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Development of the highly-efficient single crystal substrates by the flux epitaxy method

Research Project

Project/Area Number 16350110
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic industrial materials
Research InstitutionThe University of Tokyo (2005)
Tokyo Institute of Technology (2004)

Principal Investigator

KOINUMA Hideomi  The University of Tokyo, Graduate School of Frontier Sciences, Research Fellow, 大学院新領域創成科学研究科, リサーチフェロー (70011187)

Co-Investigator(Kenkyū-buntansha) MATSUMOTO Yuji  The University of Tokyo, Tokyo Institute of Technology, Materials and Structures Laboratory, Lecturer, 応用セラミックス研究所, 講師 (60302981)
宮澤 信太郎  信光社株式会社, 理事
Project Period (FY) 2004 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥16,100,000 (Direct Cost: ¥16,100,000)
Fiscal Year 2005: ¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 2004: ¥12,300,000 (Direct Cost: ¥12,300,000)
KeywordsLaser Molecular Beam Epitaxy / Combinatorial thin film fabrication / ternary composition spread films / Flux method / single crystal thin films / 3元組成傾斜膜法
Research Abstract

1. in-situ observation of molten Bi-Cu-O flux on MgO (001) single crystal substrates by laser microscope
The morphology change and dynamic motion of Bi-Cu-O flux on Mg0 (001) single crystal substrates were observed by an in-situ laser microscope during melting of the flux under a vacuum and an atmospheric pressure. The melting point of the coalescence motion of molten droplets in a vacuum was higher than that under the air, and the coalescence frequency of droplets was larger than that under the air. These results lead clear difference of activation energies of flux droplets at the melting.
2. Surface treatment of ZnO single crystal substrates
The approach to the surfaces treatment of single crystal oxides using stable Bi-Cu-O flux was examined under high temperature and in a vacuum. In the macroscopic range, the flux treatment caused slight roughening of the surface and a bit degradation of crystallinity. In the microscopic range, however, the flux treatment suggests removal of the processing distortion because RBS measurement of the treated surface shows that the shift of each atom from its ideal position was reduced,
3. First realization of ScMgAlO4 (SCAM) thin film by the use of flux solid-phase epitaxy
It is suitable for preparation of the refractory materials, because Bi-Cu-O flux is stable under high temperature and a vacuum. After amorphous-like flux and raw materials were deposited on a sapphire substrate, it was calcinated in the electric furnace. The x-ray diffraction patterns of obtained films showed the growth of oriented SCAM films(submitted as patent). To our knowledge, this is the first report for crystalline SCAM thin films.

Report

(3 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • Research Products

    (40 results)

All 2006 2005 2004 Other

All Journal Article (28 results) Book (2 results) Patent(Industrial Property Rights) (10 results)

  • [Journal Article] Perfect <Bi_4Ti_3O_12> single-crystal films via flux-mediated epitaxy2006

    • Author(s)
      R.Takahashi, Y.Yonezawa, M.Ohtani, M.Kawasaki, K.Nakajima, T.Chikyow, H.Koinuma, Y.Matsumoto
    • Journal Title

      Advanced Functional Materials 16

      Pages: 485-491

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Perfect Bi4Ti3O12 single-crystal films via flux-mediated epitaxy2006

    • Author(s)
      R.Takahashi, Y.Yonezawa, M.Ohtani, M.Kawasaki, K.Nakajima, T.Chikyow, H.Koinuma, Y.Matsumoto
    • Journal Title

      Advanced Functional Materials 16

      Pages: 485-491

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Flux-assisted reactive solid phase epitaxy of highly c-axis oriented <Ru(Eu_1.5Ce_0.5)Sr_2Cu_2O_10-5> thin films2005

    • Author(s)
      W.Q.Lu, Y.Yamamoto, V.V.Petrykin, M.Kakihana, H.Koinuma, K.Shibuya, M.Lippmaa, Y.Matsumoto
    • Journal Title

      Physica C-Superconductivity and Its Applications 422

      Pages: 46-50

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] c-axis oriented epitaxial <Ru(Eu_1.5Ce_0.5)Sr_2Cu_2O_10-d> thin films growth by flux-mediated solid phase epitaxy2005

