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Creation of room temperature spintronics devices by oxide nanostructures with strongly correlated electron system.

Research Project

Project/Area Number 16360007
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionOsaka University

Principal Investigator

TANAKA Hidekazu  Osaka University, Institute of scientific and Industrial Research, Associate Professor, 産業科学研究所, 助教授 (80294130)

Project Period (FY) 2004 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥14,100,000 (Direct Cost: ¥14,100,000)
Fiscal Year 2006: ¥4,000,000 (Direct Cost: ¥4,000,000)
Fiscal Year 2005: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 2004: ¥5,900,000 (Direct Cost: ¥5,900,000)
KeywordsFerromagnetic metal oxides / pulsed-laser deposition technique / atomic force microscope / nano-imprint / nano-fabrication techniques / spintronics / field-effect transistor / room temperature / 強磁性酸化物 / MRAM / レーザMBE / 室温スピン偏極 / AFMリソグラフィー / トンネル接合素子 / 電界効果トランジスタ / 室温強磁性 / (La,Ba)MnO_3 / キャリア濃度変調 / 磁気光学効果 / 強磁性層のヒステリシス / 強相関電子系酸化物 / 省電力磁気メモリ
Research Abstract

Ferromagnetic transition metal oxides, including perovskite manganites, represent the most promising materials for use as devices controlling magnetic states by an electric field at high temperature with high efficiency. This is because these materials possess a strong intrinsic relationship between charge and magnetism, showing ferromagnetism above room temperature by adjustment of carrier filling, in addition, particular magnetoelectric properties such as a colossal magnetoresistance phenomenon. We have constructed field-effect transistor structures that consist of a ferromagnetic (La, Ba)MnO_3 channel and a ferroelectric PbZr_<0.2>Ti_<0.8>O_3 gate insulator with the aim of controlling the metal-insulator transition at room temperature by applying an electric field. Investigations have revealed that the transition temperature changed from 280.5 K to 283.0 K (±26 μC/cm_2) for the La_<0.85>Ba_<0.15>MnO_3 channel layer. These shifts, which are linearly proportional to the magnitude of f … More erroelectric remnant polarization, are induced by the accumulation charge due to the electric field. The change in magnetism using an electric field was also evaluated by measuring the magnetocircular dichroism (MCD) signal. As a result, a reversible control of ferromagnetism was archived at room temperature.
Fe_<3-x>Mn_xO_4 (x=0, 0.1, or 0.5 : FMO) and Fe_<3-x>Zn_xO_4 (x=0, 0.5, and 0.9 : FZO) epitaxial thin films with very high T_c as new tunable ferromagnetic semiconductor were successfully prepared using a pulsed-laser deposition technique. It was confirmed that these films could be fabricated at higher substrate temperatures. FMO and FZO films showed spin polarization of the carrier at RT, as confirmed by anomalous Hall coefficient measurements. Their electrical conductivity and magnetic properties were systematically modulated with changing Mn or Zn substitution without lowering mobility. The HX-PES measurements confirmed the systematic change of the valence band electronic structures These characteristics allowed for the construction of functional oxide heterostructure-based spin devices, namely ferromagnetic electrical field effect transistors with ferroelectric gate Pb (Zr, Ti)O3 and ferromagnetic diode with Nb-doped SrTiO_3, working at room temperature.
The original nano-fabrication techniques (Mo-nano mask atomic force microscope (AFM) nanolithography, Mo lift off AFM & nano-imprint lithography) was developed to construct robust nano-structures with atomically flat surface of ferromagnetic perovskite manganites, spinel ferrite down to 30nm in size. We found (La, Pr, Ca)MnO_3 channel structures with 500 nm width showed an extremely sharp metallic transition from charge ordered insulator to ferromagnetic metal at low temperature. Such extremely sharp metallic transition can be accounted for electronic phase separation phenomena. Furthermore, we successfully constructed nano-sized side gate FET structure in new high T_c ferromagnetic oxide semiconductors of (Fe, Mn)_3O_4 and (Fe, Zn)_3O_4. Less

Report

(4 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • Research Products

    (55 results)

All 2006 2005 2004

All Journal Article (46 results) Book (7 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Fabrication of sub-50 nm (La,Ba)MnO_3 ferromagnetic nanochannels by atomic force microscopy lithography and their electrical properties2006

    • Author(s)
      M.Hirooka, Y.Yanagisawa, T.Kanki, H.Tanaka, T.Kawai
    • Journal Title

