110006271892

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Development of a measurement method for sheath electric field by laser-induced fluorescence-dip spectroscopy using a diode laser as the light source2005

    • Author(s)
      N.Asano, K.Sasaki
    • Journal Title

      "Deutschland in Japan Jahr" Plasma Science and Technology Symposium, Nagoya, Japan

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Sensitive measurement of electric field distributions in low-pressure Ar plasmas by laser-induced fluorescence-dip spectroscopy2004

    • Author(s)
      K.Takizawa, K.Sasaki, A.Kono
    • Journal Title

      Appl.Phys.Lett. 84・2

      Pages: 185-187

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Observation of the electric field structure in the sheath of electronegative plasmas by laser-induced fluorescence-dip spectroscopy2004

    • Author(s)
      K.Takizawa, K.Sasaki
    • Journal Title

      J.Plasma Fusion Res. 80・1

      Pages: 3-4

    • NAID

      110003827621

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Structure of sheath electric field in electronegative Ar/SF_6 plasmas measured by laser-induced fluorescence-dips spectroscopy2004

    • Author(s)
      K.Sasaki, K.Takizawa, A.Kono
    • Journal Title

      Abstracts of 57th Annual Gaseous Electronics Conference.

      Pages: 49-49

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Development of laser-induced fluorescence-dip spectroscopy of argon for sensitive measurements of electric field in reactive plasmas2004

    • Author(s)
      K.Sasaki, K.Takizawa, A.Kono
    • Journal Title

      Proc.International COE Forum on Plasma Science and Technology

      Pages: 141-142

    • Related Report
      2004 Annual Research Report

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Published: 2004-04-01   Modified: 2017-10-12  

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