    • Author(s)
      W.Q.Lu, Y.Yamamoto, V.V.Petrykin, M.Kakihana, Y.Matsumoto, U.S.Joshi, H.Koinuma, T.Hasegawa
    • Journal Title

      Thin Solid Films 486

      Pages: 79-81

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Flux-mediated epitaxy : general application in vapor phase epitaxy to single crystal quality of complex oxide films2005

    • Author(s)
      Y.Matsumoto, R.Takahashi, H.Koinuma
    • Journal Title

      Journal of Crystal Growth 275

      Pages: 325-330

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Computer design of combinatoriak shadow mask for ternary composition spread library2005

    • Author(s)
      R.Takahashi, Y.Matsumoto, H.Koinuma
    • Journal Title

      Measurement Science & Technology 16

      Pages: 292-295

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Flux-assisted reactive solid phase epitaxy of highly c-axis oriented Ru(Eu1.5Ce0.5)Sr2Cu2O10-δ thin films2005

    • Author(s)
      W.Q.Lu, Y.Yamamoto, V.V.Petrykin, M.Kakihana, H.Koinuma, K.Shibuya, M.Lippmaa, Y.Matsumoto
    • Journal Title

      Physica C 422

      Pages: 46-50

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] c-axis oriented epitaxial Ru(Eu1.5Ce0.5)Sr2Cu2010-d thin films grown by flux-mediated solid phase epitaxy2005

    • Author(s)
      W.Q.Lu, Y.Yamamoto, V.V.Petrykin, M.Kakihana, Y.Matsumoto, U.S.Joshi, H.Koinuma, T.Hasegawa
    • Journal Title

      Thin Solid Films 486

      Pages: 79-81

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Computer design of combinatorial shadow mask for ternary composition spread library2005

    • Author(s)
      R.Takahashi, Y.Matsumoto, H.Koinuma
    • Journal Title

      Measurement Science & Technology 16

      Pages: 292-295

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Computer Design of Combinatorial Shadow Mask for Ternary Composition Spread Library2005

    • Author(s)
      R.Takahashi, Y.Matsumoto, H.Koinuma
    • Journal Title

      Meas.Sci.Technol., 16

      Pages: 282-295

    • Related Report
      2005 Annual Research Report
  • [Journal Article] C-axis oriented epitaxial Ru(Eu_<1.5>Ce_<0.5>)Sr_2Cu_2O_<10-d> thin films grown by flux-mediated solid phase epitaxy2005

    • Author(s)
      W.Q.Lu, Y.Yamamoto, V.V.Peyrykin, M.Kakihana, Y.Matsumoto, U.S.Joshi, H.Koinuma, T.Hasegawa
    • Journal Title

      Thin Solid Film 486

      Pages: 79-81

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Flux-assisted Reactive Solid Phase Epitaxy of highly c-Axis oriented RuRu(Eu_<1.5>Ce_<0.5>)Sr_2Cu_2O_<10-d> Thin films2005

    • Author(s)
      W.Q.Lu, Y.Yamamoto, V.V.Peyrykin, M.Kakihana, K.Shibuya, M.Lippmaa, Y.Matsumoto, H.Koinuma
    • Journal Title

      Physica C 422

      Pages: 46-50

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Perfect Bi_4Ti_3O_<12> Single-Crystal Films via Flux-Mediated Epitaxy2005

    • Author(s)
      R.Takahashi, Y.Yonezawa, M.Ohtani, M.Kawasaki, K.Nakajima, T.Chikyow, H.Koinuma, Y.Matsumoto
    • Journal Title

      Adv.Funct.Mater. 16

      Pages: 485-491

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Highly c-oriented <RuSr2(Eu1.5Ce0.5)Cu2O10-delta> thin film growth by pulsed laser deposition and subsequent post-annealing2004

    • Author(s)
      W.Q.Lu, Y.Yamamoto, I.Ohkubo, V.V.Petrykin, M.Kakihana, Y.Matsumoto, H.Koinuma
    • Journal Title