      Appl. Phys. Lett. 89

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Fe_<3-x>Zn_xO_4 thin film as tunable high Curie temperature ferromagnetic semiconductor2006

    • Author(s)
      J.Takaobushi, H.Tanaka, T.Kawai, S.Ueda, J-J Kim, M.Kobata, E.Ikenaga, M.Yabashi, K.Kobayashi, Y.Nishino, D.Miwa, K.Tamasaku, T.Ishikawa
    • Journal Title

      Appl. Phys. Lett. 89

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] (Fe,Mn)_3O_4 Nanochannels Fabricated by AFM Local-Oxidation Nanolithography using Mo/Poly(methyl methacrylate) Nanomasks2006

    • Author(s)
      L.Pellegrino, Y.Yanagisawa, M.Ishikawa, T.Matsumoto, H.Tanaka, T.Kawai
    • Journal Title

      Adv. Materials 18

      Pages: 3099-3104

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Electronic structure of strained (La_<0.85>Ba_<0.15>)MnO_3 thin films with room-temperature ferromagnetism investigated by hard x-ray photoemission spectroscopy2006

    • Author(s)
      H.Tanaka, Y.Takata, K.Horiba, M.Taguchi, A.Chainani, T.Kawai, K.Kobayashi, et al.
    • Journal Title

      Phys. Rev. B 73

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Fabrication of sub-50 nm (La, Ba)MnO_3 ferromagnetic nanochannels by atomic force microscopy lithography and their electrical properties2006

    • Author(s)
      M.Hirooka, Y.Yanagisawa, T.Kanki, H.Tanaka, T.Kawai
    • Journal Title

      Appl.Phys.Lett. 89

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fe_<3-x>Zn_x0_4 thin film as tunable high Curie temperature ferromagnetic semiconductor2006

    • Author(s)
      J.Takaobushi, H.Tanaka, T.Kawai, S.Ueda, J-J.Kim, M.Kobata, E.Ikenaga, M.Yabashi, K.Kobayashi, Y.Nishino, D.Miwa, K.Tamasaku, T.Ishikawa
    • Journal Title

      Appl.Phys.Lett. 89

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] (Fe, Mn)_3O_4 Nanochannels Fabricated by AFM Local-Oxidation Nanolithography using Mo/Poly (methyl methacrylate) Nanomasks2006

    • Author(s)
      L.Pellegrino, Y.Yanagisawa, M.Ishikawa, T.Matsumoto, H.Tanaka, T.Kawai
    • Journal Title

      Adv.Materials 18

      Pages: 3099-3104

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Electronic structure of strained (La_<0.85>Ba_<0.15>)Mn0_3 thin films with room-temperature ferromagnetism investigated by hard x-ray photoemission spectroscopy,2006

    • Author(s)
      H.Tanaka, Y.Takata, K.Horiba, M.Taguchi, A.Chainani, T.Kawai, K.Kobayashi, et al.
    • Journal Title

      Phys.Rev. B, 73

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structural and magnetic properties of Nd_<0.7>Ce_<0.3>MnO_3 thin films,2006

    • Author(s)
      T.Yanagida, T.Kanki, B.Vilquin, H.Tanaka, T.Kawai
    • Journal Title

      J. Appl. Phys. 99

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Fe_<3-X>Zn_xO_4 thin film as tunable high Curie temperature ferromagnetic semiconductor2006

    • Author(s)
      J.Takaobushi, H.Tanaka, T.Kawai, S.Ueda, J-J Kim, M.Kobata, E..Ikenaga, M.Yabashi, K.Kobayashi, Y.Nishino, D.Miwa, K.Tamasaku, T.Ishikawa
    • Journal Title

      Appl. Phys. Lett. 89

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Nano-scale patterning of (La,Pr,Ca)MnO_3 thin film using atomic force microscopy lithography and their electrical properties2006

    • Author(s)
      Y.Yanagisawa, L.Pellegrino, H.Tanaka, T.Kawai
    • Journal Title

      J. Appl. Phys. 100

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Magnetism,microstructure,and photoelectron spectroscopy of Nd_<0.7>Ce_<0.3>MnO_3 thin films2006

    • Author(s)
      T.Yanagida, H.Tanaka, T.Kawai, E Ikenaga, M.Kobata, Jung-Jin Kim, K.Kobayashi
    • Journal Title

      Phys. Rev. B 73

    • Related Report
      2006 Annual Research Report
  • [Journal Article] (Fe,Mn)_3O_4 Nanochannels Fabricated by AFM Local-Oxidation Nanolithography using Mo/Poly(methyl methacrylate) Nanomasks2006

    • Author(s)
      L.Pellegrino, Y.Yanagisawa, M.Ishikawa, T.Matsumoto, H.Tanaka, T Kawai
    • Journal Title

      Adv. Materials 18

      Pages: 3099-3104

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Electric control of room temperature ferromagnetism in a Pb(Zr_<0.2>Ti_<0.8>)O_3/La_<0.85>Ba_<0.15>MnO_3 field-effect transistor2006

    • Author(s)
      T.Kanki, H.Tanaka, T.Kawai
    • Journal Title

      Appl. Phys. Lett. 89

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Investigation on Ce-doped LnMnO_3 (Ln = La, Nd) thin films by laser molecular beam epitaxy method2006

    • Author(s)
      T.Yanagida, T.Kanki, B.Vilquin, H.Tanaka, T.Kawai
    • Journal Title

      VACUUM 80

      Pages: 780-782

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Digitalized magnetoresistance observed in (La,Pr,Ca)MnO_3 nanochannel structures2006

    • Author(s)
      Y.Yanagisawa, H.Tanaka, T.Kawai, L.Pellegrino
    • Journal Title

      Appl. Phys. Lett. 89

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Electronic structure of strained (La0.85Ba0.15)MnO3 thin films with room-temperature ferromagnetism investigated by hard x-ray photoemission spectroscopy2006

    • Author(s)
      H.Tanaka, Y.Takata, K.Horiba, M.Taguchi, A.Chainani, S.Shin, D.Miwa, K.Tamasaku, Y.Nishino, T.Ishikawa, E.Ikenaga, M.Awaji, A.Takeuchi, T.Kawai, K.Kobayashi
    • Journal Title

      Phys.Rev.B 73

      Pages: 94403-94403

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Magnettiism Miicrostructture and Phottoelecttron Specttroscopy of Nd0.7Ce0.3MnO3 Thiin Fiillms2006

    • Author(s)
      T.Yanagida, H.Tanaka, T.Kawai, E.Ikenaga, M.Kobata, J.-J.Kim, K.Kobayashi
    • Journal Title

      Phys.Rev.B (in press)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Preparation of Highly Conductive Mn-Doped Fe_3O_4 Thin Films with Spin Polarization at Room Temperature using a Pulsed Laser Deposition Technique2005

    • Author(s)
      M.Ishikawa, H.Tanaka, T.Kawai
    • Journal Title

      Appl. Phys. Lett,. 86

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Suppressing low-frequency noise in La_<0.8>Ba_<0.2>MnO_3 films by a simple method of controlling film thickness2005

    • Author(s)
      H.Tohyama, H.Tanaka, T.Kawai, M.Kanai
    • Journal Title

      Appl. Phys. Lett. 87

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Transport and magnetic properties of La_<0.9>Ce_<0.1>MnO_3 thin films2005

    • Author(s)
      T.Yanagida, T.Kanki, B.Vilquin, H.Tanaka, T.Kawai
    • Journal Title

      J. Appl. Phys,. 97

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Hall effect in strained La_<0.85>Ba_<0.15>MnO_3 thin films2005

    • Author(s)
      T.Kanki, T.Yanagida, B.Vilquin, H.Tanaka, T.Kawai
    • Journal Title

      Phys. Rev. B 71

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Preparation of Highly Conductive Mn-Doped Fe_3O_4 Thin Films with Spin Polarization at Room Temperature using a Pulsed Laser Deposition Technique2005

    • Author(s)
      M.Ishikawa, H.Tanaka, T.Kawai
    • Journal Title

      Appl.Phys.Lett 86

      Pages: 222504-222504

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Suppressing low-frequency noise in La_<0.8>Ba_<0.2>MnO_3 films by a simple method of controlling film thickness2005

    • Author(s)
      H.Tohyama, H.Tanaka, T.Kawai, M.Kanai
    • Journal Title

      Appl.Phys.Lett. 87

      Pages: 102504-102504

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Transport and magnetic properties of La_<0.9>Ce_<0.1>MnO_3 thin films2005

    • Author(s)
      T.Yanagida, T.Kanki, B.Vilquin, H.Tanaka, T.Kawai
    • Journal Title

      J.Appl.Phys 97

      Pages: 33905-33905

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Hall effect in strained La_<0.85>Ba_<0.15>MnO_3 thin films2005