      Physica C-Superconductivity and Its Applications 403

      Pages: 21-24

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of <Nd1-xCaxBa2Cu3O7-delta (x=0-0.3)> single crystalline films by tri-phase epitaxy2004

    • Author(s)
      R.Takahashi, Y.Matsumoto, T.Kohno, M.Kawasaki, H.Koinuma
    • Journal Title

      Journal of Crystal Growth 262

      Pages: 308-312

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] High-Throughput Screening of Flux Materials for Single Crystal Growth by Combinatorial Pulsed Laser Deposition2004

    • Author(s)
      R.Takahashi, T.Tanigawa, Y.Yamamoto, Y.Yonezawa, Y.Matsumoto, H.Koinuma
    • Journal Title

      MRS Fall Meeting Proceedings 804

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Mathematical design of linear action masks for binary and ternary composition spread film library2004

    • Author(s)
      Y.Yamamoto, R.Takahashi, Y.Matsumoto, T.Chikyow, H.Koinuma
    • Journal Title

      Applied Surface Science 223

      Pages: 9-13

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] フラックスエピタキシー : 気相成長における酸化物薄膜の相制御と高品質化2004

    • Author(s)
      松本 祐司, 鯉沼 秀臣
    • Journal Title

      応セラ研70周年記念論文集

      Pages: 70-73

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Highly c-oriented RuSr2(Eu1.5Ce0.5)Cu2010-delta thin film growth by pulsed laser deposition and subsequent post-annealing2004

    • Author(s)
      W.Q.Lu, Y.Yamamoto, I.Ohkubo, V.V.Petrykin, M.Kakihana, Y.Matsumoto, H.Koinuma
    • Journal Title

      Physica C 403

      Pages: 21-24

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of Nd1-xCaxBa2Cu307-delta (x=0-0.3) single crystalline films by tri-please epitaxy2004

    • Author(s)
      R.Takahashi, Y.Matsumoto, T.Kohno, M.Kawasaki, H.Koinuma
    • Journal Title

      Journal of Crystal Growth 262

      Pages: 308-312

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 「研究成果報告書概要(欧文)」より2004

    • Author(s)
      Yuji Matsumoto, Hideomi Koinuma
    • Journal Title

      Materials and Structures Laboratory 70m anniversary collective treatise

      Pages: 70-73

    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 「研究成果報告書概要(欧文)」より2004

    • Author(s)
      Ryota Takahashi, Yuji Matsumoto
    • Journal Title

      Combinatorial Technology : Open the future 'craftsmanship' world : 6.1.1 Combinatorial Flux Epitaxy (Japanese, Maruzen)

      Pages: 222-222

    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Highly c-oriented RuSr2(Eu1.5Ce0.5)Cu2010-δ Thin Film Growth by Pulsed Laser Deposition and Subsequent Post-annealing2004

    • Author(s)
      W.Q.Lu, Y.Yamamoto, I.Ohkubo, V.V.Petrykin, M.Kakihana, Y.Matsumoto, H.Koinuma
    • Journal Title

      physica C Vol.403/1-2

      Pages: 21-24

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Mathematical design of linear action masks for binary and ternary composition spread film library2004

    • Author(s)
      Yukio Yamamoto, Ryota Takahashi, Yuji Matsumoto, Toyohiro Chikyow, Hideomi Koinuma
    • Journal Title

      Appl.Surf.Sci. 223

      Pages: 9-13

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication of Nd1-xCaxBa2Cu307-d (x=0^〜0.3) single crystalline films by tri-phase epitaxy2004

    • Author(s)
      R.Takahashi, Y.Matsumoto, T.Kohno, M.Kawasaki, H.Koinuma
    • Journal Title

      Journal of Crystal Growth 262-1

      Pages: 308-312

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Hign-Throughput Screening of Flux Materials for Single Crystal Growth by Combinatorial Pulsed Laser Deposition2004

    • Author(s)
      R.Takahashi, T.Tanigawa, Y.Yamamoto, Y.Yonezawa, Y.Matsumoto, H.Koinuma
    • Journal Title

      MRS Fall meeting proceedings 804

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Flux-mediated Epitaxy : New approach in vapor phase epitaxy to single crystal quality of complex oxide films2004