    • Author(s)
      T.Kanki, T.Yanagida, B.Vilquin, H.Tanaka, T.Kawai
    • Journal Title

      Phys.Rev. B, 71

      Pages: 12403-12403

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Preparation of Highly Conductive Mn-Doped Fe3O4 Thin Films with Spin Polarization at Room Temperature using a Pulsed Laser Deposition Technique2005

    • Author(s)
      M.Ishikawa, H.Tanaka, T.Kawai
    • Journal Title

      Appl.Phys.Lett. 86

      Pages: 222504-222504

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Suppressing low-frequency noise in La0.8Ba0.2MnO3 films by a simple method of controlling film thickness2005

    • Author(s)
      H.Touyama, H.Tanaka, T.Kawai, M.Kanai
    • Journal Title

      Appl.Phys.Lett. 87

      Pages: 102504-102504

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Transport and magnetic properties of La0.9Ce0.1MnO3 thin films2005

    • Author(s)
      T.Yanagida, T.Kanki, B.Vilquin, H.Tanaka, T.Kawai
    • Journal Title

      J.Appl.Phys,. 97

      Pages: 33905-33905

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Hall effect in strained La0.85Ba0.15MnO3 thin films2005

    • Author(s)
      T.Kanki, T.Yanagida, B.Vilquin, H.Tanaka, T.Kawai
    • Journal Title

      Phys.Rev.B 71

      Pages: 12403-12403

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Nanopatterning of perovskite manganite thin films by atomic force microscope lithography2005

    • Author(s)
      R.W.Li, T.Kanki, H.Tohyama, M.Hirooka, H.Tanaka, T.Kawai
    • Journal Title

      Nanotechnology 16

      Pages: 28-31

    • Related Report
      2005 Annual Research Report
  • [Journal Article] AFMリソグラフィーによる機能性酸化物のナノ加工2005

    • Author(s)
      田中 秀和, 廣岡 誠之, 柳澤 吉彦, 川合 知二
    • Journal Title

      電子材料 44

      Pages: 24-29

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Hall effect in strained La85Ba0.15MnO3 thin films2005

    • Author(s)
      T.Kanki, T.Yanagida, B.Vilquin, H.Tanaka, T.Kawai
    • Journal Title

      Phys, Rev.B 71

      Pages: 12403-12403

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Transport and magnetic properties of La0.9Ce0.1MnO3 thin films2005

    • Author(s)
      T.Yanagida, T.Kanki, B.Vilquin, H.Tanaka, T.Kawai
    • Journal Title

      J.Appl.Phys. 97

      Pages: 33905-33905

    • Related Report
      2004 Annual Research Report
  • [Journal Article] AFM Lithography in Perovskite Manganite La_<0.8>Ba_<0.2>MnO_3 Films2004

    • Author(s)
      R-W.Li, T.Kanki, H.Tohyama, J.Zhang, H.Tanaka, A.Takagi, T.Matsumoto, T.Kawai
    • Journal Title

      J. Appl. Phys. 95

      Pages: 7091-7093

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Origin of metal-insulator transition temperature enhancement in La_<0.8>Ba_<0.2>MnO_3 thin films as determined by structural analysis2004

    • Author(s)
      M.Kanai, H.Tanaka, T.Kawai
    • Journal Title

      Phys. Rev. B. 70

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 電界効果トランジスタPb(Zr,Ti)O_3/(La,Ba)MnO_3を用いた金属絶縁体転移温度の室温制御2004

    • Author(s)
      神吉輝夫, 田中秀和, 川合知二
    • Journal Title

      日本応用磁気学会誌 28

      Pages: 356-359

    • NAID

      110002809719

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nano-Scale Modification of Electrical and Magnetic Properties on a Fe_3O_4 Thin Film by AFM Lithography2004

    • Author(s)
      M.Hirooka, H.Tanaka, R-W.Li, T Kawai
    • Journal Title

      Appl. Phys. Lett. 85

      Pages: 1811-1813

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] AFM Lithography in Perovskite Manganite La_<0.8>Ba_<0.2>Mn0_3 Films2004

    • Author(s)
      R-W.Li, T.Kanki, H.Tohyama, J.Zhang, H.Tanaka, A.Takagi, T.Matsumoto, T.Kawai
    • Journal Title

      J.Appl.Phys. 95

      Pages: 7091-7093

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Origin of metal-insulator transition temperature enhancement in La_<0.8>Ba_<0.2>MnO_3 thin films as determined by structural analysis2004