    • Author(s)
      Y.Matsumoto, R.Takahashi, H.Koinuma
    • Journal Title

      ornal of Crystal Growth-on line

    • Related Report
      2004 Annual Research Report
  • [Journal Article] フラックスエピタキシー:気相成長における酸化物薄膜の相制御と高品質化2004

    • Author(s)
      松本祐司, 鯉沼秀臣
    • Journal Title

      応セラ70周年記念論文集

      Pages: 70-73

    • Related Report
      2004 Annual Research Report
  • [Book] コンビナトリアルテクノロジー 明日を開く'ものつくり'の世界 6.1.1 コンビナトリアルフッラクスエピタキシー2004

    • Author(s)
      高橋 竜太, 松本 祐司
    • Total Pages
      222
    • Publisher
      丸善
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Book] コンビナトリアルテクノロジー 明日を開く‘ものつくり'の世界 6.1.1コンビナトリアルフラックスエピタキシー2004

    • Author(s)
      高橋 竜太, 松本 祐司
    • Total Pages
      222
    • Publisher
      丸善
    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] 薄膜基板の製造法2006

    • Inventor(s)
      鯉沼秀臣, 松本祐司, 石井誉
    • Industrial Property Rights Holder
      東工大, 科学技術振興機構, 信光社
    • Industrial Property Number
      2006-073731
    • Filing Date
      2006-03-17
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 金属酸化物単結晶基板の平坦化方法及び金属酸化物単結晶基板2005

    • Inventor(s)
      鯉沼秀臣, 松本祐司, 高橋竜太
    • Industrial Property Rights Holder
      東京工業大学
    • Filing Date
      2005-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] ビスマスを構成元素に含む多元系酸化物のナノ構造の作製方法2004

    • Inventor(s)
      鯉沼秀臣, 松本祐司, 高橋竜太
    • Industrial Property Rights Holder
      科学技術振興機構
    • Filing Date
      2004-05-20
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] Bi層状化合物ナノプレート、Bi層状化合物ナノプレート配列体、及びその製造方法、並びにそれを用いた装置2004

    • Inventor(s)
      鯉沼秀臣, 松本祐司, 高橋竜太
    • Industrial Property Rights Holder
      科学技術振興機構
    • Filing Date
      2004-08-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] ビスマスを構成元素に含む多元系酸化物のナノ構造の作製方法2004

    • Inventor(s)
      鯉沼秀臣, 松本祐司, 高橋竜太
    • Industrial Property Rights Holder
      科学技術振興機構
    • Filing Date
      2004-05-21
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] ビスマスを構成元素に含む多元系酸化物単結晶の製造方法2004

    • Inventor(s)
      鯉沼 秀臣, 松本 祐司, 高橋 竜太
    • Industrial Property Rights Holder
      科学技術振興機構
    • Filing Date
      2004-05-20
    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] Bi層状化合物ナノプレート、Bi層状化合物ナノプレート配列体、及びその製造方法、並びにそれを用いた装置2004

    • Inventor(s)
      鯉沼 秀臣, 松本 祐司, 高橋 竜太
    • Industrial Property Rights Holder
      科学技術振興機構
    • Filing Date
      2004-08-06
    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] 金属酸化物単結晶基板表面の平坦化方法及び金属酸化物単結晶基板2004

    • Inventor(s)
      鯉沼 秀臣, 松本 祐司, 高橋 竜太
    • Industrial Property Rights Holder
      東京工業大学
    • Filing Date
      2004-08-30
    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] ビスマスを構成元素に含む多元系酸化物単結晶の製造方法2004

    • Inventor(s)
      鯉沼 秀臣, 松本 祐司, 高橋 竜太
    • Industrial Property Rights Holder
      科学技術振興機構
    • Filing Date
      2004-05-21
    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] ScAlMgO_4薄膜基板の製造方法

    • Inventor(s)
      鯉沼 秀臣, 松本 祐司, 石井 誉
    • Industrial Property Rights Holder
      東工大, 科学技術振興機構, 信光社
    • Related Report
      2005 Annual Research Report

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Published: 2004-04-01   Modified: 2016-04-21  

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