    • Author(s)
      M.Kanai, H.Tanaka, T.Kawai
    • Journal Title

      Phys.Rev.B. 70

      Pages: 125109-125109

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 電界効果トランジスタ Pb (Zr, Ti)O_3/(La, Ba) MnO_3 を用いた金属絶縁体転移温度 の室温制御",2004

    • Author(s)
      神吉輝夫, 田中秀和, 川合知二
    • Journal Title

      日本応用磁気学会誌 28

      Pages: 356-359

    • NAID

      110002809719

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nano-Scale Modification of Electrical and, Magnetic Properties on a Fe_3O_4 Thin Film by AFM Lithography,2004

    • Author(s)
      M.Hirooka, H.Tanaka, R-W.Li, T.Kawai
    • Journal Title

      Appl.Phys.Lett. 85

      Pages: 1811-1813

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] AFM Lithography in Perovskite Manganite La0.8Ba0.2MnO3 Films2004

    • Author(s)
      R.Li, T.Kanki, H.Tohyama, J Zhang, H.Tanaka, A.Takagi, T.Matsumoto, T.Kawai
    • Journal Title

      J.Appl.Phys. 95

      Pages: 7091-7093

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Metal-insulator transition and ferromagnetism phenomena in La0.7Ce0.3MnO3 thin films : Formation of Ce-rich nanoclusters2004

    • Author(s)
      T.Yanagida, T.Kanki, B.Vilquin, H.Tanaka, T.Kawai
    • Journal Title

      Phys.Rev.B 70

      Pages: 184437-184437

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Origin of metal-insulator transition temperature enhancement in La0.8Ba0.2MnO3 thin films as determined by structural analysis2004

    • Author(s)
      M.Kanai, H.Tanaka, T.Kawai
    • Journal Title

      Phys.Rev.B 70

      Pages: 125109-125109

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Relaxation of Nanopatterns on Nb-doped SrTiO3 Surface2004

    • Author(s)
      R.Li, T.Kanki, M.Hirooka, A.Takagi, T.Matsumoto, H.Tanaka, T.Kawai
    • Journal Title

      Appl.Phys.Lett. 84

      Pages: 2670-2672

    • Related Report
      2004 Annual Research Report
  • [Book] 「固体物理」82006

    • Author(s)
      田中 秀和, 川合 知二
    • Total Pages
      62
    • Publisher
      (株)アグネ技術センター
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Book] 生産現場・開発現場において役立つ薄膜作製技術2006

    • Author(s)
      田中 秀和(分担執筆)
    • Total Pages
      323
    • Publisher
      リアライズ理工センター/リアライズAT
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] 生産現場・開発現場において役立つ薄膜作製技術2006

    • Author(s)
      田中 秀和, (分担執筆)
    • Total Pages
      323
    • Publisher
      リアライズ理工センター/リアライズAT
    • Related Report
      2006 Annual Research Report
  • [Book] 電子材料 2月号 特集「新機能材料とナノテクノロジー」2005

    • Author(s)
      田中 秀和, 廣岡 誠之, 柳澤 吉彦, 川合 知二
    • Total Pages
      130
    • Publisher
      (株)工業調査会
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] 大阪大学 低温センター便り2005

    • Author(s)
      田中 秀和, 川合 知二
    • Total Pages
      22
    • Publisher
      大阪大学
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] 電子材料 2月号 特集「新機能材料とナノテクノロジー」2005

    • Author(s)
      田中秀和, 廣岡誠之, 柳澤吉彦, 川合知二
    • Publisher
      (株)工業調査会
    • Related Report
      2004 Annual Research Report
  • [Book] 大阪大学 低温センター便り2005

    • Author(s)
      田中秀和, 川合知二
    • Publisher
      大阪大学
    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] パターニング方法、積層体、並びにアレイ基板および電子デバイス2006

    • Inventor(s)
      鈴木直毅, 田中秀和, 川合知二
    • Industrial Property Rights Holder
      大阪大学
    • Industrial Property Number
      2006-228382
    • Filing Date
      2006-08-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 強磁性伝導体材料およびその製造方法、並びに磁気抵抗素子、電界効果トランジスタ2005

    • Inventor(s)
      田中 秀和, 石川 瑞恵, 川合 知二
    • Industrial Property Rights Holder
      大阪大学
    • Industrial Property Number
      2005-050216
    • Filing Date
      2005-02-25
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2005 Annual Research Report 2004 Annual Research Report

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Published: 2004-04-01   Modified: 2016-04-21  

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